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US4508049A Expired / Lapsed US ⏱️ 0.0 years remaining

Method and a device for the production of electrical components, in particular laminated capacitors

Assignee: Siemens AG
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Filing: 1979-10-22
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Granted: 1985-04-02
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Expires: 1999-10-22
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Abstract

Abstract Electrical components which have alternate metal and polymer layers carried on a substrate are produced by fixing the substrates on a rotatable drum and rotating the drum through first and second vacuum chambers which are air-locked with respect to each other. A metal layer is applied in the first vacuum chamber by vapor deposition or sputtering and a polymer layer is provided in the second chamber by a glow discharge operation.

Inventors

  • 👤 Reinhard Behn
  • 👤 Hermann Heywang
  • 👤 Horst Pachonik

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 06:00
CPC Classifications
H; H01; H01G; H01G4/00; H01G4/002; H01G4/018; H01G4/06; H01G4/14; H01G4/145; H01G13/00

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 202 words
Apparatus for producing electrical components which have at least one metal coating and at least one polymer coating carried one on top of another on a carrier, comprising: a rotatable drum including a peripheral surface and a plurality of recesses in said surface; retaining means for retaining a plurality of carriers in said recesses; said drum adapted for connection to one pole of an a.c. voltage source; a counter electrode spaced from and extending about a first portion of said drum defining a polymerization chamber, said counterelectrode adapted for connection to another pole of the a.c. voltage source and including first supply means communicating with the space between said counterelectrode and said drum for attachment to a monomer gas supply, said polymerization chamber operable to apply a polymer coating on the electrical component structure traveling therethrough; first and second air-locks at respective circumferential ends of said counterelectrode, each of said air-locks including a port communicating with said polymerization chamber for the evacuation of residual monomer gas; a metallization chamber extending circumferentially about a portion of said drum between said first and second air-locks; and metallization means in said metallization chamber for applying a metal coating to the electrical component structure traveling therethrough.
Claim 2
Dependent Claim 202 words
Apparatus for producing electrical components which have at least one metal coating and at least one polymer coating carried one on top of another on a carrier, comprising: a rotatable drum including a peripheral surface and a plurality of recesses in said surface; retaining means for retaining a plurality of carriers in said recesses; said drum adapted for connection to one pole of an a.c. voltage source; a counter electrode spaced from and extending about a first portion of said drum defining a polymerization chamber, said counterelectrode adapted for connection to another pole of the a.c. voltage source and including first supply means communicating with the space between said counterelectrode and said drum for attachment to a monomer gas supply, said polymerization chamber operable to apply a polymer coating on the electrical component structure traveling therethrough; first and second air-locks at respective circumferential ends of said counterelectrode, each of said air-locks including a port communicating with said polymerization chamber for the evacuation of residual monomer gas; a metallization chamber extending circumferentially about a portion of said drum between said first and second air-locks; and metallization means in said metallization chamber for applying a metal coating to the electrical component structure traveling therethrough.
Claim 3
Dependent Claim 18 words
The apparatus of claim 1, wherein: said metallization means comprises means producing an electron beam to vaporize metal.
Claim 4
Dependent Claim 20 words
The apparatus of claim 1, wherein: said metallization means comprises sputtering means including a magnetron for generating a sputtering field.
Claim 5
Dependent Claim 13 words
The apparatus of claim 1, wherein: said metallization means comprises vapor deposition means.
Claim 6
Dependent Claim 198 words
Apparatus for producing electrical components which have at least one metal coating and at least one polymer coating arranged alternately on top of one another on a substrate, comprising: a rotatable drum including at least one recess in the surface thereof, means for retaining a carrier in said recess; chamber means defining first and second vacuum chambers along the periphery of said drum, including air-lock means forming air-locks between said first and second vacuum chambers; each of said air-lock means comprising at least two end pieces neighboring to the periphery of the drum sections of the drum between said recesses, wherein the length of said end pieces in the circumferential direction of the drum is larger than the sum of the length of one recess and one section in the circumferential direction of the drum, wherein only a narrow gap remains between said end pieces and said sections along the entire length of the sections; metallization means in said first vacuum chamber operable to apply a metal coating to the electrical component structure traveling therethrough; and polymerization means communicating with said second vacuum chamber and operable to apply a polymer coating to the electrical component structure traveling therethrough.
Claim 7
Dependent Claim 198 words
Apparatus for producing electrical components which have at least one metal coating and at least one polymer coating arranged alternately on top of one another on a substrate, comprising: a rotatable drum including at least one recess in the surface thereof, means for retaining a carrier in said recess; chamber means defining first and second vacuum chambers along the periphery of said drum, including air-lock means forming air-locks between said first and second vacuum chambers; each of said air-lock means comprising at least two end pieces neighboring to the periphery of the drum sections of the drum between said recesses, wherein the length of said end pieces in the circumferential direction of the drum is larger than the sum of the length of one recess and one section in the circumferential direction of the drum, wherein only a narrow gap remains between said end pieces and said sections along the entire length of the sections; metallization means in said first vacuum chamber operable to apply a metal coating to the electrical component structure traveling therethrough; and polymerization means communicating with said second vacuum chamber and operable to apply a polymer coating to the electrical component structure traveling therethrough.
Claim 8
Dependent Claim 30 words
The apparatus of claim 5, wherein between said two end pieces a port is arranged for evacuation of residual monomer gas and/or vaporized metal respectively diffusing through the narrow gaps.

References Cited (Backward Citations)

US1784611A Cited
US2925062A Cited
US2799600A Cited
GB857885A Cited
US3068510A Cited
GB970865A Cited
US3205855A Cited
US3925187A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-04-01 1988-10-01 1989-04-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-04-01 1992-10-01 1993-04-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-04-01 1996-10-01 1997-04-02 $7700.00 Window Closed / Lapsed

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