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US4448637A Expired / Lapsed US ⏱️ 0.0 years remaining

Etching method of conductive film

Assignee: Daicel Corp
•
Filing: 1982-12-13
•
Granted: 1984-05-15
•
Expires: 2002-12-13
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Abstract

Abstract A conductive film formed on a substrate can be etched by coating an etching solution containing 0 to 30 wt % of polyhydric alcohol and tackified to a viscosity of at least 10 cps.

Inventors

  • 👤 Masanori Hiraishi
  • 👤 Masashi Sugata

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 23:32
CPC Classifications
C; C09; C09K; C09K13/00; C23; C23F; C23F1/00; C23F1/10; C23F1/14

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 165 words
A method of producing a pattern of an electrically conductive film on a substrate comprising: providing a substrate coated with a continuous layer of an electrically conductive material; depositing an etchant composition on selected areas of said layer, said etchant composition consisting essentially of an aqueous solution of an etching agent effective for reacting with said electrically conductive material to form water-soluble reaction products, said aqueous solution containing dissolved therein from 0.01 to 30% by weight of a water-soluble organic polymer effective to increase the viscosity of said composition to at least 10 cps, said aqueous solution also containing dissolved therein up to 30% by weight of a polyhydric alcohol capable of preventing the evaporation of water from said etchant composition; maintaining said etchant composition on said selected areas of said layer until said etching agent has reacted with said electrically conductive material to form water-soluble reaction products; and then applying water to remove said etchant composition and said water-soluble reaction products from said layer.
Claim 2
Independent Claim 165 words
A method of producing a pattern of an electrically conductive film on a substrate comprising: providing a substrate coated with a continuous layer of an electrically conductive material; depositing an etchant composition on selected areas of said layer, said etchant composition consisting essentially of an aqueous solution of an etching agent effective for reacting with said electrically conductive material to form water-soluble reaction products, said aqueous solution containing dissolved therein from 0.01 to 30% by weight of a water-soluble organic polymer effective to increase the viscosity of said composition to at least 10 cps, said aqueous solution also containing dissolved therein up to 30% by weight of a polyhydric alcohol capable of preventing the evaporation of water from said etchant composition; maintaining said etchant composition on said selected areas of said layer until said etching agent has reacted with said electrically conductive material to form water-soluble reaction products; and then applying water to remove said etchant composition and said water-soluble reaction products from said layer.
Claim 3
Dependent Claim 30 words
The method as defined in claim 1 wherein said water-soluble polymer is a member selected from the group consisting of cellulose polymers, polyacrylic acid polymers, polyvinyl alcohol, polyamides and starch.
Claim 4
Dependent Claim 17 words
The method as defined in claim 1 wherein said polyhydric alcohol is a dihydric or trihydric alcohol.
Claim 5
Dependent Claim 15 words
A method as defined in claim 1 in which said water-soluble polymer is hydroxyethyl cellulose.
Claim 6
Dependent Claim 15 words
A method as defined in claim 1 in which said water-soluble polymer is carboxymethyl cellulose.
Claim 7
Dependent Claim 14 words
A method as defined in claim 1 in which said water-soluble polymer is starch.
Claim 8
Dependent Claim 27 words
A method as defined in claim 1 in which said polyhydric alcohol is selected from the group consisting of ethylene glycol, diethylene glycol, triethylene glycol and glycerin.

References Cited (Backward Citations)

US3483027A Cited
US3647508A Cited
US4348255A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-05-15 1987-11-14 1988-05-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-05-15 1991-11-14 1992-05-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-05-15 1995-11-14 1996-05-15 $7700.00 Window Closed / Lapsed

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