Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
170 words
A substrate support module, which comprises: at least one essentially planar guide shelf having guide means for guiding an edge of a substrate when the substrate is inserted into the substrate support module; a pair of side support members located adjacent respective opposite ends of the guide shelf for supporting the shelf; a series of at least three locating projections extending from at least one end of the guide shelf for mounting the shelf on the side support member which is adjacent the one end of the shelf; and the side support member adjacent the one end of the guide shelf having a set of at least three spaced elongated locating slots formed therein, the projections on the guide shelf being received in respective ones of the elongated slots in closely spaced relationship by opposed walls of the slots and in spaced relationship to opposite ends of the slots, with two of elongated slots extending parallel to the guide shelf and the remaining slot extending perpendicular to the guide shelf.
Claim 2
Dependent Claim
170 words
A substrate support module, which comprises: at least one essentially planar guide shelf having guide means for guiding an edge of a substrate when the substrate is inserted into the substrate support module; a pair of side support members located adjacent respective opposite ends of the guide shelf for supporting the shelf; a series of at least three locating projections extending from at least one end of the guide shelf for mounting the shelf on the side support member which is adjacent the one end of the shelf; and the side support member adjacent the one end of the guide shelf having a set of at least three spaced elongated locating slots formed therein, the projections on the guide shelf being received in respective ones of the elongated slots in closely spaced relationship by opposed walls of the slots and in spaced relationship to opposite ends of the slots, with two of elongated slots extending parallel to the guide shelf and the remaining slot extending perpendicular to the guide shelf.
Claim 3
Dependent Claim
34 words
The substrate support module as recited in claim 1, in which: the elongated slot which extends perpendicular to the guide shelf is located intermediate the elongated slots which extend parallel to the guide shelf.
Claim 4
Dependent Claim
23 words
The substrate support module as recited in claim 1, in which: the projections on the end of the guide shelf are circular bosses.
Claim 5
Dependent Claim
60 words
The substrate support module as recited in claim 3, in which: the opposed walls of the elongated slots in the side support member extend essentially tangent to adjacent peripheral portions of their respective circular bosses such that edges of the slots tend to shave any excess material from the peripheral portions during assembly of the circular bosses within the slots.
Claim 6
Dependent Claim
132 words
The substrate support module as recited in claim 1, which further comprises: a series of at least three locating projections extending from an edge of the guide shelf between the opposite ends of the guide shelf; a backplane assembly mounted on the edge of the guide shelf, the backplane assembly including a backplane member; and the backplane member having a set of at least three spaced elongated locating slots formed therein, the projections on the edge of the guide shelf being received in respective ones of the elongated slots in closely spaced relationship by opposed walls of the slots and in spaced relationship to opposite ends of the slots, with two of the elongated slots extending parallel to the guide shelf and the remaining elongated slot extending perpendicular to the guide shelf.
Claim 7
Dependent Claim
42 words
The substrate support module as recited in claim 5, in which: the elongated slot in the backplane member which extends perpendicular to the guide shelf is located intermediate the elongated slots in the backplane member which extend parallel to the guide shelf.
Claim 8
Dependent Claim
32 words
The substrate support module as recited in claim 5, in which: the projections on the one end of the guide shelf and on the edge of the guide shelf are circular bosses.
Claim 9
Dependent Claim
63 words
The substrate support module as recited in claim 7, in which: the opposed walls of the slots in the side support member and the backplane member extend essentially tangent to adjacent peripheral portions of their respective circular bosses such that edges of the slots tend to shave any excess material from the peripheral portions during assembly of the circular bosses in the slots.
Claim 10
Dependent Claim
157 words
A substrate support module, which comprises: at least two spaced essentially planar guide shelves each having guide means for guiding respective edges of a substrate when the substrate is inserted between the shelves; a pair of side support members located at respective opposite ends of the shelves; a series of at least three circular locating bosses extending from each end of each of the shelves for mounting the shelves on the side support members; and each of the side support members having sets of at least three elongated locating slots formed therein, the circular bosses on the guide shelves being received in respective ones of the elongated slots in closely spaced tangential relationship by opposed walls of the slots and in spaced relationship to opposite ends of the slots, with two of the elongated slots of each set extending parallel to the guide shelves and the remaining slot of the set extending perpendicular to the guide shelves.
Claim 11
Dependent Claim
157 words
A substrate support module, which comprises: at least two spaced essentially planar guide shelves each having guide means for guiding respective edges of a substrate when the substrate is inserted between the shelves; a pair of side support members located at respective opposite ends of the shelves; a series of at least three circular locating bosses extending from each end of each of the shelves for mounting the shelves on the side support members; and each of the side support members having sets of at least three elongated locating slots formed therein, the circular bosses on the guide shelves being received in respective ones of the elongated slots in closely spaced tangential relationship by opposed walls of the slots and in spaced relationship to opposite ends of the slots, with two of the elongated slots of each set extending parallel to the guide shelves and the remaining slot of the set extending perpendicular to the guide shelves.
Claim 12
Dependent Claim
138 words
The substrate support module as recited in claim 9, which further comprises: a series of at least three circular locating bosses extending from an edge of each guide shelf between the opposite ends of the guide shelf; a backplane assembly mounted on the edges of the guide shelves, the backplane assembly including a backplane member; and the backplane member having sets of at least three elongated locating slots formed therein, the circular bosses on the edges of the guide shelves being received in respective ones of the elongated slots in closely spaced tangential relationship by opposed walls of the slots and in spaced relationship to opposite ends of the slots, with two of the elongated slots of each set extending parallel to the guide shelves and the remaining slot of the set extending perpendicular to the guide shelves.
Claim 13
Dependent Claim
46 words
The substrate support module as recited in claim 10, in which: the elongated slots in the side support members and the backplane member which extend perpendicular to the guide shelves are located intermediate respective ones of the elongated slots which extend parallel to the guide shelves.