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US4476172A Expired / Lapsed US ⏱️ 0.0 years remaining

Pellicle compositions and pellicles thereof for projection printing

Assignee: Avantor Performance Materials LLC
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Filing: 1983-04-18
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Granted: 1984-10-09
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Expires: 2003-04-18
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Abstract

Abstract A pellicle for use in projection printing comprises a pellicle in which the transparent film is formed from the novel film forming reaction product of a polyvinyl butyral resin with a silane. Pellicles employing such films are useful in the near, mid and deep UV regions.

Inventors

  • 👤 Irl E. Ward

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 06:27
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/62; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31652; Y10T428/31663; Y10T428/31942

Claims Analysis

Total Claims: 23
Claim 1
Independent Claim 157 words
A pellicle film for use in projection printing comprising a film formed from a film forming polymer having the following structural unit: ##STR16## wherein x is ≦0.12, y is ≦0.02 and z is ≧0.88, R is methyl or ethyl, m is a whole integer of 1, 2 or 3, n is a whole integer equal to 4-m, and G is ##STR17## wherein p is 0, 1, 2, 3 or 4 and Q is a member selected from the group consisting of --R 1 , --OR 1 , ##STR18## when p is 1, 2, 3 or 4 and Q is selected from the group consisting of --R 1 , ##STR19## when p is equal to 0, wherein R 1 is alkyl of 1 to 4 carbon atoms, R 2 , R 4 and R 5 are selected from the group consisting of hydrogen and R 1 , and R 3 is alkylene of 1 to 4 carbon atoms.
Claim 2
Dependent Claim 157 words
A pellicle film for use in projection printing comprising a film formed from a film forming polymer having the following structural unit: ##STR16## wherein x is ≦0.12, y is ≦0.02 and z is ≧0.88, R is methyl or ethyl, m is a whole integer of 1, 2 or 3, n is a whole integer equal to 4-m, and G is ##STR17## wherein p is 0, 1, 2, 3 or 4 and Q is a member selected from the group consisting of --R 1 , --OR 1 , ##STR18## when p is 1, 2, 3 or 4 and Q is selected from the group consisting of --R 1 , ##STR19## when p is equal to 0, wherein R 1 is alkyl of 1 to 4 carbon atoms, R 2 , R 4 and R 5 are selected from the group consisting of hydrogen and R 1 , and R 3 is alkylene of 1 to 4 carbon atoms.
Claim 3
Dependent Claim 153 words
A castable solution of a film forming polymer comprising a polymer having the following structural unit: ##STR20## wherein x is ≦0.12, y is ≦0.02 and z is ≧0.88, R is methyl or ethyl, m is a whole integer of 1, 2 or 3, n is a whole integer equal to 4-m, and G is ##STR21## wherein p is 0, 1, 2, 3 or 4 and Q is a member selected from the group consisting of --R 1 , --OR 1 , ##STR22## when p is equal to 1, 2, 3 or 4 and Q is selected from the group consisting of --R 1 , ##STR23## when p is equal to zero wherein R 1 is alkyl of 1 to 4 carbon atoms, R 2 , R 4 and R 5 are selected from the group consisting of hydrogen and R 1 , and R 3 is alkylene of 1 to 4 carbon atoms.
Claim 4
Dependent Claim 153 words
A castable solution of a film forming polymer comprising a polymer having the following structural unit: ##STR20## wherein x is ≦0.12, y is ≦0.02 and z is ≧0.88, R is methyl or ethyl, m is a whole integer of 1, 2 or 3, n is a whole integer equal to 4-m, and G is ##STR21## wherein p is 0, 1, 2, 3 or 4 and Q is a member selected from the group consisting of --R 1 , --OR 1 , ##STR22## when p is equal to 1, 2, 3 or 4 and Q is selected from the group consisting of --R 1 , ##STR23## when p is equal to zero wherein R 1 is alkyl of 1 to 4 carbon atoms, R 2 , R 4 and R 5 are selected from the group consisting of hydrogen and R 1 , and R 3 is alkylene of 1 to 4 carbon atoms.
Claim 5
Dependent Claim 144 words
A polymer having the following structural unit: ##STR24## wherein x is ≦0.12, y is ≦0.02 and z is ≧0.88, R is methyl or ethyl, m is a whole integer of 1, 2 or 3, n is a whole integer equal to 4-m, and G is ##STR25## wherein p is 0, 1, 2, 3 or 4 and Q is a member selected from the group consisting of --R 1 , --OR 1 , ##STR26## when p is equal to 1, 2, 3 or 4 and Q is selected from the group consisting of --R 1 , ##STR27## when p is equal to zero wherein R 1 is alkyl of 1 to 4 carbon atoms, R 2 , R 4 and R 5 are selected from the group consisting of hydrogen and R 1 , and R 3 is alkylene of 1 to 4 carbon atoms.
Claim 6
Dependent Claim 144 words
A polymer having the following structural unit: ##STR24## wherein x is ≦0.12, y is ≦0.02 and z is ≧0.88, R is methyl or ethyl, m is a whole integer of 1, 2 or 3, n is a whole integer equal to 4-m, and G is ##STR25## wherein p is 0, 1, 2, 3 or 4 and Q is a member selected from the group consisting of --R 1 , --OR 1 , ##STR26## when p is equal to 1, 2, 3 or 4 and Q is selected from the group consisting of --R 1 , ##STR27## when p is equal to zero wherein R 1 is alkyl of 1 to 4 carbon atoms, R 2 , R 4 and R 5 are selected from the group consisting of hydrogen and R 1 , and R 3 is alkylene of 1 to 4 carbon atoms.
Claim 7
Dependent Claim 28 words
A pellicle film of claim 1 wherein x is from about 0.09 to 0.12, y is from about 0.0 to 0.02, m is 3 and n is 1.
Claim 8
Dependent Claim 28 words
A castable solution of claim 2 wherein x is from about 0.09 to 0.12, y is from about 0.0 to 0.02, m is 3 and n is 1.
Claim 9
Dependent Claim 27 words
A polymer of claim 3 wherein x is from about 0.09 to 0.12, y is from about 0.0 to 0.02, m is 3 and n is 1.
Claim 10
Dependent Claim 15 words
A pellicle film of claim 4 wherein G is ##STR28## and wherein p is 3.
Claim 11
Dependent Claim 15 words
A castable solution of claim 5 wherein G is ##STR29## and wherein p is 3.
Claim 12
Dependent Claim 14 words
A polymer of claim 6 wherein G is ##STR30## and wherein p is 3.
Claim 13
Dependent Claim 21 words
A pellicle film of claim 7 wherein Q is ##STR31## and wherein R 3 is ##STR32## and R 2 is hydrogen.
Claim 14
Dependent Claim 21 words
A castable solution of claim 8 wherein Q is ##STR33## and wherein R 3 is ##STR34## and R 2 is hydrogen.
Claim 15
Dependent Claim 20 words
A polymer of claim 9 wherein Q is ##STR35## and wherein R 3 is ##STR36## and R 2 is hydrogen.
Claim 16
Dependent Claim 10 words
A pellicle film of claim 10 wherein R is methyl.
Claim 17
Dependent Claim 10 words
A castable solution of claim 11 wherein R is methyl.
Claim 18
Dependent Claim 9 words
A polymer of claim 12 wherein R is methyl.
Claim 19
Dependent Claim 19 words
A pellicle for use in projection printing comprising a film of claim 1 mounted in a pellicle mounting ring.
Claim 20
Dependent Claim 19 words
A pellicle for use in projection printing comprising a film of claim 4 mounted in a pellicle mounting ring.
Claim 21
Dependent Claim 19 words
A pellicle for use in projection printing comprising a film of claim 7 mounted in a pellicle mounting ring.
Claim 22
Dependent Claim 19 words
A pellicle for use in projection printing comprising a film of claim 10 mounted in a pellicle mounting ring.
Claim 23
Dependent Claim 19 words
A pellicle for use in projection printing comprising a film of claim 13 mounted in a pellicle mounting ring.

References Cited (Backward Citations)

US30601A Cited
US4148637A Cited
US4110762A Cited
US4131363A Cited
US4250240A Cited
USRE30601E Cited
US4413025A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-10-09 1988-04-09 1988-10-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-10-09 1992-04-09 1992-10-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-10-09 1996-04-09 1996-10-09 $7700.00 Window Closed / Lapsed

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