US4469552A
Expired / Lapsed
US
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Process and apparatus for growing a crystal ribbon
Assignee: United States, AS REPRESENTED BY ADMINISTRATOR NATIONAL AERONAUTICS AND SPACE ADMINISTRATION
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Filing: 1982-04-23
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Granted: 1984-09-04
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Expires: 2002-04-23
Abstract
Abstract A process and apparatus is disclosed for growing a crystal ribbon (42) of a substance of theoretically infinite length from a melt (32) of the substance. A pair of fixedly positioned edge defining members (44) are partially submerged into the melt (32) so as to break the surface (34) of the melt (32) at a predetermined distance from one another. The edge defining members (44) are wettable by the melt and the predetermined distance substantially corresponds to the width of the crystal ribbon (42) to be grown. The crystal ribbon (42) is grown by contacting the surface (34) of the melt (32) with a seed ribbon (38) between the edge defining members (44) whereby a meniscus (48) of the melt (32) is established on the seed ribbon (38). The meniscus (48) is stabilized by the meniscus (50) of the melt (32) on the edge defining members (44). Pulling the seed crystal ribbon (38) away from the melt (32) results in continuous growth of the crystal ribbon (42).
Inventors
- 👤 Jay W. Thornhill
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 09:17
CPC Classifications
C; C30; C30B; C30B15/00; C30B15/20; C30B15/22; C30B15/24; Y; Y10; Y10S; Y10S117/00; Y10S117/90; Y10T; Y10T117/00; Y10T117/10; Y10T117/1024; Y10T117/1032; Y10T117/1036; Y10T117/1044
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
259 words
An apparatus for growing a crystalline ribbon of silicon from molten silicon, said ribbon substantially having the cross-section of a relatively wide and thin rectangle, the apparatus comprising: a heatable container adapted to holding said molten silicon, said molten silicon having an upper surface level which is within a predetermined range in the container; a pair of edge defining members fixedly positioned and stationarily mounted relative to the container, each member being partially submerged in the molten silicon and having a portion which protrudes from the molten silicon above the upper surface level, the two members being of a material compatible with molten silicon and wettable thereby and breaking the upper surface level of the molten silicon at two spaced apart locations; said edge defining members being filaments fixedly mounted relative to the heatable container at points disposed above the upper level of the molten silicon, said filaments being substantially straight and disposed at an angle other than 90 degrees relative to the upper level of molten silicon in the container so that the distance between the filaments increases with increasing distance upwards from the upper level of the molten silicon in the container; and a means for contacting a silicon seed crystal of a width corresponding to the distance between the edge defining members at the upper surface level with the molten silicon between the members and for gradually pulling the seed crystal away from the molten silicon in a direction substantially normal to the upper surface level whereby a crystalline silicon ribbon of indefinite length is grown.
Claim 2
Independent Claim
259 words
An apparatus for growing a crystalline ribbon of silicon from molten silicon, said ribbon substantially having the cross-section of a relatively wide and thin rectangle, the apparatus comprising: a heatable container adapted to holding said molten silicon, said molten silicon having an upper surface level which is within a predetermined range in the container; a pair of edge defining members fixedly positioned and stationarily mounted relative to the container, each member being partially submerged in the molten silicon and having a portion which protrudes from the molten silicon above the upper surface level, the two members being of a material compatible with molten silicon and wettable thereby and breaking the upper surface level of the molten silicon at two spaced apart locations; said edge defining members being filaments fixedly mounted relative to the heatable container at points disposed above the upper level of the molten silicon, said filaments being substantially straight and disposed at an angle other than 90 degrees relative to the upper level of molten silicon in the container so that the distance between the filaments increases with increasing distance upwards from the upper level of the molten silicon in the container; and a means for contacting a silicon seed crystal of a width corresponding to the distance between the edge defining members at the upper surface level with the molten silicon between the members and for gradually pulling the seed crystal away from the molten silicon in a direction substantially normal to the upper surface level whereby a crystalline silicon ribbon of indefinite length is grown.
Claim 3
Dependent Claim
28 words
The apparatus of claim 1 wherein the material of the edge defining members is selected from the group consisting of quartz, carbon, graphite, silicon carbide and silicon nitride.
Claim 4
Dependent Claim
31 words
The apparatus of claim 1 or 2 wherein the distance between the locations wherein the filaments break the upper surface level of the molten silicon is between 1 to 5 cm.
Claim 5
Dependent Claim
274 words
A process for producing a crystalline ribbon of indefinite length and of a substantially rectangular cross-section from a melt of silicon, said process comprising the steps of: maintaining a melt of silicon in a heatable container; maintaining a pair of edge defining members in a fixed position relative to the container and in a spatial relationship wherein each edge defining member is partially submerged in the melt and partially protrudes therefrom, the edge defining members being of a material which is wettable by molten silicon and breaking the upper surface of the molten silicon at two fixed spaced apart locations; said edge defining members being filaments fixedly mounted relative to the heatable container at points disposed above the upper level of molten material, said filaments being substantially straight and disposed at an angle other than 90 degrees relative to the upper level of molten silicon in the container so that the distance between the filaments increases with increasing distance upwards from the upper level of the molten silicon in the container; and contacting a silicon seed crystal ribbon with the upper surface of the molten silicon between the edge defining members so that respective lateral edges of the seed crystal ribbon also contact the respective edge defining members at the two spaced apart locations, whereby a meniscus of molten silicon in formed under the seed crystal ribbon, and between the edge defining members, and pulling the seed crystal ribbon away from the upper surface of the melt in a direction substantially normal to the melt, whereby the crystalline silicon ribbon of substantially the same cross-section as the seed crystal is grown from the melt.
Claim 6
Dependent Claim
274 words
A process for producing a crystalline ribbon of indefinite length and of a substantially rectangular cross-section from a melt of silicon, said process comprising the steps of: maintaining a melt of silicon in a heatable container; maintaining a pair of edge defining members in a fixed position relative to the container and in a spatial relationship wherein each edge defining member is partially submerged in the melt and partially protrudes therefrom, the edge defining members being of a material which is wettable by molten silicon and breaking the upper surface of the molten silicon at two fixed spaced apart locations; said edge defining members being filaments fixedly mounted relative to the heatable container at points disposed above the upper level of molten material, said filaments being substantially straight and disposed at an angle other than 90 degrees relative to the upper level of molten silicon in the container so that the distance between the filaments increases with increasing distance upwards from the upper level of the molten silicon in the container; and contacting a silicon seed crystal ribbon with the upper surface of the molten silicon between the edge defining members so that respective lateral edges of the seed crystal ribbon also contact the respective edge defining members at the two spaced apart locations, whereby a meniscus of molten silicon in formed under the seed crystal ribbon, and between the edge defining members, and pulling the seed crystal ribbon away from the upper surface of the melt in a direction substantially normal to the melt, whereby the crystalline silicon ribbon of substantially the same cross-section as the seed crystal is grown from the melt.
Claim 7
Dependent Claim
28 words
The process of claim 4 wherein the material of the edge defining members is selected from the group consisting of quartz, carbon, graphite, silicon nitride and silicon carbide.
Claim 8
Dependent Claim
23 words
The process of claim 4 wherein the two spaced apart locations are at a distance of 1 to 5 cm from one another.
Claim 9
Dependent Claim
16 words
The process of claim 6 wherein the seed crystal is 200 microns to 3 mm thick.
Claim 10
Dependent Claim
24 words
The process of claim 7 wherein the speed crystal ribbon is pulled away from the melt at a speed between 1 to 2.5 cm/min.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-09-04 | 1988-03-05 | 1988-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-09-04 | 1992-03-05 | 1992-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-09-04 | 1996-03-05 | 1996-09-04 | $7700.00 | Window Closed / Lapsed |