US4496216A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for exposing photosensitive material
Assignee: Polaroid Corp
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Filing: 1982-12-30
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Granted: 1985-01-29
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Expires: 2002-12-30
Abstract
Abstract Exposure patterns are formed in photosensitive material by multiple beam laser interferometry by a method which involves exposing said photosensitive material simultaneously to at least three coherent beams of exposing radiation wherein the sources of said beams are arranged substantially symmetrically around an axis perpendicular to the plane of said photosensitive material. Preferably, surface relief patterns are formed by developing said exposed material. Apparatus for providing such multiple coherent beams is also disclosed.
Inventors
- 👤 James J. Cowan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:49
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70408; G02; G02B; G02B5/00; G02B5/32; G03F7/20; G03F7/2002; G03F7/2004; G03F7/2006
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
79 words
An apparatus for simultaneously exposing a photosensitive material to at least three coherent beams of exposing radiation which comprises a laser; means for dividing the wavefront of said beam emanating from said laser into equal parts; at least three mirrors reflecting said divided beams, the number of said mirrors corresponding to the number of parts of said beam, and wherein said mirrors are located symmetrically around an axis perpendicular to the plane of the surface of said photosensitive material.
Claim 2
Independent Claim
79 words
An apparatus for simultaneously exposing a photosensitive material to at least three coherent beams of exposing radiation which comprises a laser; means for dividing the wavefront of said beam emanating from said laser into equal parts; at least three mirrors reflecting said divided beams, the number of said mirrors corresponding to the number of parts of said beam, and wherein said mirrors are located symmetrically around an axis perpendicular to the plane of the surface of said photosensitive material.
Claim 3
Dependent Claim
17 words
The apparatus of claim 1 where each of said sources are substantially equidistant from said photosensitive material.
Claim 4
Dependent Claim
17 words
The apparatus of claim 1 wherein the intensity of each of said sources is substantially the same.
Claim 5
Dependent Claim
10 words
The apparatus of claim 1 which includes three coherent beams.
Claim 6
Dependent Claim
10 words
The apparatus of claim 1 which includes four coherent beams.
Claim 7
Dependent Claim
13 words
The apparatus of claim 1 wherein said photosensitive material is a positive photoresist.
Claim 8
Dependent Claim
13 words
The apparatus of claim 1 wherein said photosensitive material is a negative photoresist.
Claim 9
Dependent Claim
24 words
The apparatus of claim 1 wherein said photosensitive material is carried on a light transmitting base and said exposure is made through said base.
Claim 10
Independent Claim
76 words
An apparatus for simultaneously exposing a photosensitive material to at least three coherent beams of exposing radiation which comprises a laser; means for dividing the amplitude of the beam emanating from said laser into at least three equal parts; separately expanding each of said divided beams by expansion lenses to impinge upon said photosensitive material; whereby said expansion lenses are arranged symmetrically around an axis perpendicular to the plane of the surface of said photosensitive material.
Claim 11
Independent Claim
76 words
An apparatus for simultaneously exposing a photosensitive material to at least three coherent beams of exposing radiation which comprises a laser; means for dividing the amplitude of the beam emanating from said laser into at least three equal parts; separately expanding each of said divided beams by expansion lenses to impinge upon said photosensitive material; whereby said expansion lenses are arranged symmetrically around an axis perpendicular to the plane of the surface of said photosensitive material.
Claim 12
Dependent Claim
17 words
The apparatus of claim 9 where each of said sources are substantially equidistant from said photosensitive material.
Claim 13
Dependent Claim
17 words
The apparatus of claim 9 wherein the intensity of each of said sources is substantially the same.
Claim 14
Dependent Claim
10 words
The apparatus of claim 9 which includes three coherent beams.
Claim 15
Dependent Claim
10 words
The apparatus of claim 9 which includes four coherent beams.
Claim 16
Dependent Claim
13 words
The apparatus of claim 9 wherein said photosensitive material is a positive photoresist.
Claim 17
Dependent Claim
13 words
The apparatus of claim 9 wherein said photosensitive material is a negative photoresist.
Claim 18
Dependent Claim
24 words
The apparatus of claim 9 wherein said photosensitive material is carried on a light transmitting base and said exposure is made through said base.
References Cited (Backward Citations)
US4421398A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-01-29 | 1988-07-30 | 1989-01-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-01-29 | 1992-07-30 | 1993-01-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-01-29 | 1996-07-30 | 1997-01-29 | $7700.00 | Window Closed / Lapsed |