US4516050A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ion chamber for electron-bombardment ion sources
Assignee: Varian Semiconductor Equipment Associates Inc
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Filing: 1982-07-14
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Granted: 1985-05-07
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Expires: 2002-07-14
Abstract
Abstract A multipole electron-bombardment type ion source includes an ion chamber defined by chamber walls and magnetic elements of an electrically insulating, permanently magnetized material. The magnetic elements provide mechanical support for anode elements and electrically isolate the anode elements from the chamber walls. In a preferred embodiment, the magnetic elements and the anode elements form a layered structure.
Inventors
- 👤 Carl J. Russo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 02:53
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/08; H01J27/14
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
96 words
An electron-bombardment ion source comprising: an ion chamber having electrically conductive chamber walls; a cathode in said chamber for emitting electrons; anode means in said ion chamber for accelerating and collecting electrons; magnetic means in said ion chamber for producing a magnetic field which increases the ionization efficiency of said ion source, said magnetic means comprising an electrically insulating, permanently magnetized material which mechanically supports said anode means and electrically isolates said anode means from said chamber walls; means for introducing an ionizable gas into said chamber; and means for accelerating ions out of said chamber.
Claim 2
Dependent Claim
96 words
An electron-bombardment ion source comprising: an ion chamber having electrically conductive chamber walls; a cathode in said chamber for emitting electrons; anode means in said ion chamber for accelerating and collecting electrons; magnetic means in said ion chamber for producing a magnetic field which increases the ionization efficiency of said ion source, said magnetic means comprising an electrically insulating, permanently magnetized material which mechanically supports said anode means and electrically isolates said anode means from said chamber walls; means for introducing an ionizable gas into said chamber; and means for accelerating ions out of said chamber.
Claim 3
Dependent Claim
21 words
The ion source as defined in claim 1 wherein said magnetic means has a dc volume resistivity greater than 1000 ohm-centimeters.
Claim 4
Dependent Claim
18 words
The ion source as defined in claim 2 wherein said electrically insulating, permanently magnetized material is a ferrite.
Claim 5
Dependent Claim
14 words
The ion source as defined in claim 1 wherein said anode means comprises graphite.
Claim 6
Dependent Claim
82 words
The ion source as defined in claim 1 wherein said ion chamber is cylindrical and said chamber walls include a cylindrical wall and an end wall, wherein said anode means includes a plurality of annular anode elements adjacent to and spaced apart from said cylindrical wall and said end wall and wherein said magnetic means includes portions interposed between said anode elements so as to form a layered structure adjacent to the cylindrical wall and the end wall of said ion chamber.
Claim 7
Dependent Claim
25 words
The ion source as defined in claim 5 wherein said magnetic means includes a plurality of sector shaped elements interposed between said annular anode elements.
Claim 8
Dependent Claim
25 words
The ion source as defined in claim 5 wherein said magnetic means includes a plurality of annular magnetic elements interposed between said annular anode elements.
Claim 9
Dependent Claim
102 words
In an electron-bombardment ion source of the type including an ion chamber having electrically conductive chamber walls, a cathode in said chamber for emitting electrons, anode means in said ion chamber for accelerating and collecting electrons, magnetic means in said chamber for producing a magnetic field which increases the ionization efficiency of said ion source, means for introducing an ionizable gas into said chamber and means for accelerating ions out of said chamber, the improvement comprising: said magnetic means comprising an electrically insulating, permanently magnetized material which mechanically supports said anode means and electrically isolates said anode means from said chamber walls.
Claim 10
Dependent Claim
102 words
In an electron-bombardment ion source of the type including an ion chamber having electrically conductive chamber walls, a cathode in said chamber for emitting electrons, anode means in said ion chamber for accelerating and collecting electrons, magnetic means in said chamber for producing a magnetic field which increases the ionization efficiency of said ion source, means for introducing an ionizable gas into said chamber and means for accelerating ions out of said chamber, the improvement comprising: said magnetic means comprising an electrically insulating, permanently magnetized material which mechanically supports said anode means and electrically isolates said anode means from said chamber walls.
Claim 11
Dependent Claim
21 words
The improved source as defined in claim 8 wherein said magnetic means has a dc volume resistivity greater than 1000 ohm-centimeters.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-05-06 | 1988-11-05 | 1989-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-05-06 | 1992-11-05 | 1993-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-05-06 | 1996-11-05 | 1997-05-07 | $7700.00 | Window Closed / Lapsed |