Fabrication of FETs

Claim 1

A method of fabricating a field effect transistor including a source and drain region formed in the surface of a semiconductor substrate with a channel region therebetween, the method comprising the steps of: forming over the channel region a multi-level electrode structure including successive layers of a gate electrode metal, a first insulator, and a silicide forming metal; forming a second insulator along the edges of the electrode structure; depositing a layer of polycrystalline silicon over essentially the entire transistor area; reacting the silicide forming metal with the polycrystalline silicon so as to form a metal silicide over the electrode structure; and selectively etching the metal silicide without affecting the first or second insulator or the remaining polycrystalline silicon layer.

Claim 2

A method of fabricating a field effect transistor including a source and drain region formed in the surface of a semiconductor substrate with a channel region therebetween, the method comprising the steps of: forming over the channel region a multi-level electrode structure including successive layers of a gate electrode metal, a first insulator, and a silicide forming metal; forming a second insulator along the edges of the electrode structure; depositing a layer of polycrystalline silicon over essentially the entire transistor area; reacting the silicide forming metal with the polycrystalline silicon so as to form a metal silicide over the electrode structure; and selectively etching the metal silicide without affecting the first or second insulator or the remaining polycrystalline silicon layer.

Claim 11

A method of fabricating a field effect transistor including a source and drain region formed in the surface of a semiconductor substrate with a channel region therebetween, the method comprising forming over the substrate a first insulating layer which includes thick and thin portions, where the thin portions cover the area of the substrate which will comprise the transistor; successively forming over the channel region a multi-level electrode structure including successive layers of a first polycrystalline silicon, a first silicon dioxide, palladium, and a second silicon dioxide; following formation of the electrode structure, forming a third layer of silicon dioxide over the resulting structure, and anisotropically etching said layer to leave portions along the edges of the electrode, expose the palladium layer, and remove exposed areas of the thin portion of the first insulating layer; depositing a second layer of polycrystalline silicon doped with impurities having a conductivity type opposite to the substrate over essentially the entire transistor area; reacting the palladium layer with the polycrystalline layer to form palladium silicide over the electrode structure; selectively etching the palladium silicide without affecting the first silicon dioxide layer or the portions of silicon dioxide along the edges of the electrode structure or the remaining area of the second polycrystalline silicon layer; diffusing the impurities from the remaining second polycrystalline silicon layer into the areas of the substrate not covered by thin portions of the first insulator to form source and drain regions; converting the remaining second polycrystalline silicon layer into a second silicide layer; forming a second insulating layer over the resulting structure and exposing the second silicide layer over the thick portions of the first insulating layer in areas removed from the source and drain regions; and forming ohmic contact to the second silicide layer by depositing aluminum in the openings in the second insulating layer.

Claim 12

A method of fabricating a field effect transistor including a source and drain region formed in the surface of a semiconductor substrate with a channel region therebetween, the method comprising forming over the substrate a first insulating layer which includes thick and thin portions, where the thin portions cover the area of the substrate which will comprise the transistor; successively forming over the channel region a multi-level electrode structure including successive layers of a first polycrystalline silicon, a first silicon dioxide, palladium, and a second silicon dioxide; following formation of the electrode structure, forming a third layer of silicon dioxide over the resulting structure, and anisotropically etching said layer to leave portions along the edges of the electrode, expose the palladium layer, and remove exposed areas of the thin portion of the first insulating layer; depositing a second layer of polycrystalline silicon doped with impurities having a conductivity type opposite to the substrate over essentially the entire transistor area; reacting the palladium layer with the polycrystalline layer to form palladium silicide over the electrode structure; selectively etching the palladium silicide without affecting the first silicon dioxide layer or the portions of silicon dioxide along the edges of the electrode structure or the remaining area of the second polycrystalline silicon layer; diffusing the impurities from the remaining second polycrystalline silicon layer into the areas of the substrate not covered by thin portions of the first insulator to form source and drain regions; converting the remaining second polycrystalline silicon layer into a second silicide layer; forming a second insulating layer over the resulting structure and exposing the second silicide layer over the thick portions of the first insulating layer in areas removed from the source and drain regions; and forming ohmic contact to the second silicide layer by depositing aluminum in the openings in the second insulating layer.