US4466875A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Auxiliary heater for magnetron sputtering
Assignee: PPG Industries Ohio Inc
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Filing: 1983-11-30
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Granted: 1984-08-21
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Expires: 2003-11-30
Abstract
Abstract An improved heating means is disclosed for substrates to be coated by cathode sputtering, comprising a radiant heating means used in scanning mode prior to cathode sputtering to heat directly the surface to be coated.
Inventors
- 👤 F. Howard Gillery
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 04:37
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/20; C23C14/205; C23C14/22; C23C14/54; C23C14/541
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
41 words
In a method for coating a large substrate by sputtering a scanning cathode wherein the substrate is heated, the improvement which comprises employing radiant heating means in scanning mode to heat the top surface to be coated prior to cathode sputtering.
Claim 2
Dependent Claim
41 words
In a method for coating a large substrate by sputtering a scanning cathode wherein the substrate is heated, the improvement which comprises employing radiant heating means in scanning mode to heat the top surface to be coated prior to cathode sputtering.
Claim 3
Dependent Claim
24 words
The improved method according to claim 1, wherein the radiant heating means is attached to the scanning mechanism to which the cathode is attached.
Claim 4
Dependent Claim
20 words
The improved method according to claim 1, wherein the substrate is selected from the group consisting of glass and plastics.
Claim 5
Dependent Claim
12 words
The improved method according to claim 3, wherein the substrate is acrylic.
Claim 6
Dependent Claim
16 words
The improved method according to claim 1, wherein the radiant heating means is a quartz heater.
Claim 7
Dependent Claim
28 words
The improved method according to claim 1, wherein the radiant heater means to heat the top surface is employed in combination with means to heat the bottom surface.
Claim 8
Dependent Claim
18 words
The improved method according to claim 1, wherein the radiant heating means is inactivated when cathode sputtering commences.
Claim 9
Dependent Claim
21 words
The improved method according to claim 1, wherein the top surface is heated to at least 180° F. (about 82° C.).
Claim 10
Dependent Claim
21 words
The improved method according to claim 8, wherein the top surface is heated to at least 195° F. (about 91° C.).
Claim 11
Dependent Claim
33 words
The improved method according to claim 8, wherein the heat from the cathode sputtering process maintains the top surface temperature in the range of 195° to 230° F. (about 91° to 110° C.).
Claim 12
Dependent Claim
27 words
The improved method according to claim 10, wherein the top surface temperature is maintained in the range of 200° to 210° F. (about 93° to 99° C.).
Claim 13
Dependent Claim
24 words
The improved method according to claim 1, wherein the cathode comprises a metal selected from the group consisting of indium, tin and mixtures thereof.
Claim 14
Dependent Claim
21 words
The improved method according to claim 12, wherein the cathode comprises an alloy of 90 percent indium and 10 percent tin.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-08-21 | 1988-02-20 | 1988-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-08-21 | 1992-02-20 | 1992-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-08-21 | 1996-02-20 | 1996-08-21 | $7700.00 | Window Closed / Lapsed |