US4498762A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Projection type exposure apparatus
Assignee: Nikon Corp
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Filing: 1982-12-20
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Granted: 1985-02-12
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Expires: 2002-12-20
Abstract
Abstract A projection type exposure apparatus has a projection objective lens, a projection negative having a predetermined shape pattern and an alignment mark, and a photosensitive plate having an alignment mark. The shape pattern of the projection negative is projected upon the photosensitive plate by the projection objective lens. Main illuminating optical means illuminates the projection negative with a first wavelength light to which the photosensitive plate is sensitive, and alignment optical means illuminates the projection negative with a second wavelength light to which the photosensitive plate is insensitive. The positional relation between the projection negative and the photosensitive plate is detected using the second wavelength light through the projection objective lens. One of the alignment mark on the projection negative and the alignment mark on the photosensitive plate has a zone pattern which forms a light-condensing point at a position spaced apart by a predetermined amount from the surface on which said one mark is formed, and said predetermined amount corresponds to the amount of chromatic aberration of the projection objective lens, at the side thereof adjacent to said zone pattern, for the second wavelength light relative to the first wavelength light.
Inventors
- 👤 Makoto Uehara
- 👤 Satoru Anzai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 08:44
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7049
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
197 words
A projection type exposure apparatus having a projection objective lens, a projection negative having a predetermined shape pattern and an alignment mark, a photosensitive plate having an alignment mark, the shape pattern of said projection negative being projected upon said photosensitive plate by said projection objective lens, main illuminating optical means for illuminating said projection negative with a first wavelength light to which said photosensitive plate is sensitive, and alignment optical means for illuminating said projection negative with a second wavelength light to which said photosensitive plate is insensitive and for detecting the positional relation between said projection negative and said photosensitive plate by said second wavelength light through said projection objective lens, characterized in that one of the alignment mark on said projection negative and the alignment mark on said photosensitive plate has a zone pattern which forms a light-condensing point at a position spaced apart by a predetermined amount from the surface on which said one mark is formed, and said predetermined amount corresponds to the amount of chromatic aberration of said projection objective lens, at the side thereof adjacent to said zone pattern, for said second wavelength light relative to said first wavelength light.
Claim 2
Dependent Claim
197 words
A projection type exposure apparatus having a projection objective lens, a projection negative having a predetermined shape pattern and an alignment mark, a photosensitive plate having an alignment mark, the shape pattern of said projection negative being projected upon said photosensitive plate by said projection objective lens, main illuminating optical means for illuminating said projection negative with a first wavelength light to which said photosensitive plate is sensitive, and alignment optical means for illuminating said projection negative with a second wavelength light to which said photosensitive plate is insensitive and for detecting the positional relation between said projection negative and said photosensitive plate by said second wavelength light through said projection objective lens, characterized in that one of the alignment mark on said projection negative and the alignment mark on said photosensitive plate has a zone pattern which forms a light-condensing point at a position spaced apart by a predetermined amount from the surface on which said one mark is formed, and said predetermined amount corresponds to the amount of chromatic aberration of said projection objective lens, at the side thereof adjacent to said zone pattern, for said second wavelength light relative to said first wavelength light.
Claim 3
Dependent Claim
23 words
The apparatus according to claim 1, wherein said projection objective lens reduction-projects the shape pattern of said projection negative onto said photosensitive plate.
Claim 4
Dependent Claim
18 words
The apparatus according to claim 2, wherein the alignment mark on said photosensitive plate has said zone pattern.
Claim 5
Dependent Claim
60 words
The apparatus according to claim 3, wherein said alignment optical means illuminates the zone pattern on said photosensitive plate with a parallel beam of the second wavelength light through said projection objective lens, and the amount of separation of said light-condensing point from said plate is equal to the focal length of said zone pattern for the second wavelength light.
Claim 6
Dependent Claim
15 words
The apparatus according to claim 4, wherein said zone pattern is a circular zone pattern.
Claim 7
Dependent Claim
15 words
The apparatus according to claim 4, wherein said zone pattern is a linear zone pattern.
Claim 8
Dependent Claim
96 words
A photosensitive member on which a predetermined shape pattern is printed and exposed by exposure light through a projection objective lens and in which alignment is done by light of a wavelength different from that of said exposure light, said photosensitive member having a zone pattern forming a predetermined light-condensing point by light applied thereto, the distance of said light-condensing point from said zone pattern corresponding to the amount of longitudinal chromatic aberration of said projection objective lens, at the side thereof adjacent to said photosensitive member, for said alignment light relative to said exposure light.
Claim 9
Dependent Claim
96 words
A photosensitive member on which a predetermined shape pattern is printed and exposed by exposure light through a projection objective lens and in which alignment is done by light of a wavelength different from that of said exposure light, said photosensitive member having a zone pattern forming a predetermined light-condensing point by light applied thereto, the distance of said light-condensing point from said zone pattern corresponding to the amount of longitudinal chromatic aberration of said projection objective lens, at the side thereof adjacent to said photosensitive member, for said alignment light relative to said exposure light.
Claim 10
Dependent Claim
27 words
The photosensitive member according to claim 7, wherein the focal length of said zone pattern for said alignment light is equal to said amount of chromatic aberration.
Claim 11
Dependent Claim
104 words
A projection negative having a predetermined shape pattern and in which said predetermined shape pattern is printed and exposed on a photosensitive member by exposure light through a projection objective lens and alignment is effected by light of a wavelength different from that of said exposure light, said projection negative having a zone pattern forming a predetermined light-condensing point by light applied thereto, the distance of said light-condensing point from said zone pattern corresponding to the amount of longitudinal chromatic aberration of said projection objective lens, at the side thereof adjacent to the projection negative, for said alignment light relative to said exposure light.
Claim 12
Dependent Claim
104 words
A projection negative having a predetermined shape pattern and in which said predetermined shape pattern is printed and exposed on a photosensitive member by exposure light through a projection objective lens and alignment is effected by light of a wavelength different from that of said exposure light, said projection negative having a zone pattern forming a predetermined light-condensing point by light applied thereto, the distance of said light-condensing point from said zone pattern corresponding to the amount of longitudinal chromatic aberration of said projection objective lens, at the side thereof adjacent to the projection negative, for said alignment light relative to said exposure light.
Claim 13
Dependent Claim
27 words
The projection negative according to claim 9, wherein the focal length of said zone pattern for said alignment light is equal to said amount of chromatic aberration.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-02-12 | 1988-08-13 | 1989-02-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-02-12 | 1992-08-13 | 1993-02-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-02-12 | 1996-08-13 | 1997-02-12 | $7700.00 | Window Closed / Lapsed |