US4453181A
Expired / Lapsed
US
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Scanning-image forming apparatus using photo response signal
Assignee: Hitachi Ltd
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Filing: 1981-10-15
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Granted: 1984-06-05
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Expires: 2001-10-15
Abstract
Abstract A scanning-image forming apparatus using a photo-response signal according to this invention is constructed so that the photo-response signal obtained by scanning the surface of a semiconductor specimen with a photon beam is subjected to a 2nd differentiation, and that an image is displayed by employing the 2nd derivative of the photo-response signal as a modulation signal.
Inventors
- 👤 Chusuke Munakata
- 👤 Hideki Kohno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 22:22
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/265; G01R31/2656; G01R31/28; G01R31/302; G01R31/308; H; H04; H04N; H04N1/00; H04N1/40; H04N1/409
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
109 words
A scanning-image forming apparatus using a photo-response signal, comprising photon beam generation means for generating a photon beam, photon beam scanning means for scanning a surface of a semiconductor specimen with said photon beam in a pattern defined by movement of said beam in orthogonal directions, detection means for detecting the photo-response signal generated in said semiconductor specimen by the scanning with said photon beam, amplification means for amplifying the detected photo-response signal, differential means for providing a 2nd derivative of the amplified photo-response signal along said orthogonal directions, and display means for displaying an image by employing said 2nd derivative of said photo-response signal as a modulation signal.
Claim 2
Dependent Claim
109 words
A scanning-image forming apparatus using a photo-response signal, comprising photon beam generation means for generating a photon beam, photon beam scanning means for scanning a surface of a semiconductor specimen with said photon beam in a pattern defined by movement of said beam in orthogonal directions, detection means for detecting the photo-response signal generated in said semiconductor specimen by the scanning with said photon beam, amplification means for amplifying the detected photo-response signal, differential means for providing a 2nd derivative of the amplified photo-response signal along said orthogonal directions, and display means for displaying an image by employing said 2nd derivative of said photo-response signal as a modulation signal.
Claim 3
Dependent Claim
28 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 1, wherein said photon beam is a photon beam which is pulsed at a fixed frequency.
Claim 4
Dependent Claim
32 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 1, wherein said photo-response signal is a photo-voltage signal which develops across front and rear surfaces of said semiconductor specimen.
Claim 5
Dependent Claim
25 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 1, wherein said photon beam generation means is provided with a cathode-ray tube.
Claim 6
Dependent Claim
33 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 2, wherein said photon beam generation means is provided with a cathode-ray tube whose brightness is modulated by said fixed frequency.
Claim 7
Dependent Claim
31 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 1, wherein said photon beam scanning means is provided with a cathode-ray tube which is deflected by deflection signals.
Claim 8
Dependent Claim
42 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 1, wherein said detection means includes a transparent electrode disposed on a front surface side of said semiconductor specimen, and a metal electrode disposed on a rear surface side thereof.
Claim 9
Dependent Claim
32 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 2, wherein said amplification means is provided with a lock-in amplifier which uses said fixed frequency as its reference signal.
Claim 10
Dependent Claim
23 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 1, wherein said display means is provided with a cathode-ray tube.
Claim 11
Dependent Claim
126 words
A scanning-image forming apparatus for reproducing an image which is part of a semiconductor specimen with high resolution comprising photon beam generation means for generating a photon beam, photon beam scanning means for scanning a surface of the semiconductor specimen containing the image with said photon beam in a pattern defined by a movement of said beam in orthogonal directions, detection means for detecting a photo-response signal generated in said semiconductor specimen by the scanning of the image with said photon beam, amplification means for amplifying the detected photo-response signal, differential means for providing a 2nd derivative of the amplified photo-response signal along said orthogonal directions, and display means for displaying an image by employing said 2nd derivative of said photo-response signal as a modulation signal.
Claim 12
Dependent Claim
126 words
A scanning-image forming apparatus for reproducing an image which is part of a semiconductor specimen with high resolution comprising photon beam generation means for generating a photon beam, photon beam scanning means for scanning a surface of the semiconductor specimen containing the image with said photon beam in a pattern defined by a movement of said beam in orthogonal directions, detection means for detecting a photo-response signal generated in said semiconductor specimen by the scanning of the image with said photon beam, amplification means for amplifying the detected photo-response signal, differential means for providing a 2nd derivative of the amplified photo-response signal along said orthogonal directions, and display means for displaying an image by employing said 2nd derivative of said photo-response signal as a modulation signal.
Claim 13
Dependent Claim
28 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 10, wherein said photon beam is a photon beam which is pulsed at a fixed frequency.
Claim 14
Dependent Claim
32 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 10, wherein said photo-response signal is a photo-voltage signal which develops across front and rear surfaces of said semiconductor specimen.
Claim 15
Dependent Claim
25 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 10, wherein said photon beam generation means is provided with a cathode-ray tube.
Claim 16
Dependent Claim
33 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 11, wherein said photon beam generation means is provided with a cathode-ray tube whose brightness is modulated by said fixed frequency.
Claim 17
Dependent Claim
31 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 10, wherein said photon beam scanning means is provided with a cathode-ray tube which is deflected by deflection signals.
Claim 18
Dependent Claim
42 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 10, wherein said detection means includes a transparent electrode disposed on a front surface side of said semiconductor specimen, and a metal electrode disposed on a rear surface side thereof.
Claim 19
Dependent Claim
32 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 11, wherein said amplification means is provided with a lock-in amplifier which uses said fixed frequency as its reference signal.
Claim 20
Dependent Claim
23 words
A scanning-image forming apparatus using a photo-response signal as defined in claim 10, wherein said display means is provided with a cathode-ray tube.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-06-05 | 1987-12-05 | 1988-06-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-06-05 | 1991-12-05 | 1992-06-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-06-05 | 1995-12-05 | 1996-06-05 | $7700.00 | Window Closed / Lapsed |