Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
132 words
A method of producing a focussing error signal of an objective lens with respect to an object on which a light beam is to be focussed by the objective lens, comprising: introducing at least a part of the light beam reflected by the object into a prism and then into a boundary surface between a thin film which is applied to the prism and the air at an incident angle substantially equal to a critical angle of total reflection, the thin film having a refractive index different from that of the prism so as to increase reflection factor variation between the critical angle of total reflection and angles of incidence very close to such critical angle; and detecting the light beam reflected by said boundary surface to derive the focussing error signal.
Claim 2
Independent Claim
132 words
A method of producing a focussing error signal of an objective lens with respect to an object on which a light beam is to be focussed by the objective lens, comprising: introducing at least a part of the light beam reflected by the object into a prism and then into a boundary surface between a thin film which is applied to the prism and the air at an incident angle substantially equal to a critical angle of total reflection, the thin film having a refractive index different from that of the prism so as to increase reflection factor variation between the critical angle of total reflection and angles of incidence very close to such critical angle; and detecting the light beam reflected by said boundary surface to derive the focussing error signal.
Claim 3
Dependent Claim
42 words
A method according to claim 1, wherein a thickness of said thin film is so determined that a phase difference between light rays reflected by upper and lower surfaces of the thin film becomes an odd integer multiple of a half wavelength.
Claim 4
Dependent Claim
32 words
A method according to claim 1, wherein said light beam is made incident upon the thin film via at least one additional thin film interposed between the prism and the thin film.
Claim 5
Dependent Claim
17 words
A method according to claim 3, wherein said thin films have alternatively lower and higher refractive indices.
Claim 6
Dependent Claim
35 words
A method according to claim 3, wherein said thin films have such thicknesses that the phase difference between upper and lower surfaces of respective thin films becomes an odd integer multiple of a half wavelength.
Claim 7
Dependent Claim
36 words
A method according to claim 1, wherein said thin film is made of material having refractive index higher than that of the prism and P-polarized light beam is made incident upon the prism and thin film.
Claim 8
Dependent Claim
37 words
A method according to claim 1, wherein said thin film is made of material having a refractive index lower than that of the prism and S-polarized light beam is made incident upon the prism and thin film.
Claim 9
Independent Claim
130 words
An apparatus for deriving a focussing error signal of an objective lens with respect to an object on which a light beam is to be focussed by the objective lens, comprising: a prism arranged to receive at least a part of the light beam reflected by the object and collected by the objective lens; at least one thin film applied on said prism and made of material having a refractive index different from that of the prism so as to increase reflection factor variation between the critical angle of total reflection and angles of incidence very close to such critical angle; and a photo-detecting means arranged to receive the light beam reflected by a boundary surface between said thin film and the air and to derive the focussing error signal.
Claim 10
Independent Claim
130 words
An apparatus for deriving a focussing error signal of an objective lens with respect to an object on which a light beam is to be focussed by the objective lens, comprising: a prism arranged to receive at least a part of the light beam reflected by the object and collected by the objective lens; at least one thin film applied on said prism and made of material having a refractive index different from that of the prism so as to increase reflection factor variation between the critical angle of total reflection and angles of incidence very close to such critical angle; and a photo-detecting means arranged to receive the light beam reflected by a boundary surface between said thin film and the air and to derive the focussing error signal.
Claim 11
Dependent Claim
35 words
An apparatus according to claim 8, wherein said thin film is made of material having a refractive index higher than that of the prism and said light beam impinging upon the prism is P-polarized light.
Claim 12
Dependent Claim
22 words
An apparatus according to claim 9, wherein at least one additional thin film is interposed between the prism and the thin film.
Claim 13
Dependent Claim
31 words
An apparatus according to claim 10, wherein only one additional thin film having a refractive index lower than that of the prism is interposed between the prism and the thin film.
Claim 14
Dependent Claim
23 words
An apparatus according to claim 10, wherein said additional thin films have alternately higher and lower refractive indices than that of the prism.
Claim 15
Independent Claim
48 words
An apparatus according to any one of claims 8, 9, 10, 11 and 12, wherein the thin film has such a thickness that a phase difference between light rays reflected by upper and lower surfaces of the thin film becomes an odd integer multiple of a half wavelength.
Claim 16
Dependent Claim
34 words
An apparatus according to claim 9, wherein said prism is made of glass having the refractive index of 1.76 and said thin film is made of TiO 2 having the refractive index of 2.5.
Claim 17
Dependent Claim
26 words
An apparatus according to claim 8, wherein said thin film has a refractive index lower than that of the prism and said light beam is S-polarized.
Claim 18
Dependent Claim
22 words
An apparatus according to claim 15, wherein at least one additional thin film is interposed between the prism and the thin film.
Claim 19
Dependent Claim
33 words
An apparatus according to claim 16, wherein only one additional thin film having a refractive index higher than that of the prism is interposed between the prism and the first additional thin film.
Claim 20
Dependent Claim
22 words
An apparatus according to claim 16, wherein said thin films have alternately lower and higher refractive indices than that of the prism.
Claim 21
Independent Claim
47 words
An apparatus according to any one of claims 15, 16, 17 and 18, wherein each thin film has such a thickness that a phase difference between light rays reflected by upper and lower surfaces of each thin film becomes an odd integer multiple of a half wavelength.
Claim 22
Dependent Claim
36 words
An apparatus according to claim 18, wherein said higher and lower refractive index thin films are made of TiO 2 having the refractive index of 2.5 and MgF 2 having the refractive index of 1.4, respectively.
Claim 23
Dependent Claim
34 words
An apparatus according to claim 15, wherein said prism is made of glass having the refractive index of 1.51 and said thin film is made of MgF 2 having the refractive index of 1.4.
Claim 24
Independent Claim
171 words
A method of producing a focussing error signal of an objective lens with respect to an object on which a light beam is to be focussed by the objective lens and reflected therefrom, comprising: introducing at least a part of the light beam reflected by the object into a prism having an incident surface, a reflection surface and an exit surface and then into a plurality of thin optical films applied successively onto the reflection surface of the prism, at in incident angle substantially equal to a critical angle of total reflection, said thin optical films having alternately lower and higher refractive indicies than that of the prism and having such a thickness that light reflected by first and second surfaces bounding each of the respective thin optical films has a phase difference equal to an odd integer multiple of a half wavelength; and detecting the light beam reflected by the reflection surface and optical films and emanating from the exit surface of the prism to derive a focussing error signal.
Claim 25
Independent Claim
171 words
A method of producing a focussing error signal of an objective lens with respect to an object on which a light beam is to be focussed by the objective lens and reflected therefrom, comprising: introducing at least a part of the light beam reflected by the object into a prism having an incident surface, a reflection surface and an exit surface and then into a plurality of thin optical films applied successively onto the reflection surface of the prism, at in incident angle substantially equal to a critical angle of total reflection, said thin optical films having alternately lower and higher refractive indicies than that of the prism and having such a thickness that light reflected by first and second surfaces bounding each of the respective thin optical films has a phase difference equal to an odd integer multiple of a half wavelength; and detecting the light beam reflected by the reflection surface and optical films and emanating from the exit surface of the prism to derive a focussing error signal.
Claim 26
Dependent Claim
38 words
The method of claim 22 wherein a P-polarized light beam is made incident upon the prism and thin optical films, and the outermost film of said successive films has a higher refractive index than that of the prism.
Claim 27
Dependent Claim
38 words
The method of claim 22 wherein an S-polarized light beam is made incident upon the prism and thin optical films, and the outermost film of said successive films has a refractive index lower than that of the prism.
Claim 28
Independent Claim
130 words
An apparatus for deriving a focussing error signal of an objective lens with respect to an object on which a light beam is to be focussed by the objective lens and reflected, comprising: a prism arranged to receive at least a part of the light beam reflected by the object and collected through the objective lens and having an incident surface, a reflection surface and an exit surface; a plurality of thin optical films successively applied onto the reflection surface of said prism and having alternating lower and higher refractive indicies than that of the prism and each having such a thicknes that light reflected by first and second surfaces bounding each of the respective films has a phase difference equal to an odd integer multiple of a half wavelength.
Claim 29
Independent Claim
130 words
An apparatus for deriving a focussing error signal of an objective lens with respect to an object on which a light beam is to be focussed by the objective lens and reflected, comprising: a prism arranged to receive at least a part of the light beam reflected by the object and collected through the objective lens and having an incident surface, a reflection surface and an exit surface; a plurality of thin optical films successively applied onto the reflection surface of said prism and having alternating lower and higher refractive indicies than that of the prism and each having such a thicknes that light reflected by first and second surfaces bounding each of the respective films has a phase difference equal to an odd integer multiple of a half wavelength.
Claim 30
Dependent Claim
58 words
An apparatus according to claim 25, wherein said prism is made of glass having the refractive index of 1.76, said thin films having the higher refractive index are made of TiO 2 having the refractive index of 2.5, and said thin films having the lower refractive index are made of MgF 2 having the refractive index of 1.4.
Claim 31
Dependent Claim
34 words
The apparatus of claim 25 wherein the outermost thin optical film of said successive films has a higher refractive index than that of said prism when P-polarized light is made incident upon said prism.
Claim 32
Dependent Claim
34 words
The apparatus of claim 25 wherein the outermost thin optical film of said successive films has a lower refractive index than that of said prism when S-polarized light is made incident upon said prism.