US4500564A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for surface treatment by ion bombardment
Assignee: National Institute of Advanced Industrial Science and Technology
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Filing: 1983-01-25
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Granted: 1985-02-19
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Expires: 2003-01-25
Abstract
Abstract An article to be coated by vacuum deposition of a metallic substance is given a preliminary surface treatment to ensure perfect deposition of the metallic substance. This preliminary surface treatment is effected by placing the article under treatment in an atmosphere of the same reaction gas vacuumized to the same degree as during vacuum deposition, causing a hot filament to release thermionicelectrons within the atmosphere thereby inducing the phenomenon of discharge, and causing ions by the discharge to bombard the article under treatment.
Inventors
- 👤 Yuji Enomoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 02:27
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/02; C23C14/021; C23C14/022; C23C28/00
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
94 words
A method for the ion bombardment treatment of the surface of an article on which a metallic compound is to be vapor deposited by reactive ion plating, which comprises the steps of: placing the article under treatment in a reaction gas at a pressure within the range of 10 -3 to 10 -4 Torr; causing a hot filament to release thermoionic electrons in said reaction gas, thereby inducing electric discharge; applying a negative voltage to the article; and bombarding the article under treatment with ions of the reaction gas ionized by said electric discharge.
Claim 2
Independent Claim
94 words
A method for the ion bombardment treatment of the surface of an article on which a metallic compound is to be vapor deposited by reactive ion plating, which comprises the steps of: placing the article under treatment in a reaction gas at a pressure within the range of 10 -3 to 10 -4 Torr; causing a hot filament to release thermoionic electrons in said reaction gas, thereby inducing electric discharge; applying a negative voltage to the article; and bombarding the article under treatment with ions of the reaction gas ionized by said electric discharge.
Claim 3
Dependent Claim
13 words
A method according to claim 1, wherein said reaction gas is hydrocarbon gas.
Claim 4
Dependent Claim
13 words
A method according to claim 1, wherein said reaction gas is nitrogen gas.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-02-19 | 1988-08-20 | 1989-02-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-02-19 | 1992-08-20 | 1993-02-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-02-19 | 1996-08-20 | 1997-02-19 | $7700.00 | Window Closed / Lapsed |