US4487505A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for processing a signal for alignment
Assignee: Canon Inc
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Filing: 1982-09-17
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Granted: 1984-12-11
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Expires: 2002-09-17
Abstract
Abstract An apparatus for processing a signal for aligning a mask having at least one standard mark thereon with a wafer having at least one reference mark thereon, includes a first sensor for sensing the standard mark, a second sensor for sensing the reference mark through the mask, a threshold value determining circuit for detecting a peak value from a signal stream put out by the first sensor and determining a first threshold value and for detecting a peak value from a signal stream put out by the second sensor and determining a second threshold value, a signal converting circuit for converting a signal of a higher level than the first threshold value from the signal stream put out by the first sensor into a first digital signal and for converting a signal of a higher level than the second threshold value from the signal stream put out by the second sensor into a second digital signal, and a composing circuit for composing the first digital signal and the second digital signal.
Inventors
- 👤 Shigeki Nakano
- 👤 Yasuyoshi Yamada
- 👤 Ryozo Hiraga
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 07:26
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
276 words
A signal processing apparatus usable with a first object having at least one first mark pattern and a second object having at least one second mark pattern thereon, said apparatus comprising: first sensing means for sensing said first mark pattern and putting out a first signal strem containing a desirable signal portion indicative of said first mark pattwern and an undesirable signal portion indicative of information unavoidably sensed by said first sensing means; second sensing means for sensing said second mark pattern and putting out a second signal stream containing a desirable signal portion indicative of said second mark pattern and an undesirable signal portion indicative of information unavoidably sensed by said second sensing means; extracting means for extracting said desirable signal portion indicative of said first mark pattern from said first signal stream and for extracting said desirable signal portion indicative of said second mark pattern from said second signal stream; threshold value determining means for determining a first threshold value from the peak value of the desirable signal portion indicative of said first mark pattern extracted from said first signal stream and for determining a second threshold value from the peak value of the desirable signal portion indicative of said second mark pattern extracted from said second signal stream; signal converting means for converting a signal of a higher level in the first signal stream than the first threshold value into a first digital signal and for converting a signal of a higher level in the second signal stream than the second threshold value into a second digital signal; and signal composing means for composing the first digital signal and the second digital signal.
Claim 2
Dependent Claim
276 words
A signal processing apparatus usable with a first object having at least one first mark pattern and a second object having at least one second mark pattern thereon, said apparatus comprising: first sensing means for sensing said first mark pattern and putting out a first signal strem containing a desirable signal portion indicative of said first mark pattwern and an undesirable signal portion indicative of information unavoidably sensed by said first sensing means; second sensing means for sensing said second mark pattern and putting out a second signal stream containing a desirable signal portion indicative of said second mark pattern and an undesirable signal portion indicative of information unavoidably sensed by said second sensing means; extracting means for extracting said desirable signal portion indicative of said first mark pattern from said first signal stream and for extracting said desirable signal portion indicative of said second mark pattern from said second signal stream; threshold value determining means for determining a first threshold value from the peak value of the desirable signal portion indicative of said first mark pattern extracted from said first signal stream and for determining a second threshold value from the peak value of the desirable signal portion indicative of said second mark pattern extracted from said second signal stream; signal converting means for converting a signal of a higher level in the first signal stream than the first threshold value into a first digital signal and for converting a signal of a higher level in the second signal stream than the second threshold value into a second digital signal; and signal composing means for composing the first digital signal and the second digital signal.
Claim 3
Dependent Claim
50 words
A signal processing apparatus according to claim 1, further comprising means for generating a timing signal from said first and second signal streams and wherein said extracting means extracts the desirable portions of said signals indicative of said respective first and second mark patterns in accordance with said timing signal.
Claim 4
Dependent Claim
23 words
A signal processing apparatus accoring to claim 2, wherein said timing signal generating means generates said timing signal by amplitude-discriminating said signal streams.
Claim 5
Dependent Claim
66 words
A signal processing apparatus according to claim 1, further comprising means for filtering said first and second signal streams and for producing first and second filtered signals; said threshold value determining means including a noise mitigating means for mitigating noise in said desirable signal portions indicative of said first and second mark patterns, respectively extracted by said extracting means, with said first and second filtered signals.
Claim 6
Dependent Claim
33 words
A signal processing apparatus according to claim 1, wherein said first object is a mask provided with an integrated circuit pattern and said second object is a wafer provided with a photoresist layer.
Claim 7
Dependent Claim
31 words
A signal processing apparatus according to claim 6, said apparatus being operable with a projection lens; and wherein said mask and said wafer are conjugate with respect to the projection lens.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-12-11 | 1988-06-11 | 1988-12-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-12-11 | 1992-06-11 | 1992-12-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-12-11 | 1996-06-11 | 1996-12-11 | $7700.00 | Window Closed / Lapsed |