US4526644A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Treatment device utilizing plasma
Assignee: Canon Inc
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Filing: 1984-04-04
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Granted: 1985-07-02
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Expires: 2004-04-04
Abstract
Abstract A treatment device utilizing plasma performs treatment by exposing a material to be treated to a plasma atmosphere formed by converting at least either one of fluorine and a fluorine compound into gas plasma, and said device comprises a structural member for forming the space for maintaining said plasma atmosphere, which is constituted of a stainless steel structure member coated on its surface exposed to said plasma atmosphere with a metal film which can difficultly form a fluoride.
Inventors
- 👤 Yasutomo Fujiyama
- 👤 Osamu Kamiya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 22:38
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32458; H01J37/32477; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/505; C23C16/509; C23C16/5093; H10; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P50/00; H10P50/20; H10P50/24; H10P50/242; Y; Y10; Y10S; Y10S156/00; Y10S156/914
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
78 words
A treatment device utilizing plasma which performs treatment by exposing a material to be treated to a plasma atmosphere formed by converting at least either one of fluorine and a fluorine compound into gas plasma, which device comprises a structural member for forming the space for maintaining said plasma atmosphere, which is constituted of a stainless steel structure member coated on its surface exposed to said plasma atmosphere with a metal film which can difficultly form a fluoride.
Claim 2
Dependent Claim
78 words
A treatment device utilizing plasma which performs treatment by exposing a material to be treated to a plasma atmosphere formed by converting at least either one of fluorine and a fluorine compound into gas plasma, which device comprises a structural member for forming the space for maintaining said plasma atmosphere, which is constituted of a stainless steel structure member coated on its surface exposed to said plasma atmosphere with a metal film which can difficultly form a fluoride.
Claim 3
Dependent Claim
31 words
A treatment device according to claim 1, wherein the metal film is a film of a metal selected from the group consisting of nickel, chromium, gold, aluminum, copper, silver and tin.
Claim 4
Dependent Claim
17 words
A treatment device according to claim 1, wherein the fluorine compound is a fluorinated hydrocarbon type gas.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-07-01 | 1988-12-31 | 1989-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-07-01 | 1992-12-31 | 1993-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-07-01 | 1996-12-31 | 1997-07-02 | $7700.00 | Window Closed / Lapsed |