US4438336A
Expired / Lapsed
US
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Corpuscular radiation device for producing an irradiation pattern on a workpiece
Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV
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Filing: 1982-03-26
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Granted: 1984-03-20
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Expires: 2002-03-26
Abstract
Abstract A corpuscular radiation device for producing an irradiation pattern on a kpiece by means of a beam emitted from a first radiation source and a first corpuscular-optical lens system suited for forming said beam is provided. The corpuscular-optical lens system includes means for adjusting the workpiece having opposed major surfaces, an at least partially beam-transparent reference object and a free beam passage opening. At the side of the workpiece remote from the first radiation source there is provided a second corpuscular-optical lens system including a beam switch, a second radiation source, an image receiver with a receiver surface, and a detector.
Inventors
- 👤 Wolfgang D. Riecke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 01:00
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/304; H01J37/3045; H01J37/3002; H01J37/3007
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
324 words
A corpuscular radiation device for producing an irradiation pattern on a workpiece comprising: (a) means for adjustably supporting a workpiece having opposed major surfaces, and at least one partially irradiatable object and a free beam passage opening; (b) a first radiation source spaced from one of said surfaces of said workpiece for emitting a first beam; (c) a first corpuscular-optical condenser lens system for directing said first beam in one direction along a path towards said one surface of said workpiece; (d) a second radiation source spaced from the other of said surfaces of said workpiece for emitting a second beam; (e) a second corpuscular-optical lens system for directing said second beam in the direction opposite said first direction along said path towards said other surface of said workpiece; (f) an image receiver with a receiver surface; (g) said second radiation source and said image receiver being arranged adjacent said path on the side of said second corpuscular optical lens system remote from said workpiece supporting means; and (h) a beam switch arranged in said path and between said second radiation source and said image receiver on the one hand and said second corpuscular-optical lens system on the other hand for interlacing said first and second beams along said path; (i) said second corpuscular-optical lens system being adapted to function as an electron microscope system for directing said first beam towards said receiving surface of said image receiver and to function as an electron scan microscope for directing said second beam towards said first radiation source; and (j) said beam switch being adapted to deflect the beam produced by the first radiation source so that the corpuscular microscopic image drafted by the second corpuscular optical lens system is incident upon the receiver surface of the image receiver; and (k) said beam switch also being adapted to deflect the beam produced by the second radiation source to the axis of the second corpuscular lens system.
Claim 2
Dependent Claim
324 words
A corpuscular radiation device for producing an irradiation pattern on a workpiece comprising: (a) means for adjustably supporting a workpiece having opposed major surfaces, and at least one partially irradiatable object and a free beam passage opening; (b) a first radiation source spaced from one of said surfaces of said workpiece for emitting a first beam; (c) a first corpuscular-optical condenser lens system for directing said first beam in one direction along a path towards said one surface of said workpiece; (d) a second radiation source spaced from the other of said surfaces of said workpiece for emitting a second beam; (e) a second corpuscular-optical lens system for directing said second beam in the direction opposite said first direction along said path towards said other surface of said workpiece; (f) an image receiver with a receiver surface; (g) said second radiation source and said image receiver being arranged adjacent said path on the side of said second corpuscular optical lens system remote from said workpiece supporting means; and (h) a beam switch arranged in said path and between said second radiation source and said image receiver on the one hand and said second corpuscular-optical lens system on the other hand for interlacing said first and second beams along said path; (i) said second corpuscular-optical lens system being adapted to function as an electron microscope system for directing said first beam towards said receiving surface of said image receiver and to function as an electron scan microscope for directing said second beam towards said first radiation source; and (j) said beam switch being adapted to deflect the beam produced by the first radiation source so that the corpuscular microscopic image drafted by the second corpuscular optical lens system is incident upon the receiver surface of the image receiver; and (k) said beam switch also being adapted to deflect the beam produced by the second radiation source to the axis of the second corpuscular lens system.
Claim 3
Dependent Claim
44 words
A corpuscular radiation device as set forth in claim 1, wherein said second corpuscular-optical lens system comprises a plurality of corpuscular lenses arranged in series along said path, the corpuscular lens (15) closest to the workpiece (14) having associated therewith a deflection system (16).
Claim 4
Dependent Claim
45 words
A corpuscular radiation device as set forth in claim 1, wherein said first corpuscular-optical lens system comprises a plurality of corpuscular lenses arranged in series along said path, the corpuscular beam lens (11) closest to the workpiece (14) having associated therewith a deflection system (33).
Claim 5
Dependent Claim
34 words
A corpuscular radiation device as set forth in claim 2, wherein the deflection system (16) is arranged in relationship to the associated corpuscular lens (15) in a focal plane (17) remote from the workpiece.
Claim 6
Dependent Claim
36 words
A corpuscular radiation device as set forth in claim 3, wherein the deflection system (33) is arranged in relationship to the associated corpuscular beam lens (11) in a focal plane (10) remote from the workpiece (14).
Claim 7
Dependent Claim
55 words
A corpuscular radiation device as set forth in claim 2, wherein the deflection system (16) associated with the second corpuscular-optical lens systems (15,20,23) is adapted to be operated selectively either with a deflection variable saw-tooth-like in time as required for a raster scan microscope or with a deflection settable in magnitude but constant in time.
Claim 8
Dependent Claim
70 words
A corpuscular radiation device as set forth in claim 3, wherein the deflection system (33) associated with the first corpuscular-optical lens system (5,7,9,11) is adapted to be operated selectively either with a deflection variable in such a manner that it corresponds to the scribing of the irradiation pattern to be produced or with a basic deflection settable but then constant in time superimposed by a scan-like deflection on the beam.
Claim 9
Dependent Claim
68 words
A corpuscular radiation device as set forth in claim 1, wherein said first and second corpuscular-optical lens systems each comprises a plurality of corpuscular lenses arranged in series along said path, the lenses (11) and (15) of both lens systems closest to the workpiece (14) being constructed mirror-symmetrical relative to a plane containing the major surface (12) of the workpiece (14) which faces the first radiation source (1).
Claim 10
Dependent Claim
113 words
A corpuscular radiation device as set forth in claim 1, wherein said first and second corpuscular-optical lens systems each comprises a plurality of corpuscular lenses arranged in series along said path, the corpuscular lens (15) of the second corpuscular-optical lens system closest to the workpiece (14) having associated therewith a deflection system (16) and the corpuscular beam lens (11) of the first corpuscular-optical lens system closest to the workpiece (14) having associated therewith a deflection system (33), said deflection systems (16) and (33) associated with the two corpuscular beam systems being constructed mirror-symmetrical relative to a plane containing the major surface (12) of a workpiece (14) which faces said first radiation source (1).
Claim 11
Dependent Claim
42 words
A corpuscular radiation device as set forth in claim 1, wherein said first and second corpuscular-optical lens systems each comprises a plurality of corpuscular lenses arranged in series along said path, at least one of said corpuscular lenses being a magnetic lens.
Claim 12
Dependent Claim
42 words
A corpuscular radiation device as set forth in claim 1, wherein said first and second corpuscular-optical lens systems each comprises a plurality of corpuscular lenses arranged in series along said path, at least one of said corpuscular lenses being an electrostatic lens.
Claim 13
Dependent Claim
23 words
A corpuscular radiation device as set forth in claim 9, wherein at least one of the deflection systems (16) and (33) is magnetic.
Claim 14
Dependent Claim
26 words
A corpuscular radiation device as set forth in claim 9, wherein at least one of the deflection systems (16) and (33) is an electric deflection system.
Claim 15
Dependent Claim
109 words
A corpuscular radiation device as set forth in claim 1, wherein said first and second corpuscular-optical lens systems each comprises a plurality of corpuscular lenses arranged in series along said path, the corpuscular lenses (11) and (15) of both corpuscular-optical systems closest to the workpiece (14) being electromagnetic lenses and the currents in the lens coils being adapted to be jointly varied by small amounts such that if the current in the coil of either one of said electromagnetic lenses increases the current in the coil of the other of said electromagnetic lenses decreases simultaneously, the ratio of the absolute values of the current changes being a fixed value.
Claim 16
Dependent Claim
82 words
A corpuscular radiation device as set forth in claim 1, wherein said second corpuscular-optical lens system comprises a plurality of copuscular lenses arranged in series along said path and an electrostatic lens (39) selectively capable of being switched in and out, as viewed in in the sense of the beam direction of said second radiation source, is provided in front of the lens (15) of the second corpuscular-optical system closest to the workpiece (14) and together therewith forms a single thick lens.
Claim 17
Dependent Claim
20 words
A corpuscular radiation device as set forth in claim 1, wherein the beam switch (24) is a magnetic beam switch.
Claim 18
Dependent Claim
17 words
A corpuscular radiation device as set forth in claim 1, wherein the corpuscular beams are electron beams.
Claim 19
Dependent Claim
22 words
A corpuscular radiation device as set forth in claim 1, wherein at least one of the corpuscular beams is an ion beam.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-03-20 | 1987-09-19 | 1988-03-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-03-20 | 1991-09-19 | 1992-03-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-03-20 | 1995-09-19 | 1996-03-20 | $7700.00 | Window Closed / Lapsed |