US4452665A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polymeric halocarbons as plasma etch barriers
Assignee: International Business Machines Corp
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Filing: 1983-10-12
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Granted: 1984-06-05
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Expires: 2003-10-12
Abstract
Abstract A polymeric halocarbon is used as an etch barrier for plasma etching in a process to make high resolution, high aspect ratio polymer patterns.
Inventors
- 👤 Hiroyuki Hiraoka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:04
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/20; G03F7/00; G03F7/004; G03F7/09; G03F7/094; H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
56 words
A process for preparing a high resolution and high aspect ratio polymer pattern, said process being characterized by the steps of: (1) depositing a polymer film on a substrate, (2) covering said polymer film with an etch barrier which is a halocarbon polymer, and (3) etching with reactive ions to yield development in the dry state.
Claim 2
Dependent Claim
56 words
A process for preparing a high resolution and high aspect ratio polymer pattern, said process being characterized by the steps of: (1) depositing a polymer film on a substrate, (2) covering said polymer film with an etch barrier which is a halocarbon polymer, and (3) etching with reactive ions to yield development in the dry state.
Claim 3
Dependent Claim
13 words
A process as claimed in claim 1 wherein the halocarbon polymer is poly(perfluorobenzene).
Claim 4
Dependent Claim
12 words
A process as claimed in claim 1 wherein the polymer is poly(perfluoro-1,3-butadiene).
Claim 5
Dependent Claim
12 words
A process as claimed in claim 1 wherein the polymer is poly(pentafluorostyrene).
Claim 6
Dependent Claim
18 words
A process as claimed in claim 1 wherein the etching is by means of oxygen reactive ion etching.
References Cited (Backward Citations)
US4362598A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-06-05 | 1987-12-05 | 1988-06-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-06-05 | 1991-12-05 | 1992-06-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-06-05 | 1995-12-05 | 1996-06-05 | $7700.00 | Window Closed / Lapsed |