← Back to Patent Explorer
US4517752A Expired / Lapsed US ⏱️ 0.0 years remaining

Splash retarder

Assignee: Machine Technology Inc
•
Filing: 1983-06-27
•
Granted: 1985-05-21
•
Expires: 2003-06-27
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract An apparatus and method for retarding splashback of liquids collected from a rotating workpiece is disclosed. In accordance with the apparatus, there is provided a work station upon which a workpiece, such as a semiconductor wafer, is positioned, a collecting means for collecting liquids discharged from the workpiece by rotation of the work station and a means for rotating the collecting means. Also in accordance with the present invention, the collecting means may be rotated separately from the work station but in the same direction as the work station. In accordance with the method, there is provided applying liquids to the workpiece, rotating work station with the workpiece positioned on it and rotating a collecting means in the same direction as the work station. Also in accordance with the invention, the apparatus may be combined with apparatus for a segregated drainage of first and second liquids such that splashback during collection of these liquids will be retarded.

Inventors

  • 👤 Michael J. Devico
  • 👤 Gary Hillman

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 16:10
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/162; F; F26; F26B; F26B5/00; F26B5/08

Claims Analysis

Total Claims: 23
Claim 1
Independent Claim 139 words
Splash-retarding apparatus, comprising a rotatable work station upon which a workpiece may be positioned, collecting means for collecting liquid discharged from a workpiece positioned on said work station, said collecting means includes a solid circumferential wall portion surrounding said work station so as to capture liquid discharged by centrifugal force from a workpiece positioned on said work station upon rotation of said work station, and rotating means for rotating said work station such that liquid on a workpiece positioned on said work station is discharged by centrifugal force toward said circumferential wall portion of said collecting means and for simultaneously rotating said collecting means in the same direction as said work station, whereby the splash of liquid impacting on said circumferential wall portion of said collecting means after its discharge from a workpiece on said work station is retarded.
Claim 2
Dependent Claim 139 words
Splash-retarding apparatus, comprising a rotatable work station upon which a workpiece may be positioned, collecting means for collecting liquid discharged from a workpiece positioned on said work station, said collecting means includes a solid circumferential wall portion surrounding said work station so as to capture liquid discharged by centrifugal force from a workpiece positioned on said work station upon rotation of said work station, and rotating means for rotating said work station such that liquid on a workpiece positioned on said work station is discharged by centrifugal force toward said circumferential wall portion of said collecting means and for simultaneously rotating said collecting means in the same direction as said work station, whereby the splash of liquid impacting on said circumferential wall portion of said collecting means after its discharge from a workpiece on said work station is retarded.
Claim 3
Dependent Claim 36 words
Apparatus in accordance with claim 1, wherein said rotating means includes means for rotating said collecting means in the said direction and at a speed at least as fast as the rotation of said work station.
Claim 4
Dependent Claim 12 words
Apparatus in accordance with claim 1, wherein said apparatus includes a drain.
Claim 5
Dependent Claim 25 words
Apparatus in accordance with claim 1, wherein said collecting means includes a cup-like member having a base which is surrounded by said circumferential wall portion.
Claim 6
Dependent Claim 17 words
Apparatus in accordance with claim 4, wherein said collecting means is concentrically disposed about said work station.
Claim 7
Dependent Claim 26 words
Apparatus in accordance with claim 1, wherein said rotating means includes first means for rotating said work station and second means for rotating said collecting means.
Claim 8
Dependent Claim 22 words
Apparatus in accordance with claim 1, wherein said rotating means includes motor means for rotating said work station and said collecting means.
Claim 9
Dependent Claim 28 words
Apparatus in accordance with claim 6, wherein said first and second rotating means includes first and second motor means for rotating said work station and said collecting means.
Claim 10
Dependent Claim 366 words
Splash-retarding apparatus, comprising a rotatable work station at which first and second processes are individually and sequentially performed on a workpiece, first collection means for collecting liquid generated during the performance of said first process upon a workpiece positioned on said work station, said first collection means including a solid circumferential wall portion arranged coaxially with respect to said work station, second collection means for collecting liquid generated during the performance of said second process upon a workpiece positioned on said work station, said second collection means includes a solid circumferential wall portion arranged coaxially with respect to said work station, moving means for axially moving said work station relative to said first collection means between a first position in which liquid generated during the performance of said first process is discharged by centrifugal force against said circumferential wall portion of said first collection means and a second position in which liquid generated during the performance of said second process is discharged by centrifugal force against said circumferential wall portion of said second collection means, whereby liquids generated during the performance of said first and second processes are collected separately by said first and second collection means, respectively, and rotating means for rotating said work station such that liquid contained on a workpiece positioned on said work station is discharged by centrifugal force toward said circumferential wall portions of said first and second collection means, for rotating said first collection means simultaneously with the work station in the same direction as said work station when said work station is in said first position, whereby the splash of liquid generated during the performance of said first process and impacting on said circumferential wall portion of said first collection means after its discharge from a workpiece on said work station is retarded, and for rotating said second collection means simultaneously with said work station in the same direction as said work station when said work station is in said second position, whereby the splash of liquid generated during the performance of said second process and impacting on said circumferential wall portion of said second collection means after its discharge from a workpiece on said work station is retarded.
Claim 11
Dependent Claim 366 words
Splash-retarding apparatus, comprising a rotatable work station at which first and second processes are individually and sequentially performed on a workpiece, first collection means for collecting liquid generated during the performance of said first process upon a workpiece positioned on said work station, said first collection means including a solid circumferential wall portion arranged coaxially with respect to said work station, second collection means for collecting liquid generated during the performance of said second process upon a workpiece positioned on said work station, said second collection means includes a solid circumferential wall portion arranged coaxially with respect to said work station, moving means for axially moving said work station relative to said first collection means between a first position in which liquid generated during the performance of said first process is discharged by centrifugal force against said circumferential wall portion of said first collection means and a second position in which liquid generated during the performance of said second process is discharged by centrifugal force against said circumferential wall portion of said second collection means, whereby liquids generated during the performance of said first and second processes are collected separately by said first and second collection means, respectively, and rotating means for rotating said work station such that liquid contained on a workpiece positioned on said work station is discharged by centrifugal force toward said circumferential wall portions of said first and second collection means, for rotating said first collection means simultaneously with the work station in the same direction as said work station when said work station is in said first position, whereby the splash of liquid generated during the performance of said first process and impacting on said circumferential wall portion of said first collection means after its discharge from a workpiece on said work station is retarded, and for rotating said second collection means simultaneously with said work station in the same direction as said work station when said work station is in said second position, whereby the splash of liquid generated during the performance of said second process and impacting on said circumferential wall portion of said second collection means after its discharge from a workpiece on said work station is retarded.
Claim 12
Dependent Claim 12 words
Apparatus in accordance with claim 9, wherein said apparatus includes a drain.
Claim 13
Dependent Claim 39 words
Apparatus in accordance with claim 9, wherein said apparatus includes a first drain for draining liquid generated during the performance of said first process and a second drain for draining liquid generated during the performance of said second process.
Claim 14
Dependent Claim 60 words
Apparatus in accordance with claim 9, wherein said first and second collection means include first and second cup-like members, said first cup-like member having a base which is surrounded by said circumferential wall portion of said first collection means, and said second cup-like member having a base which is surrounded by said circumferential wall portion of said second collection means.
Claim 15
Dependent Claim 20 words
Apparatus in accordance with claim 9, wherein said first and second collection means are concentrically disposed about said work station.
Claim 16
Dependent Claim 31 words
Apparatus in accordance with claim 9, wherein said rotating means includes first rotating means for rotating said work station and second rotating means for rotating said first and second collection means.
Claim 17
Dependent Claim 35 words
Apparatus in accordance with claim 9, wherein said rotating means includes first means for rotating said work station, second means for rotating said first collection means and third means for rotating said second collection means.
Claim 18
Dependent Claim 25 words
Apparatus in accordance with claim 9, wherein said rotating means includes motor means for rotating said work station and said first and second collection means.
Claim 19
Dependent Claim 32 words
Apparatus in accordance with claim 14, wherein said first and second rotating means include first and second motor means for rotating said work station and said first and second collection means, respectively.
Claim 20
Dependent Claim 36 words
Apparatus in accordance with claim 15, wherein said first, second and third rotating means include first, second and third motor means for rotating said work station, said first collection means and said second collection means, respectively.
Claim 21
Dependent Claim 186 words
Apparatus for retarding the splash of first and second liquids separately collected during the performance of first and second processes upon a workpiece at a work station, said apparatus comprising a work station at which said first and second processes are performed on said workpiece, first collection means for collecting said first liquid generated during the performance of said first process upon said workpiece, second collection means for collecting said second liquid generated during the performance of said second process upon said workpiece, rotating means for rotating said work station and said first and second collection means, said rotating means includes first means for rotating said work station, second means for rotating said first collection means and third means for rotating said second collection means, and directing means for directing said first liquid to said first collection means during the performance of said first process and said second liquid to said second collection means during the performance of said second process, whereby said first and second liquids may be separately collected and the splash of said liquids against said first and second collection means is retarded.
Claim 22
Dependent Claim 186 words
Apparatus for retarding the splash of first and second liquids separately collected during the performance of first and second processes upon a workpiece at a work station, said apparatus comprising a work station at which said first and second processes are performed on said workpiece, first collection means for collecting said first liquid generated during the performance of said first process upon said workpiece, second collection means for collecting said second liquid generated during the performance of said second process upon said workpiece, rotating means for rotating said work station and said first and second collection means, said rotating means includes first means for rotating said work station, second means for rotating said first collection means and third means for rotating said second collection means, and directing means for directing said first liquid to said first collection means during the performance of said first process and said second liquid to said second collection means during the performance of said second process, whereby said first and second liquids may be separately collected and the splash of said liquids against said first and second collection means is retarded.
Claim 23
Dependent Claim 37 words
Apparatus in accordance with claim 19, wherein said first, second and third rotating means includes first, second and third motor means, respectively, for rotating said work station, said first collection means and said second collection means, respectively.

References Cited (Backward Citations)

US1903174A Cited
US3742611A Cited
US3861584A Cited
US3920181A Cited
JPS5216875A Cited
US4087924A Cited
US4281031A Cited
US4445281A Cited
US4350282A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-05-20 1988-11-19 1989-05-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-05-20 1992-11-19 1993-05-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-05-20 1996-11-19 1997-05-21 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag