US4496194A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gas bearing
Assignee: Axcelis Technologies Inc
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Filing: 1983-10-19
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Granted: 1985-01-29
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Expires: 2003-10-19
Abstract
Abstract A gas bearing is provided which has a spherically contoured pocket with a gas supply passage which opens in the center of the pocket. The gas bearing is coupled to the load and is supported by a stem and a ball joint through which the gas is supplied to the bearing. An additional passage allows gas to flow between the pocket and a closed chamber in the bearing.
Inventors
- 👤 Edward H. Phillips
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 11:37
CPC Classifications
F; F16; F16C; F16C32/00; F16C32/06; F16C29/00; F16C29/02; F16C29/025
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
106 words
A gas bearing comprising: a gas inlet; a body having a pocket formed in a surface thereof and having first and second openings in the pocket; a first passage through a portion of the body connected to the gas inlet and the first opening; first restrictive means for restricting the flow of gas through the first passage; an enclosed chamber disposed in the body and associated exclusively with the aforementioned pocket; a second passage through a portion of the body, the second passage being connected to the chamber and the second opening; and second restrictive means for restricting the flow of gas through the second passage.
Claim 2
Dependent Claim
106 words
A gas bearing comprising: a gas inlet; a body having a pocket formed in a surface thereof and having first and second openings in the pocket; a first passage through a portion of the body connected to the gas inlet and the first opening; first restrictive means for restricting the flow of gas through the first passage; an enclosed chamber disposed in the body and associated exclusively with the aforementioned pocket; a second passage through a portion of the body, the second passage being connected to the chamber and the second opening; and second restrictive means for restricting the flow of gas through the second passage.
Claim 3
Dependent Claim
20 words
A gas bearing as in claim 1 wherein the first restrictive means includes a flow restricter in the first passage.
Claim 4
Dependent Claim
15 words
A gas bearing as in claim 2 wherein the contour of the pocket is spherical.
Claim 5
Dependent Claim
20 words
A gas bearing as in claim 2 wherein the second restrictive means includes a flow restricter in the second passage.
Claim 6
Dependent Claim
15 words
A gas bearing as in claim 4 wherein the contour of the pocket is spherical.
Claim 7
Dependent Claim
109 words
A gas bearing comprising: a source of gas; a bearing surface; a body having a pocket formed in a surface thereof in a spaced facing relationship with the bearing surface, the pocket having a first and a second opening therein; gas conduit means connected to the source of gas and the first opening for carrying gas from the source of gas to the first opening; first restrictive means for restricting the flow of gas through the gas conduit means; an enclosed chamber associated with the aforementioned pocket; a passage connecting the chamber to the second opening; and second restrictive means for restricting the flow of gas through the passage.
Claim 8
Dependent Claim
109 words
A gas bearing comprising: a source of gas; a bearing surface; a body having a pocket formed in a surface thereof in a spaced facing relationship with the bearing surface, the pocket having a first and a second opening therein; gas conduit means connected to the source of gas and the first opening for carrying gas from the source of gas to the first opening; first restrictive means for restricting the flow of gas through the gas conduit means; an enclosed chamber associated with the aforementioned pocket; a passage connecting the chamber to the second opening; and second restrictive means for restricting the flow of gas through the passage.
Claim 9
Dependent Claim
33 words
A gas bearing as in claim 6 wherein the first restrictive means includes a flow restricter, disposed in the gas conduit means, for restricting the flow of gas through the gas conduit means.
Claim 10
Dependent Claim
24 words
A gas bearing as in claim 7 further comprising an additional pocket formed in the aforementioned pocket and including the first and second openings.
Claim 11
Dependent Claim
15 words
A gas bearing as in claim 7 wherein the contour of the pocket is spherical.
Claim 12
Dependent Claim
30 words
A gas bearing as in claim 9 wherein the spacing between the bearing surface and the pocket is no more than the depth of the pocket at the center thereof.
Claim 13
Dependent Claim
29 words
A gas bearing as in claim 7 wherein the second restrictive means includes a flow restricter, disposed in the passage, for restricting the flow of gas through the passage.
Claim 14
Dependent Claim
24 words
A gas bearing as in claim 11 further comprising an additional pocket formed in the aforementioned pocket and including the first and second openings.
Claim 15
Dependent Claim
15 words
A gas bearing as in claim 11 wherein the contour of the pocket is spherical.
Claim 16
Dependent Claim
30 words
A gas bearing as in claim 13 wherein the spacing between the bearing surface and the pocket is no more than the depth of the pocket at the center thereof.
Claim 17
Dependent Claim
29 words
A gas bearing as in claim 6 wherein the second restrictive means includes a flow restricter, disposed in the passage, for restricting the flow of gas through the passage.
Claim 18
Dependent Claim
24 words
A gas bearing as in claim 15 further comprising an additional pocket formed in the aforementioned pocket and including the first and second openings.
Claim 19
Dependent Claim
15 words
A gas bearing as in claim 15 wherein the contour of the pocket is spherical.
Claim 20
Dependent Claim
30 words
A gas bearing as in claim 17 wherein the spacing between the bearing surface and the pocket is no more than the depth of the pocket at the center thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-01-29 | 1988-07-30 | 1989-01-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-01-29 | 1992-07-30 | 1993-01-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-01-29 | 1996-07-30 | 1997-01-29 | $7700.00 | Window Closed / Lapsed |