Detector for an electron microscope

Claim 1

An electron microscope comprising: first means for generating an electron beam, second means for providing a specimen in alignment with said electron beam, and detection means for detecting radiation occurring from interaction between said specimen and said electron beam, said detection means comprising: a plurality of separated detector elements for detecting different types of radiation placed in surrounding location about said specimen, each of said detector elements including at least one flexible optical conductor having a light funnel with a first larger end facing said specimen and said light funnel being integral with said optical conductor, and an entrance screen sensitive to radiation to be detected and positioned at said first larger end, said entrance screen including a luminescent layer facing said specimen and a reflector layer overlying said luminescent layer, said luminescent layer and said reflector layer being deposited on an entrance side of said light funnel facing said specimen, a radiation passage structure serving as a wall seal optically coupled at ends remote from said specimen to all of said optical conductors for each of said detector elements, said radiation passage structure being an optically transmissive material of high refractive index, and means responsive to at least one of said detector elements for enabling display of information from said specimen, including an adjustable diaphragm means which is separately connected to said radiation passage structure for detecting at least one radiation conductive signal from the plurality of detector elements.