US4516254A
Expired / Lapsed
US
⏱️ 0.0 years remaining
X-Ray lithographic apparatus
Assignee: Hitachi Ltd
•
Filing: 1983-12-02
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Granted: 1985-05-07
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Expires: 2003-12-02
Abstract
Abstract The present invention consists in an X-ray lithographic apparatus having an X-ray generator which generates X-rays, and a gastight chamber which is gastightly coupled to the X-ray generator and which holds a mask to be exposed to the X-rays, on its surface remote from the X-ray generator, characterized in that the gastight chamber is provided with a window on which a soft member softer than the mask is mounted.
Inventors
- 👤 Yoshihiro Komeyama
- 👤 Motoya Taniguchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 01:25
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/708; G03F7/70858; G03F7/709; G03F7/70216; G03F7/7035; G03F7/70808; G03F7/70866; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
69 words
In an X-ray lithographic apparatus having an X-ray generator which generates X-rays, and a gastight chamber which is gastightly coupled to the X-ray generator and which holds a mask to be exposed to the X-rays, on its surface remote from the X-ray generator; an X-ray lithographic apparatus characterized in that said gastight chamber is provided with a window on which a soft member softer than the mask is mounted.
Claim 2
Dependent Claim
69 words
In an X-ray lithographic apparatus having an X-ray generator which generates X-rays, and a gastight chamber which is gastightly coupled to the X-ray generator and which holds a mask to be exposed to the X-rays, on its surface remote from the X-ray generator; an X-ray lithographic apparatus characterized in that said gastight chamber is provided with a window on which a soft member softer than the mask is mounted.
Claim 3
Dependent Claim
58 words
An X-ray lithographic apparatus as defined in claim 1, wherein gas supply means is connected to said gastight chamber; said gas supply means comprising a gas source for preventing attenuation of the X-rays, and control means for controlling to a predetermined value a pressure of a gas to be supplied from said gas source to said gastight chamber.
Claim 4
Dependent Claim
37 words
An X-ray lithographic apparatus as defined in claim 1, wherein said window on which said soft member is mounted has an area larger than that of a portion of the mask to be exposed to the X-rays.
Claim 5
Dependent Claim
20 words
An X-ray lithographic apparatus as defined in claim 1, wherein said soft member is a film made of polyvinyl chloride.
Claim 6
Dependent Claim
29 words
An X-ray lithographic apparatus as defined in claim 1, wherein said soft member is disposed on that lower surface of said gastight chamber on which the mask is mounted.
Claim 7
Dependent Claim
32 words
An X-ray lithographic apparatus as defined in claim 1, wherein said soft member is disposed on a mask stage which holds the mask by suction and which is constructed, at least, tiltably.
References Cited (Backward Citations)
US4403336A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-05-06 | 1988-11-05 | 1989-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-05-06 | 1992-11-05 | 1993-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-05-06 | 1996-11-05 | 1997-05-07 | $7700.00 | Window Closed / Lapsed |