US4439464A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Composition and method for forming amorphous chalcogenide films from solution
Assignee: University Patents Inc
•
Filing: 1982-05-11
•
Granted: 1984-03-27
•
Expires: 2002-05-11
Abstract
Abstract Amorphous chalcogenide films substantially free from particulate and microstructure are formed on a substrate from solution. The solution contains a glass-forming chalcogenide compound dissolved in a non-aqueous vaporizable solvent, such as a low molecular weight amine, and is substantially free from particulate or crystallizable material. Film formation is effected by coating the solution onto the substrate in a non-vacuumized environment, and thereafter evaporating the solvent from the coating. The procedure is particularly useful in forming amorphous chalcogenide resists for photolithographic applications.
Inventors
- 👤 Imants R. Lauks
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 21:05
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/0042; G03F7/0043; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/945
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
73 words
A method of forming an amorphous chalcogenide film on a substrate, comprising the steps of: (a) preparing a solution containing a glass-forming chalcogenide compound dissolved in a non-aqueous vaporizable solvent, said solution being substantially free from particulate or crystallizable material; (b) coating said solution onto said substrate in a non-vacuumized environment; and (c) evaporating the solvent from the coating so as to form an amorphous chalcogenide film substantially free from particulate and microstructure.
Claim 2
Independent Claim
73 words
A method of forming an amorphous chalcogenide film on a substrate, comprising the steps of: (a) preparing a solution containing a glass-forming chalcogenide compound dissolved in a non-aqueous vaporizable solvent, said solution being substantially free from particulate or crystallizable material; (b) coating said solution onto said substrate in a non-vacuumized environment; and (c) evaporating the solvent from the coating so as to form an amorphous chalcogenide film substantially free from particulate and microstructure.
Claim 3
Dependent Claim
12 words
The method of claim 1, wherein said solvent is an organic solvent.
Claim 4
Dependent Claim
14 words
The method of claim 2, wheren said solvent is a low molecular weight amine.
Claim 5
Dependent Claim
18 words
The method of claim 3, wherein said solvent is a lower alkyl amine or a lower alkylene diamine.
Claim 6
Dependent Claim
34 words
The method of claim 1, wherein said chalcogenide commpound is Se-Ge or As 2 Z 2+x , where Z is S, Se or Te, and x is an integer of from 0 to 3.
Claim 7
Dependent Claim
74 words
The method of claim 5, wherein said chalcogenide compound is As 2 Z 2+x , and x is greater than 1; and said solution is prepared by dissolving As 2 Z 3 in said solvent, partially oxidizing or hydrolyzing said As 2 Z 3 to an extent sufficient to convert it to said As 2 Z 2+x and an arsenic-containing precipitate, and recovering the resulting supernatant containing said As 2 Z 2+x dissolved therein.
Claim 8
Dependent Claim
26 words
The method of claim 6, wherein the solvent employed for dissolving said As 2 Z 3 includes water in a concentration sufficient for effecting said conversion.
Claim 9
Dependent Claim
20 words
The method of claim 1, wherein said coating and evaporation steps are carried out in a non-oxidizing and non-hydrolyzing environment.
Claim 10
Dependent Claim
18 words
The method of claim 1, wherein said coating step is effected by means of a spin-on coating technique.
References Cited (Backward Citations)
US3177082A
Cited
GB1179985A
Cited
US3820968A
Cited
US4204933A
Cited
US4234625A
Cited
US4272562A
Cited
US4371608A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-03-27 | 1987-09-26 | 1988-03-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-03-27 | 1991-09-26 | 1992-03-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-03-27 | 1995-09-26 | 1996-03-27 | $7700.00 | Window Closed / Lapsed |