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US4489128A
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Structure containing epitaxial crystals on a substrate
Assignee: International Business Machines Corp
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Filing: 1983-03-04
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Granted: 1984-12-18
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Expires: 2003-03-04
Abstract
Abstract Crystals of silicon carbide and aluminum nitride, substrates containing same, and the fabrication thereof.
Inventors
- 👤 Richard F. Rutz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 06:22
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C01; C01B; C01B21/00; C01B21/082; C04; C04B; C04B35/00; C04B35/515; C04B35/58; C04B35/581; C30B29/00; C30B29/10; C30B29/38; Y; Y10; Y10T; Y10T428/00; Y10T428/26
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
38 words
Structure containing epitaxial crystals of (SiC) x (AlN) 1-x on a substrate wherein x is about 0.2 to about 0.5, and wherein said substrate is selected from the group of Al 2 O 3 and AlN C-axis crystals.
Claim 2
Dependent Claim
38 words
Structure containing epitaxial crystals of (SiC) x (AlN) 1-x on a substrate wherein x is about 0.2 to about 0.5, and wherein said substrate is selected from the group of Al 2 O 3 and AlN C-axis crystals.
Claim 3
Dependent Claim
10 words
The structure of claim 1 wherein x is about 0.5.
Claim 4
Dependent Claim
16 words
The structure of claim 1 wherein said crystals are about 1 to about 10 microns thick.
Claim 5
Dependent Claim
12 words
The structure of claim 1 wherein the crystals are 2H crystalline form.
Claim 6
Dependent Claim
16 words
The structure of claim 1 wherein said C-axis lattice is about 5.0152 to about 5.0038 Å.
Claim 7
Dependent Claim
19 words
The structure of claim 1 wherein the absorption edge of said crystals is about 4.3 to about 4.8 eV.
Claim 8
Dependent Claim
14 words
The structure of claim 1 wherein said substrate is Al 2 O 3 .
Claim 9
Dependent Claim
16 words
The structure of claim 1 wherein said substrate is <0001> oriented Al 2 O 3 .
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-12-18 | 1988-06-18 | 1988-12-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-12-18 | 1992-06-18 | 1992-12-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-12-18 | 1996-06-18 | 1996-12-18 | $7700.00 | Window Closed / Lapsed |