US4481340A
Expired / Lapsed
US
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Photosensitive polyamic acid derivative, compound used in manufacture of derivative, method of manufacturing substrate having polyimide layer, and semiconductor device made from said method
Assignee: Zande Johan M V D
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Filing: 1983-01-24
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Granted: 1984-11-06
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Expires: 2003-01-24
Abstract
Abstract A photosensitive polyamic acid derivative obtained by treating polyamic acid with a compound of the formula (1), compound of formula (1), method of manufacturing a substrate having a polyimide layer by providing the substrate with a layer of the photosensitive polyamic acid derivative and then exposing, developing and imidizing the layer, as well as a semiconductor device comprising a polyimide layer obtained by using the above-mentioned method.
Inventors
- 👤 Lourens Minnema
- 👤 Johan M. van der Zande
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 18:02
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0387
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
57 words
A photosensitive polyamic acid derivative obtained by treating a polyamic acid with a compound of the formula ##STR12## wherein R 2 and R 3 are equal or different and represent a hydrogen atom or an alkyl group having 1-4 carbon atoms, R 1 is an alkyl group having 1-4 carbon atoms, and m has the value 0-3.
Claim 2
Dependent Claim
57 words
A photosensitive polyamic acid derivative obtained by treating a polyamic acid with a compound of the formula ##STR12## wherein R 2 and R 3 are equal or different and represent a hydrogen atom or an alkyl group having 1-4 carbon atoms, R 1 is an alkyl group having 1-4 carbon atoms, and m has the value 0-3.
Claim 3
Dependent Claim
25 words
A photosensitive polyamic acid derivative obtained by treating polyamic acid with a compound of the formula ##STR13## wherein n has the value 0 or 1.
Claim 4
Dependent Claim
25 words
A photosensitive polyamic acid derivative obtained by treating polyamic acid with a compound of the formula ##STR13## wherein n has the value 0 or 1.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-11-06 | 1988-05-07 | 1988-11-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-11-06 | 1992-05-07 | 1992-11-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-11-06 | 1996-05-07 | 1996-11-06 | $7700.00 | Window Closed / Lapsed |