US4523544A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for glow discharge deposition of a thin film
Assignee: Toshiba Corp
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Filing: 1984-03-05
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Granted: 1985-06-18
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Expires: 2004-03-05
Abstract
Abstract A thin amorphous film-forming apparatus comprising a plurality of discharge unit chambers connected in a loop, each provided with a glow discharge generating means and a space for storing a substrate, gas supply and discharge valves are provided between the unit chambers, and means for periodically changing the opening and closing of the valves.
Inventors
- 👤 Nozomu Harada
- 👤 Hiroshi Ito
- 👤 Toshikazu Adachi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 22:16
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32018; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/505; C23C16/507; H01J37/32431; H01J37/3244; H10; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
105 words
An apparatus for forming a thin film on a substrate by the decomposition of a compound gas, containing a target thin film component, by means of glow discharge, which further comprises: a main body having a plurality of discharge unit chambers, each provided with a glow discharge generating means and a space for housing the substrate and connected in a loop via chamber-connecting portions, sets of gas supply valves and gas discharge valves being connected to the chamber-connecting portions; and means for sequentially switching on and off said gas supply valves and said gas discharge valves every time a predetermined period of time has elapsed.
Claim 2
Independent Claim
105 words
An apparatus for forming a thin film on a substrate by the decomposition of a compound gas, containing a target thin film component, by means of glow discharge, which further comprises: a main body having a plurality of discharge unit chambers, each provided with a glow discharge generating means and a space for housing the substrate and connected in a loop via chamber-connecting portions, sets of gas supply valves and gas discharge valves being connected to the chamber-connecting portions; and means for sequentially switching on and off said gas supply valves and said gas discharge valves every time a predetermined period of time has elapsed.
Claim 3
Dependent Claim
21 words
An apparatus, according to claim 1, which further comprises stop valves between said gas supply valves and said gas discharge valves.
Claim 4
Dependent Claim
19 words
An apparatus according to claim 1, wherein said glow discharge generating means comprises capacitive coupling-type glow discharge generating means.
Claim 5
Dependent Claim
12 words
An apparatus according to claim 1, wherein said unit chambers number four.
Claim 6
Dependent Claim
38 words
An apparatus according to claim 1, wherein a plurality of sets of looped unit chambers are prepared, and the compound gas is supplied to said plurality of sets of looped unit chambers through a common gas supply pipe.
Claim 7
Independent Claim
106 words
An apparatus for forming a thin film on a substrate by the decomposition of a compound gas, containing a thin film component, by means of glow discharge, characterized by comprising: a plurality of discharge unit chambers, each provided with a glow discharge generating means and a space for housing the substrate and connected in a loop via chamber-connecting means, gas supply valves and gas discharge valves being connected to the chamber-connecting means; and means for sequentially switching on and off gas supply valves and said gas discharge valves one after another at a predetermined time cycle such that said compound gas flows in a predetermined direction.
Claim 8
Independent Claim
106 words
An apparatus for forming a thin film on a substrate by the decomposition of a compound gas, containing a thin film component, by means of glow discharge, characterized by comprising: a plurality of discharge unit chambers, each provided with a glow discharge generating means and a space for housing the substrate and connected in a loop via chamber-connecting means, gas supply valves and gas discharge valves being connected to the chamber-connecting means; and means for sequentially switching on and off gas supply valves and said gas discharge valves one after another at a predetermined time cycle such that said compound gas flows in a predetermined direction.
References Cited (Backward Citations)
US3108900A
Cited
US4404076A
Cited
JPS5764922A
Cited
US4389970A
Cited
US4452828A
Cited
US4438188A
Cited
US4430959A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-06-17 | 1988-12-17 | 1989-06-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-06-17 | 1992-12-17 | 1993-06-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-06-17 | 1996-12-17 | 1997-06-18 | $7700.00 | Window Closed / Lapsed |