Cover gas control of bonding ball formation

Claim 2

In a method for forming a ball at the end of lead wire held in a bonding tool of a ball bonding machine for ball bonding of the lead wire to a die pad an integrated circuit chip including the steps of substantially enclosing the end of the lead wire in a shield, flooding the shield and the end of the lead wire with a flow of inert cover gas, and electrically discharging an arc between the lead wire and the shield for melting and forming the ball at the end of the lead wire, the improvement comprising: generating a flow of hydrogen gas separate from said inert cover gas; mixing the flow of hydrogen gas with the flow of inert cover gas at a location upstream from the shield a sufficient distance to permit substantially complete mixing of the hydrogen and inert cover gas upon reaching the shield; and controlling the percent by volume of hydrogen comprising the cover gas mixture to substantially eliminate oxidation during the ball forming process.

Claim 3

The method of claim 1 further comprising the step of controlling the percent by volume of hydrogen in the cover gas mixture over a range of greater than zero percent to less than 25% for controlling the size and shape of the ball formed at the end of the lead wire for ball bonding to a die pad of an integrated circuit chip.

Claim 4

The method of claim 1 further comprising the step of controlling the percent by volume of hydrogen comprising said cover gas mixture and varying said percentage by volume over a range from greater than zero percent to 18% for controlling the shape and size of the ball formed at the end of the bonding wire.

Claim 5

The method of claim 1 further comprising the step of controlling the percent by volume of hydrogen in the cover gas mixture in the preferred range of approximately 7% to 10% hydrogen gas.

Claim 6

The method of claim 1 wherein said inert cover gas is composed substantially of argon.

Claim 9

The method of claim 6 wherein the reactive cover gas comprises hydrogen.

Claim 10

The method of claim 7 wherein the step of controlling the percent by volume of reactive cover gas in the cover gas mixture comprises controlling the percent by volume of hydrogen in the cover gas mixture over a range of greater than 0% to less than 25% for controlling the size and shape of the ball formed at the end of the lead wire.

Claim 11

The method of claim 7 wherein the inert cover gas comprises argon.

Claim 12

The method of claim 6 wherein the reactive cover gas comprises hydrogen and wherein the step of controlling the percent by volume of reactive cover gas comprising the cover gas mixture comprises controlling the percent by volume of hydrogen in the cover gas mixture in a range from 0.5% to 18% for controlling the shape and size of the ball formed at the end of the lead wire.

Claim 13

The method of claim 10 comprising the step of limiting the percent by volume of hydrogen in the cover gas mixture to the preferred range of approximately 7% to 10%.

Claim 14

The method of claim 10 wherein the inert cover gas comprises argon.

Claim 15

Apparatus for forming a ball at the end of lead wire held in the bonding tool of a ball bonding machine for ball bonding of the lead wire to a die pad of an integrated circuit chip, and for controlling the size and shape of the ball formed at the end of the lead wire, said apparatus including a shield for substantially enclosing the end of the lead wire, inert cover gas delivering means for flooding the shield and the end of the lead wire with an inert cover gas, and electrical means for establishing an arc between the lead wire and the shield for melting and forming a ball at the end of the lead wire, the improvement comprising: reactive cover gas delivery means coupled to the inert cover gas delivery means for delivering and mixing a reactive cover gas with said inert cover gas at a location upstream from the shield for delivering a cover gas mixture of reactive cover gas and inert cover gas at the shield; reactive cover gas having a thermal conductivity substantially different from the inert cover gas, said reactive cover gas being delivered by the reactive cover gas delivery means; and valve means for metering and controlling the percent by volume of reactive cover gas in said cover gas mixture for controlling the effective thermal conductivity of the cover gas mixture and thereby the size and shape of the ball formed at the end of the lead wire as well as substantially eliminating oxidation during ball formation.

Claim 16

Apparatus for forming a ball at the end of lead wire held in the bonding tool of a ball bonding machine for ball bonding of the lead wire to a die pad of an integrated circuit chip, and for controlling the size and shape of the ball formed at the end of the lead wire, said apparatus including a shield for substantially enclosing the end of the lead wire, inert cover gas delivering means for flooding the shield and the end of the lead wire with an inert cover gas, and electrical means for establishing an arc between the lead wire and the shield for melting and forming a ball at the end of the lead wire, the improvement comprising: reactive cover gas delivery means coupled to the inert cover gas delivery means for delivering and mixing a reactive cover gas with said inert cover gas at a location upstream from the shield for delivering a cover gas mixture of reactive cover gas and inert cover gas at the shield; reactive cover gas having a thermal conductivity substantially different from the inert cover gas, said reactive cover gas being delivered by the reactive cover gas delivery means; and valve means for metering and controlling the percent by volume of reactive cover gas in said cover gas mixture for controlling the effective thermal conductivity of the cover gas mixture and thereby the size and shape of the ball formed at the end of the lead wire as well as substantially eliminating oxidation during ball formation.

Claim 17

The apparatus of claim 13 wherein the reactive cover gas comprises hydrogen cover gas.

Claim 18

The apparatus of claim 14 wherein the inert cover gas comprises argon.

Claim 19

The apparatus of claim 15 wherein said valve means is constructed and arranged for metering and controlling the percent by volume of hydrogen in the cover gas mixture in a range from 0.5% to 18%.