US4496843A
Expired / Lapsed
US
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Method for producing metal ions
Assignee: Toshiba Corp
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Filing: 1982-05-27
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Granted: 1985-01-29
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Expires: 2002-05-27
Abstract
Abstract The invention provides a method for producing metal ions, having the steps of: producing a gas containing a metal element by evaporation of a liquid organic metal compound; introducing the gas containing the metal element and an auxiliary gas for cleaning into the ionization chamber; and producing the metal ions by ionizing the metal element by a discharge. According to this method, the metal ions are produced easily and quickly with good controllability.
Inventors
- 👤 Kei Kirita
- 👤 Katuo Koike
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:09
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/513; B; B01; B01J; B01J19/00; B01J19/08; B01J19/087; B01J19/088; H; H01; H01J; H01J27/00; H01J27/02; H01J27/20; H01J27/22
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
63 words
A method for producing metal ions, comprising the steps of: (a) producing an organic metal compound vapor by evaporation of a liquid organic metal compound; (b) introducing said organic metal compound vapor and an auxiliary gas for cleaning an ionization chamber into said ionization chamber; and (c) producing the metal ions by decomposing said organic metal compound vapor by ionization in a discharge.
Claim 2
Independent Claim
63 words
A method for producing metal ions, comprising the steps of: (a) producing an organic metal compound vapor by evaporation of a liquid organic metal compound; (b) introducing said organic metal compound vapor and an auxiliary gas for cleaning an ionization chamber into said ionization chamber; and (c) producing the metal ions by decomposing said organic metal compound vapor by ionization in a discharge.
Claim 3
Dependent Claim
27 words
A method according to claim 1, wherein said liquid organic metal compound is a material selected from the group consisting of an alkyl metal and metal alkoxide.
Claim 4
Dependent Claim
26 words
A method according to claim 2, wherein said alkyl metal is a material selected from the group consisting of a methyl metal and an ethyl metal.
Claim 5
Dependent Claim
26 words
A method according to claim 2, wherein said metal alkoxide is a material selected from the group consisting of a metal methoxide and a metal ethoxide.
Claim 6
Dependent Claim
34 words
A method according to claim 1, wherein said auxiliary gas is a gas selected from the group consisting of a fluoride gas, a rare gas, H 2 gas, N 2 gas and mixtures thereof.
Claim 7
Dependent Claim
34 words
A method according to claim 5, wherein said fluoride gas is a gas selected from the group consisting of BF 3 gas, SiF 4 gas, AsF 3 gas, AsF 5 gas and mixtures thereof.
Claim 8
Dependent Claim
12 words
A method according to claim 1, wherein said discharge is arc discharge.
Claim 9
Dependent Claim
24 words
A method acording to claim 1, wherein said metal is selected from the group consisting of Ga, In, Hg, Sb, Sn, Zn and Ta.
Claim 10
Dependent Claim
25 words
A method according to claim 1, wherein said evaporation is conducted at ordinary temperature and under vacuum conditions of 10 -2 to 10 -3 Torr.
Claim 11
Dependent Claim
26 words
A method according to claim 1, wherein the liquid organic metal compound is Ga(CH 3 ) 3 , and the auxiliary gas is BF 3 .
Claim 12
Dependent Claim
27 words
A method according to claim 1, wherein said metal ion production is controlled by regulating the flow rate of said metal compound vapor to the ionization chamber.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-01-29 | 1988-07-30 | 1989-01-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-01-29 | 1992-07-30 | 1993-01-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-01-29 | 1996-07-30 | 1997-01-29 | $7700.00 | Window Closed / Lapsed |