US4479862A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering
Assignee: Vertimag Systems Corp
•
Filing: 1984-01-09
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Granted: 1984-10-30
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Expires: 2004-01-09
Abstract
Abstract A layer of urethane or silicone elastomer is interposed between a plastic film undergoing sputter deposition and a support for the film to avoid thermal damage to the film.
Inventors
- 👤 James W. Swenson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 01:00
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/06; C23C14/14; C23C14/20; C23C14/205
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
63 words
In a method of sputter deposition of a depository material from a cathode to a target material supported on a target substrate, the improvement which comprises sputter depositing said depository material from said cathode onto a plastic film, which is supported during said sputter deposition by a layer of a urethane or silicone elastomer, which is in turn supported by said target substrate.
Claim 2
Dependent Claim
63 words
In a method of sputter deposition of a depository material from a cathode to a target material supported on a target substrate, the improvement which comprises sputter depositing said depository material from said cathode onto a plastic film, which is supported during said sputter deposition by a layer of a urethane or silicone elastomer, which is in turn supported by said target substrate.
Claim 3
Dependent Claim
19 words
The method according to claim 1, wherein said plastic film is a polyester film or a polyvinylidine chloride film.
Claim 4
Dependent Claim
13 words
The method according to claim 1, wherein said elastomer is a urethane elastomer.
Claim 5
Dependent Claim
13 words
The method according to claim 1, wherein said elastomer is a silicone elastomer.
Claim 6
Dependent Claim
15 words
The method according to claim 4, wherein said silicone elastomer is an RTV silicone elastomer.
Claim 7
Dependent Claim
16 words
The method according to claim 5, wherein said silicone elastomer is filled with a metal filler.
Claim 8
Dependent Claim
11 words
The method according to claim 6, wherein said metal is copper.
Claim 9
Dependent Claim
18 words
The method of claim 1, wherein said depository material is a metal, metal oxide, metal alloy or silica.
Claim 10
Dependent Claim
56 words
The method of claim 1, in which said plastic film is moved relative to said cathode during said sputtering deposition, whereby depository material is continuously deposited on said moving film, and said plastic film is continuously supported during sputter deposition at least in the area of said plastic film where depository material is being sputter deposited.
Claim 11
Dependent Claim
22 words
The method according to claim 1, wherein said plastic film is a polyester film and said elastomer is an RTV silicone elastomer.
Claim 12
Dependent Claim
16 words
The method according to claim 12, wherein said silicone elastomer is filled with a metal filler.
Claim 13
Dependent Claim
48 words
A cathode target for a sputter deposition apparatus, which comprises a support, a layer of a urethane or silicone elastomer having one surface thereof in contact with and supported by said support and a plastic film in intimate contact with the other surface of said layer of elastomer.
Claim 14
Dependent Claim
48 words
A cathode target for a sputter deposition apparatus, which comprises a support, a layer of a urethane or silicone elastomer having one surface thereof in contact with and supported by said support and a plastic film in intimate contact with the other surface of said layer of elastomer.
Claim 15
Dependent Claim
19 words
The apparatus according to claim 12, wherein said plastic film is a polyester film or a polyvinylidine chloride film.
Claim 16
Dependent Claim
13 words
The apparatus according to claim 12, wherein said elastomer is a urethane elastomer.
Claim 17
Dependent Claim
13 words
The apparatus according to claim 12, wherein said elastomer is a silicone elastomer.
Claim 18
Dependent Claim
15 words
The apparatus according to claim 15, wherein said silicone elastomer is an RTV silicone elastomer.
Claim 19
Dependent Claim
16 words
The apparatus according to claim 16, wherein said silicone elastomer is filled with a metal filler.
Claim 20
Dependent Claim
11 words
The apparatus according to claim 17, wherein said metal is copper.
Claim 21
Dependent Claim
22 words
The apparatus according to claim 12, wherein said plastic film is a polyester film and said elastomer is an RTV silicone elastomer.
Claim 22
Dependent Claim
16 words
The apparatus according to claim 19, wherein said silicone elastomer is filled with a metal filler.
Claim 23
Dependent Claim
13 words
The apparatus according to claim 12, wherein said support comprises an aluminum plate.
Claim 24
Dependent Claim
13 words
The apparatus according to claim 20, wherein said support comprises an aluminum plate.
Claim 25
Dependent Claim
28 words
The apparatus according to claim 12, wherein said support comprises cylindrical metal wall means, and said elastomer layer is supported on the outer surface of said wall means.
Claim 26
Dependent Claim
21 words
The apparatus according to claim 23, wherein said support means is a rotatable drum means carrying said cylindrical metal wall means.
Claim 27
Dependent Claim
46 words
In a method of treatment of a plastic film during which the film is subject to thermal damage, the improvement which comprises supporting said plastic film during said treatment upon a layer of a urethane or silicone elastomer, which is itself carried by a support means.
Claim 28
Dependent Claim
46 words
In a method of treatment of a plastic film during which the film is subject to thermal damage, the improvement which comprises supporting said plastic film during said treatment upon a layer of a urethane or silicone elastomer, which is itself carried by a support means.
References Cited (Backward Citations)
US4341816A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-10-30 | 1988-04-30 | 1988-10-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-10-30 | 1992-04-30 | 1992-10-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-10-30 | 1996-04-30 | 1996-10-30 | $7700.00 | Window Closed / Lapsed |