Patent US2061992A successfully refreshed from Google Patents.
US4466746A
Expired / Lapsed
US
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Ebulliometric hot spot detector
Assignee: Silicon Valley Bank Inc
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Filing: 1981-12-01
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Granted: 1984-08-21
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Expires: 2001-12-01
Abstract
Abstract An ebulliometric hot spot detector detects hot spots with a resolution of the order of a micron on semiconductor devices. The device to be tested is operated in a suitable liquid contained in the detector, and the liquid pressure is decreased until boiling from sites on the device is observed. The liquid pressure is then increased until boiling ceases; meanwhile, the boiling sites on the device are observed. Small bubbles observed just before cessation of boiling pinpoint the hot spot locations. The pressure at which boiling ceases in a given liquid determines the hot spot temperature.
Inventors
- 👤 Robert D. Hancock
- 👤 Kenneth F. Hollman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 16:52
CPC Classifications
G; G01; G01K; G01K13/00; G01N; G01N25/00; G01N25/02; G01N25/08; G01N25/085; G01N25/72
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
129 words
An ebulliometric hot spot detector for detecting hot spots on a powered electronic device, comprising: container means for containing an ebulliometric liquid and a powered electronic device within a chamber, with said electronic device supported submerged in said ebulliometric liquid, power means for applying power to said electronic device, pressurizing means for establishing and varying pressure in the ebulliometric liquid in said chamber, detector means for detecting the onset and termination of bubbling of said ebulliometric liquid in said chamber from the surface of said integrated circuit as said pressure is varied, including means for detecting the location of the sources of said bubbling, and output means responsive to said pressure for generating and displaying a signal indicative of said pressure at the time of said termination of bubbling.
Claim 2
Dependent Claim
129 words
An ebulliometric hot spot detector for detecting hot spots on a powered electronic device, comprising: container means for containing an ebulliometric liquid and a powered electronic device within a chamber, with said electronic device supported submerged in said ebulliometric liquid, power means for applying power to said electronic device, pressurizing means for establishing and varying pressure in the ebulliometric liquid in said chamber, detector means for detecting the onset and termination of bubbling of said ebulliometric liquid in said chamber from the surface of said integrated circuit as said pressure is varied, including means for detecting the location of the sources of said bubbling, and output means responsive to said pressure for generating and displaying a signal indicative of said pressure at the time of said termination of bubbling.
Claim 3
Dependent Claim
17 words
An ebulliometric hot spot detector according to claim 1 including an ebulliometric liquid comprising a fluorocarbon liquid.
Claim 4
Dependent Claim
94 words
An ebulliometric hot spot detector according to claim 1 wherein said container means includes a bubble cauldron comprising: a container capable of containing said ebulliometric liquid at pressures substantially higher than atmospheric, ambient temperature control means for raising and lowering the internal temperature of said ebulliometric liquid contained in said cauldron, viewing means for optically coupling the interior of said cauldron to the outside of said cauldron, and mounting means for supporting said integrated circuit within said bubble cauldron in a position viewable from outside said bubble cauldron by use of said viewing means.
Claim 5
Dependent Claim
45 words
An ebulliometric hot spot detector according to claim 3 wherein said power means includes a printed circuit board having at least a portion situated within said bubble cauldron and including means for making electrical connections to said printed circuit board externally to said bubble cauldron.
Claim 6
Dependent Claim
35 words
An ebulliometric hot spot detector according to claim 3 including a reservoir for containing said ebulliometric liquid, and means for filling said bubble cauldron from said reservoir and emptying said bubble cauldron into said reservoir.
Claim 7
Dependent Claim
22 words
An ebulliometric hot spot detector according to claim 5 wherein said means for filling includes at least one thermistor liquid level detector.
Claim 8
Dependent Claim
21 words
An ebulliometric hot spot detector according to claim 1, wherein said container means including a pressure transducer disposed within said chamber.
Claim 9
Dependent Claim
17 words
An ebulliometric hot spot detector according to claim 7 wherein said pressurizing means includes a bellows pump.
Claim 10
Dependent Claim
28 words
An ebulliometric hot spot detector according to claim 8 wherein said pressurizing means further includes a stepping motor, and said bellows pump is operated by said stepping motor.
Claim 11
Dependent Claim
16 words
An ebulliometric hot spot detector according to claim 1 wherein said detector means includes a microscope.
Claim 12
Dependent Claim
16 words
An ebulliometric hot spot detector according to claim 1 wherein said viewing means includes remote television.
Claim 13
Dependent Claim
43 words
An ebulliometric hot spot detector according to claim 1 including boiling point determination means, responsive to said signal from said output means, for determining the boiling point temperature of said ebulliometric liquid at said pressure at the time of said termination of boiling.
Claim 14
Dependent Claim
61 words
An ebulliometric hot spot detector according to claim 12 wherein said boiling point determination means includes a heatable point immersed in said ebulliometric liquid within said chamber, means for determining the temperature of said heatable point, means for raising and lowering the temperature of said heatable point, and means for detecting the onset and cessation of bubbling from said heatable point.
Claim 15
Dependent Claim
73 words
An ebulliometric hot spot detector according to any one of claims 1 to 10, 13, 11 and, 12 wherein said hot spot detector further comprises a microprocessor/control means for controlling any of the means for filling, power means, pressurizing means, detection means, and boiling point determination means, and wherein any of said means for filling, power means, pressurizing means, detection means and boiling point determination means operate under control of said microprocessor/control means.
Claim 16
Dependent Claim
131 words
An ebulliometric hot spot detector for detecting hot spots on an integrated circuit comprising: an ebulliometric liquid, container means for containing said ebulliometric liquid and said integrated circuit within a chamber, with said integrated circuit supported submerged in said ebulliometric liquid, power means for applying power to said integrated circuit, pressurizing means for establishing and varying pressure in said ebulliometric liquid in said chamber, detection means for detecting the onset and cessation of bubbling of said ebulliometric liquid in said chamber from the surface of said integrated circuit as said pressure is varied, including means for detecting the location of at least one of the sources of said bubbling, and temperature determination means responsive to said pressure for determining the temperature of at least one of the sources of said bubbling.
Claim 17
Dependent Claim
131 words
An ebulliometric hot spot detector for detecting hot spots on an integrated circuit comprising: an ebulliometric liquid, container means for containing said ebulliometric liquid and said integrated circuit within a chamber, with said integrated circuit supported submerged in said ebulliometric liquid, power means for applying power to said integrated circuit, pressurizing means for establishing and varying pressure in said ebulliometric liquid in said chamber, detection means for detecting the onset and cessation of bubbling of said ebulliometric liquid in said chamber from the surface of said integrated circuit as said pressure is varied, including means for detecting the location of at least one of the sources of said bubbling, and temperature determination means responsive to said pressure for determining the temperature of at least one of the sources of said bubbling.
Claim 18
Dependent Claim
87 words
An ebulliometric hot spot detector according to claim 15 wherein said pressurizing means includes a pump comprising: housing means for cleanly containing said ebulliometric liquid under positive and negative gauge pressures, connecting means for carrying said ebulliometric liquid from said housing means to said apparatus, a bellows having an interior chamber and an external face, said external face housing means to contain said liquid under positive and negative gauge pressures separate from said interior chamber of said bellows, and driving means for expanding and contracting said bellows.
Claim 19
Dependent Claim
25 words
An ebulliometric hot spot detector according to claim 16 wherein said interior chamber of said bellows contains gas at a predetermined pressure different from atmospheric.
Claim 20
Dependent Claim
52 words
An ebulliometric method for detecting hot spots on a powered electronic device comprising the steps of: submerging a powered electronic device in ebulliometric fluid, producing such pressure in said ebulliometric fluid as to produce boiling from said device, increasing said pressure until said boiling ceases, and observing boiling sites on said device.
Claim 21
Dependent Claim
52 words
An ebulliometric method for detecting hot spots on a powered electronic device comprising the steps of: submerging a powered electronic device in ebulliometric fluid, producing such pressure in said ebulliometric fluid as to produce boiling from said device, increasing said pressure until said boiling ceases, and observing boiling sites on said device.
Claim 22
Dependent Claim
29 words
An ebulliometric method according to claim 18 including the step of determining the location on said device of at least one boiling source as boiling from said source ceases.
Claim 23
Dependent Claim
24 words
An ebulliometric method according to claim 18 including the step of determining the pressure at which boiling from at least one boiling source ceases.
Claim 24
Dependent Claim
24 words
An ebulliometric method according to claim 18 including the step of determining the temperature of at least one boiling source when boiling ceases thereat.
Claim 25
Dependent Claim
34 words
An ebulliometric method according to claim 18 including the step of determining from the pressure at which boiling ceases the temperature at which at least one of the sources of bubbling operates in air.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-08-21 | 1988-02-20 | 1988-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-08-21 | 1992-02-20 | 1992-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-08-21 | 1996-02-20 | 1996-08-21 | $7700.00 | Window Closed / Lapsed |