Method and apparatus for detecting surface defects in mechanical workpieces

Claim 3

Apparatus for detecting surface defects in mechanical parts by analysis of diffracted light coming from these surface defects, said apparatus comprising: (a) means for illuminating, with incoherent light, the surface of the part in which it is desired to detect defects, (b) a spatial light modulator comprising at least one layer of transparent photo-sensitive material in which a spatial intensity distribution of incoherent light produces a corresponding and proportional spatial distribution of the values of refractive index, (c) an optical system interposed between the surface of the part in which it is desired to detect defects and the spatial light modulator, the said optical system being arranged to form a flat image of this surface on the said layer of transparent photo-sensitive material, (d) a source of plane polarized coherent light, (e) scanning means for displacing the said coherent light relative to the spatial light modulator so that this light illuminates the said layer of transparent photo-sensitive material by scanning in elementary areas, and (f) detector means arranged, during the scanning operation, to detect variations in at least one of the polarization components of the coherent light after this light has traversed the said layer of transparent photo-sensitive material.

Claim 4

Apparatus for detecting surface defects in mechanical parts by analysis of diffracted light coming from these surface defects, said apparatus comprising: (a) means for illuminating, with incoherent light, the surface of the part in which it is desired to detect defects, (b) a spatial light modulator comprising at least one layer of transparent photo-sensitive material in which a spatial intensity distribution of incoherent light produces a corresponding and proportional spatial distribution of the values of refractive index, (c) an optical system interposed between the surface of the part in which it is desired to detect defects and the spatial light modulator, the said optical system being arranged to form a flat image of this surface on the said layer of transparent photo-sensitive material, (d) a source of plane polarized coherent light, (e) scanning means for displacing the said coherent light relative to the spatial light modulator so that this light illuminates the said layer of transparent photo-sensitive material by scanning in elementary areas, and (f) detector means arranged, during the scanning operation, to detect variations in at least one of the polarization components of the coherent light after this light has traversed the said layer of transparent photo-sensitive material.

Claim 5

Apparatus according to claim 2, further including electronic processing means connected to the detector means and arranged to derive information on any surface defect of the surface under examination from the said variations in at least one of the polarization components of the coherent light.

Claim 6

Apparatus according to claim 2, wherein the spatial light modulator provided with the said layer of transparent photo-sensitive material, comprises: (a) a first flat electrode transparent to the incoherent light reflected from the surface under examination, (b) a flat dielectric, semi-transparent mirror interposed between the layer of transparent photosensitive material and the first flat electrode, the reflecting surface of the said mirror facing the said layer of transparent photo-sensitive material, (c) a second flat electrode transparent to the coherent light and facing the surface of the layer of transparent photo-sensitive material opposite the flat dielectric mirror, and (d) a supply unit arranged to apply at least two different voltage levels between the first and second transparent electrodes.

Claim 7

Apparatus according to claim 2, wherein the said optical system includes an objective with a large depth of field.

Claim 8

Apparatus according to claim 2, wherein the said scanning means comprise: (a) a first mirror arranged to deflect the light produced by the coherent light source, (b) a second mirror arranged to deflect the light deflected by the first mirror in a direction substantially normal to the surface of the layer of transparent photosensitive material of the spatial light modulator, (c) a cylindrical lens interposed between the first and second mirrors with its focus at the point on the first mirror lit by the light coming from the coherent light source, (d) first drive means for oscillating the first mirror about an axis perpendicular to the axis of the cylindrical lens and to the incidence direction of the coherent light passing through the focus of this cylindrical lens, and (e) second drive means for oscillating the second mirror about an axis which intersects the axis of the cylindrical lens and which lies in a plane perpendicular to the axis about which the said first mirror is oscillated.

Claim 9

Apparatus according to claim 3, wherein the said detector means comprise: (a) an optical analyser, (b) a first optical system arranged to deflect the coherent light leaving the spatial modulator towards the said optical analyser, (c) a matrix of photoelectric converters arranged to produce at the output of each converter an electrical signal indicative of the value of the intensity of the light incident on that converter, and (d) a second optical system arranged to direct the light leaving the optical analyser onto the matrix of photoelectric converters.

Claim 10

Apparatus according to claim 7, wherein the said optical analyser is a polarizer.

Claim 11

Apparatus according to claim 7 or claim 8, wherein the said first optical system of the detector means is constituted by a semi-transparent mirror.

Claim 12

Apparatus according to claim 7, wherein the said detector means further comprise an electronic circuit fed with the signals output from the matrix of photo-electric converters and arranged to form an array of numerical values corresponding to the spatial intensity distribution of the light incident on the matrix of photoelectric converters.

Claim 13

Apparatus according to claim 10, wherein said detector means further comprises a logic control unit connected to the electronic circuit and the said scanning means.