US4529620A
Expired / Lapsed
US
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Method of making deformable light modulator structure
Assignee: New York Institute of Technology
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Filing: 1984-01-30
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Granted: 1985-07-16
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Expires: 2004-01-30
Abstract
Abstract The disclosure is directed to improvements in a method of making a solid state light modulator structure for use in an apparatus for generating an image from a video signal. A semiconductor device is provided, the device having an array of spaced charge storage electrodes on a surface thereof. A layer of elastomer material, preferably a silicone gel, is applied over said surface. A plastic pellicle is applied over the elastomer layer. Layers of gold and silver are then successively applied over the pellicle layer.
Inventors
- 👤 William E. Glenn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 23:13
CPC Classifications
G; G02; G02B; G02B26/00
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
56 words
A method of making a solid-state light modulator structure, comprising the steps of: providing a semiconductor device having an array of charge storage electrodes on a surface thereof: applying a layer of elastomer material over said surface; applying a plastic pellicle over said elastomer layer; and applying at least one conductive layer over said pellicle layer.
Claim 2
Independent Claim
56 words
A method of making a solid-state light modulator structure, comprising the steps of: providing a semiconductor device having an array of charge storage electrodes on a surface thereof: applying a layer of elastomer material over said surface; applying a plastic pellicle over said elastomer layer; and applying at least one conductive layer over said pellicle layer.
Claim 3
Dependent Claim
24 words
The method as defined by claim 1, wherein said step of applying a layer of elastomer material comprises applying a layer of silicone gel.
Claim 4
Dependent Claim
42 words
The method as defined by claim 1, wherein said step of applying at least one conductive layer comprises successively applying a first metal conductive layer over said pellicle layer and a second metal conductive and reflective layer over said first metal layer.
Claim 5
Dependent Claim
42 words
The method as defined by claim 2, wherein said step of applying at least one conductive layer comprises successively applying a first metal conductive layer over said pellicle layer and a second metal conductive and reflective layer over said first metal layer.
Claim 6
Dependent Claim
37 words
The method as defined by claim 3, wherein said step of applying a first metal layer comprises applying a layer of gold, and said step of applying a second metal layer comprises applying a layer of silver.
Claim 7
Dependent Claim
37 words
The method as defined by claim 4, wherein said step of applying a first metal layer comprises applying a layer of gold, and said step of applying a second metal layer comprises applying a layer of silver.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-07-15 | 1989-01-14 | 1989-07-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-07-15 | 1993-01-14 | 1993-07-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-07-15 | 1997-01-14 | 1997-07-16 | $7700.00 | Window Closed / Lapsed |