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US4517485A Expired / Lapsed US ⏱️ 0.0 years remaining

High-frequency piezoelectric resonator with reinforced electrode connection

Assignee: D'ELECTRIQUE ET DE PIEZO-ELECTRICITE CEPE Cie
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Filing: 1983-05-26
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Granted: 1985-05-14
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Expires: 2003-05-26
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Abstract

Abstract The high-frequency piezoelectric resonator comprises a quartz plate or disk having a region of reduced thickness which forms a diaphragm and is joined to the remainder of the plate or disk by means of a zone forming a step. A conductive electrode extends from the exterior of the disk or plate to the center of the thinned region and is provided with a conductive tongue constituted by a metallic film-layer of controlled thickness and disposed in the stepped zone. The method involves formation of the disk or plate by ion machining whereas the electrodes and the conductive tongue are formed by the sputtering technique.

Inventors

  • 👤 Marc Berte
  • 👤 Louis Bidard
  • 👤 Serge Lechopier

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 19:46
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/15; H03H9/17; H03H9/46; H03H9/54; H03H9/56; Y; Y10; Y10T; Y10T29/00; Y10T29/42

Claims Analysis

Total Claims: 3
Claim 1
Independent Claim 354 words
A high frequency piezoelectric resonator comprising: a disk comprising a predetermined thickness of piezoelectric material, said disk defining, in said piezoelectric material, a first surface, said disk including: means for defining a cavity in the first surface of said disk, said first surface surrounding said cavity, said cavity-defining means including: means for defining a second surface, said second surface defined in said piezoelectric material lying within said cavity, and means for defining, in said piezoelectric material, at least one stepped zone disposed between said first surface and said second surface and connecting said first surface with said second surface; and electrode means, disposed on said first surface, extending across said stepped zone, and disposed on said second surface, for establishing electrical contact with said second surface, said electrode means including: an electrode member, and conductive tongue means, extending across said stepped zone onto a portion of said second surface adjacent to said stepped zone, said conductive tongue means superimposed with said electrode member, said conductive tongue means comprising a layer of metallic film, said conductive tongue means for increasing the reliability of the electrical contact provided across said stepped zone by said electrode means, wherein: at least part of said conductive tongue means is disposed on said stepped zone, at least a part of said electrode member is disposed on the part of said conductive tongue means disposed on said stepped zone, the surface area of the part of said conductive tongue means disposed on said stepped zone being greater than the surface area of the part of said electrode member disposed on the part of said conductive tongue means which is disposed on said stepped zone, and said electrode member comprises a first portion shaped as a triangle having first and second sides of substantially equal length and a base of a length substantially different from the length of either of said first and second sides, said base being disposed on said first surface at the periphery of said disk, the vertex of said triangle connecting said first and second sides being disposed on said second surface at the center of said cavity.
Claim 2
Dependent Claim 354 words
A high frequency piezoelectric resonator comprising: a disk comprising a predetermined thickness of piezoelectric material, said disk defining, in said piezoelectric material, a first surface, said disk including: means for defining a cavity in the first surface of said disk, said first surface surrounding said cavity, said cavity-defining means including: means for defining a second surface, said second surface defined in said piezoelectric material lying within said cavity, and means for defining, in said piezoelectric material, at least one stepped zone disposed between said first surface and said second surface and connecting said first surface with said second surface; and electrode means, disposed on said first surface, extending across said stepped zone, and disposed on said second surface, for establishing electrical contact with said second surface, said electrode means including: an electrode member, and conductive tongue means, extending across said stepped zone onto a portion of said second surface adjacent to said stepped zone, said conductive tongue means superimposed with said electrode member, said conductive tongue means comprising a layer of metallic film, said conductive tongue means for increasing the reliability of the electrical contact provided across said stepped zone by said electrode means, wherein: at least part of said conductive tongue means is disposed on said stepped zone, at least a part of said electrode member is disposed on the part of said conductive tongue means disposed on said stepped zone, the surface area of the part of said conductive tongue means disposed on said stepped zone being greater than the surface area of the part of said electrode member disposed on the part of said conductive tongue means which is disposed on said stepped zone, and said electrode member comprises a first portion shaped as a triangle having first and second sides of substantially equal length and a base of a length substantially different from the length of either of said first and second sides, said base being disposed on said first surface at the periphery of said disk, the vertex of said triangle connecting said first and second sides being disposed on said second surface at the center of said cavity.
Claim 3
Dependent Claim 52 words
A resonator as in claim 1 wherein said conductive tongue means comprises a layer of metal shaped as a rectangle having a first side of a length substantially equal to the length of said base of said triangle, said first side disposed on said first surface at the periphery of said disk.

References Cited (Backward Citations)

US2095376A Cited
US2510811A Cited
US3222622A Cited
US3396287A Cited
US3694677A Cited
US3721841A Cited
US3940638A Cited
US4339683A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-05-13 1988-11-12 1989-05-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-05-13 1992-11-12 1993-05-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-05-13 1996-11-12 1997-05-14 $7700.00 Window Closed / Lapsed

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