US4510107A
Expired / Lapsed
US
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Method of making densified Si3 N4 /oxynitride composite with premixed silicon and oxygen carrying agents
Assignee: Ceradyne Inc
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Filing: 1983-07-19
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Granted: 1985-04-09
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Expires: 2003-07-19
Abstract
Abstract A method is disclosed for making a more densified silicon nitride comprising object under less stringent heating conditions without sacrificing physical properties. A mixture of silicon powder, 6-18% yttrium silicon oxynitride (a major proportion of which is the Y 10 Si 6 O 24 N 2 phase), 0.4-3% Al 2 O 3 , and possibly up to 2% of an oxynitride forming oxide (Y 2 O 3 ) is compacted, nitrided, and sintered to produce a silicon nitride/YSiO 2 N comprising object of relatively high density.
Inventors
- 👤 Andre Ezis
- 👤 Howard D. Blair
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 20:22
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/515; C04B35/58; C04B35/584; C04B35/591; C04B35/593; C04B35/5935; C04B35/622; C04B35/626; C04B35/62605; C04B35/62685; C04B2235/00; C04B2235/02; C04B2235/30; C04B2235/32; C04B2235/3205; C04B2235/3206; C04B2235/3217; C04B2235/3224; C04B2235/3225; C04B2235/3229; C04B2235/3231; C04B2235/3244; C04B2235/34; C04B2235/3409; C04B2235/3427; C04B2235/38; C04B2235/3852; C04B2235/3873; C04B2235/3878; C04B2235/3895; C04B2235/42; C04B2235/428; C04B2235/50; C04B2235/54; C04B2235/5409; C04B2235/5418; C04B2235/5436; C04B2235/65; C04B2235/656; C04B2235/6562; C04B2235/6567; C04B2235/658; C04B2235/6581; C04B2235/66; C04B2235/661; C04B2235/70; C04B2235/74; C04B2235/76; C04B2235/767; C04B2235/77; C04B2235/80; C04B2235/85; C04B2235/96; C04B2235/9669; C04B2235/9684
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
111 words
In a method of making a densified silicon nitride comprising object, wherein silicon powder is subjected to sequential heating including first a nitriding heating to form silicon nitride and second a heating to fuse the resulting silicon nitride, the improvement comprising having yttrium silicon oxynitride present with said silicon or silicon nitride prior to said heating to fuse, a major proportion of the yttrium silicon oxynitride is of the Y 10 Si 6 O 24 N 2 phase, said yttrium silicon oxynitride serving to dissolve said silicon nitride during said second heating to fuse and to convert to a more stable phase as a result of the second heating to fuse.
Claim 2
Dependent Claim
111 words
In a method of making a densified silicon nitride comprising object, wherein silicon powder is subjected to sequential heating including first a nitriding heating to form silicon nitride and second a heating to fuse the resulting silicon nitride, the improvement comprising having yttrium silicon oxynitride present with said silicon or silicon nitride prior to said heating to fuse, a major proportion of the yttrium silicon oxynitride is of the Y 10 Si 6 O 24 N 2 phase, said yttrium silicon oxynitride serving to dissolve said silicon nitride during said second heating to fuse and to convert to a more stable phase as a result of the second heating to fuse.
Claim 3
Dependent Claim
35 words
In the method of making of claim 1, wherein said Y 10 Si 6 O 24 N 2 phase converts to the Y 1 SiO 2 N phase under the conditions of heating to fuse.
Claim 4
Dependent Claim
55 words
In the method of making of claim 1, wherein yttrium silicon oxynitride of the Y 10 Si 6 O 24 N 2 phase is independently prepared and added to said silicon powder prior to said first nitriding heating, said Y 10 Si 6 O 24 N 2 phase remaining substantially unreacted during said nitriding heating.
Claim 5
Dependent Claim
66 words
In the method of making of claim 1, wherein yttrium silicon oxynitride of the Y 1 SiO 2 N phase and excess SiO 2 are present with said silicon powder prior to said nitriding heating, said Y 1 SiO 2 N and excess SiO 2 reacting during nitriding heating to form the Y 10 Si 6 O 24 N 2 phase prior to heating to fuse.
Claim 6
Dependent Claim
38 words
In the method of making of claim 4, wherein said excess SiO 2 is proportioned to be present in an amount needed to form Y 10 Si 6 O 24 N 2 from Y 1 SiO 2 N.
Claim 7
Dependent Claim
55 words
In the method of making of claim 3, wherein the yttrium silicon oxynitride is added to said silicon powder in an amount of 6-18% by weight of the resulting mixture and said Y 10 Si 6 O 24 N 2 phase constitutes at least 75% of the yttrium silicon oxynitride prior to heating to fuse.
Claim 8
Dependent Claim
20 words
In the method of making of claim 1, wherein said heating to fuse is carried out under inert atmospheric conditions.
Claim 9
Independent Claim
184 words
A method of making a densified silicon nitride/oxynitride composite, by the steps of: (a) shaping a substantially homogeneous particulate mixture of (i) silicon powder carrying 0.4-3.5% by weight SiO 2 of the silicon powder as a surface oxide, (ii) independently prepared yttrium silicon oxynitride in an amount of 6-18% by weight of the mixture and selected to be effective to dissolve silicon nitride at a temperature of 1760° C. or lower, (iii) a glass forming oxide effective to form a controlled small amount of glass silicate with other elements of said mixture upon heating, and (iv) up to 2% by weight of the mixture of Y 2 O 3 effective to react with any excess silica during heating to form a silicon oxynitride, said shaping being carried out to form an object of less than required dimension and density; (b) heating said body in a nitriding atmosphere without the use of pressure to produce a silicon nitride/oxynitride comprising object; and (c) densifying said shaped body at heat fusion, with or without the use of pressure, to constitute an object of required density and dimension.
Claim 10
Independent Claim
184 words
A method of making a densified silicon nitride/oxynitride composite, by the steps of: (a) shaping a substantially homogeneous particulate mixture of (i) silicon powder carrying 0.4-3.5% by weight SiO 2 of the silicon powder as a surface oxide, (ii) independently prepared yttrium silicon oxynitride in an amount of 6-18% by weight of the mixture and selected to be effective to dissolve silicon nitride at a temperature of 1760° C. or lower, (iii) a glass forming oxide effective to form a controlled small amount of glass silicate with other elements of said mixture upon heating, and (iv) up to 2% by weight of the mixture of Y 2 O 3 effective to react with any excess silica during heating to form a silicon oxynitride, said shaping being carried out to form an object of less than required dimension and density; (b) heating said body in a nitriding atmosphere without the use of pressure to produce a silicon nitride/oxynitride comprising object; and (c) densifying said shaped body at heat fusion, with or without the use of pressure, to constitute an object of required density and dimension.
Claim 11
Dependent Claim
21 words
The method as in claim 8, in which said heat fusion of step (c) is carried out under inert atmospheric conditions.
Claim 12
Dependent Claim
28 words
The method as in claim 8, in which said added yttrium oxynitride is constituted at least 75% of the Y 10 Si 6 O 24 N 2 phase.
Claim 13
Dependent Claim
32 words
The method as in claim 10, in which said Y 10 Si 6 O 24 N 2 phase is converted substantially to the Y 1 SiO 2 N phase during heat fusion.
Claim 14
Dependent Claim
30 words
The method as in claim 8, in which said heat fusion is carried out at a temperature effective to form a solution of said silicon nitride and yttrium silicon oxynitride.
Claim 15
Dependent Claim
19 words
The method as in claim 12, in which said temperature is in the range of 1650°-1760° C. (3000°-3200° F.).
Claim 16
Dependent Claim
56 words
The method as in claim 8, in which said glass forming oxide is added in an amount of 0.4-3.0% by weight of the mixture and is selected from the group consisting of Al 2 O 3 , MgO, CeO 2 , ZrO 2 , HfO 2 , B 2 O 3 , and BeO 2 .
Claim 17
Dependent Claim
27 words
The method as in claim 8, in which said oxynitride forming oxide is selected from the group consisting of Y 2 O 3 and rare earth oxides.
Claim 18
Dependent Claim
44 words
The product resulting from the practice of claim 8, comprising a silicon nitride/oxynitride composite, wherein the oxynitride substantially consists of the YSiO 2 N phase in the crystalline form and a glass silicate thinly coats the crystallites of silicon nitride and yttrium silicon oxynitride.
Claim 19
Dependent Claim
25 words
The product as in claim 16, in which said silicate coating is in the thickness range of 2-10 angstroms and has little or no microporosity.
Claim 20
Dependent Claim
32 words
The method as in claim 8, in which nitriding heating is carried out in a nitrogen atmosphere at a pressure of about 2.7 psig and containing up to 25% by weight helium.
Claim 21
Dependent Claim
28 words
The method as in claim 18, in which said nitriding heating is carried out for a period of 72-160 hours at a temperature of 2000°-2600° F. (1093°-1427° C.).
Claim 22
Dependent Claim
34 words
The method as in claim 13, in which said densifying step is carried out by use of hot pressing at said temperature range under a pressure of about 2500-4000 psi for about 0.25-3 hours.
Claim 23
Dependent Claim
27 words
The method as in claim 13, in which said densifying step is carried out by sintering at said temperature range for a period of about 0.5-12 hours.
Claim 24
Dependent Claim
23 words
The method as in claim 3, in which said silicon powder has a low oxygen content, less than 0.5% of the silicon metal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-04-08 | 1988-10-08 | 1989-04-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-04-08 | 1992-10-08 | 1993-04-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-04-08 | 1996-10-08 | 1997-04-09 | $7700.00 | Window Closed / Lapsed |