US4440493A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Printing apparatus
Assignee: Canon Inc
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Filing: 1983-03-02
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Granted: 1984-04-03
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Expires: 2003-03-02
Abstract
Abstract In an apparatus for printing a mask pattern on a wafer for manufacturing a semiconductor circuit element, the exposure of the mask pattern is effected by being divided into a plurality of times. Each time the divided exposure is effected, the relative positional relation of the mask pattern and the wafer is made to differ by a minute amount. Thereby, a mask pattern thinner than the line width of the mask pattern is formed on the wafer.
Inventors
- 👤 Ryozo Hiraga
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 23:29
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70425; G03F7/70466
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
87 words
An apparatus for forming a mask pattern on a wafer and printing the mask pattern on the wafer, said apparatus comprising: a source of radiation energy for imparting a divided exposure radiation energy to a mask a plurality of times; and means for moving at least one of said mask and wafer relative to the other of said mask and said wafer for making the relative positional relation of the mask pattern and the wafer differ by a minute amount each time said divided exposure is effected.
Claim 2
Independent Claim
87 words
An apparatus for forming a mask pattern on a wafer and printing the mask pattern on the wafer, said apparatus comprising: a source of radiation energy for imparting a divided exposure radiation energy to a mask a plurality of times; and means for moving at least one of said mask and wafer relative to the other of said mask and said wafer for making the relative positional relation of the mask pattern and the wafer differ by a minute amount each time said divided exposure is effected.
Claim 3
Dependent Claim
41 words
An apparatus according to claim 1, wherein said moving means moves at least one of said mask and said wafer relative to the other thereof by an amount smaller than the line width of the mask pattern formed on the wafer.
Claim 4
Independent Claim
123 words
An apparatus for forming a mask pattern on a wafer and printing the mask pattern on the wafer, said apparatus comprising: a source of radiation energy for projecting radiation energy to the mask; means for moving at least one of said mask and said wafer to slightly change the relative position of the mask pattern and the wafer; first exposure means for imparting radiation energy for exposure to a mask one time; second exposure means for imparting a divided exposure radiation energy a plurality of times, said moving means slightly changing the relative position of the mask pattern and the wafer each time the divided exposure is effected; and switching means for selectively actuating said first exposure means and said second exposure means.
Claim 5
Independent Claim
123 words
An apparatus for forming a mask pattern on a wafer and printing the mask pattern on the wafer, said apparatus comprising: a source of radiation energy for projecting radiation energy to the mask; means for moving at least one of said mask and said wafer to slightly change the relative position of the mask pattern and the wafer; first exposure means for imparting radiation energy for exposure to a mask one time; second exposure means for imparting a divided exposure radiation energy a plurality of times, said moving means slightly changing the relative position of the mask pattern and the wafer each time the divided exposure is effected; and switching means for selectively actuating said first exposure means and said second exposure means.
Claim 6
Dependent Claim
28 words
An apparatus according to claim 3, further comprising wafer discharging means which operates after operation of said first exposure means or after operation of said second exposure means.
Claim 7
Independent Claim
126 words
An apparatus for forming a mask pattern on a wafer and printing the mask pattern on the wafer, said mask and said wafer both having alignment marks thereon which when aligned indicate alignment of said mask and said wafer, said apparatus comprising: a source of radiation energy for imparting a divided exposure radiation energy to a mask a plurality of times; means for moving, each time the divided exposure is effected, at least one of said mask and said wafer to slightly change the relative position of the mask pattern and the wafer; and means for reading the alignment mark of the mask and the alignment mark of the wafer to detect the relative position thereof, and controlling said moving means in accordance with the detection.
Claim 8
Independent Claim
126 words
An apparatus for forming a mask pattern on a wafer and printing the mask pattern on the wafer, said mask and said wafer both having alignment marks thereon which when aligned indicate alignment of said mask and said wafer, said apparatus comprising: a source of radiation energy for imparting a divided exposure radiation energy to a mask a plurality of times; means for moving, each time the divided exposure is effected, at least one of said mask and said wafer to slightly change the relative position of the mask pattern and the wafer; and means for reading the alignment mark of the mask and the alignment mark of the wafer to detect the relative position thereof, and controlling said moving means in accordance with the detection.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-04-03 | 1987-10-03 | 1988-04-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-04-03 | 1991-10-03 | 1992-04-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-04-03 | 1995-10-03 | 1996-04-03 | $7700.00 | Window Closed / Lapsed |