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US4436762A Expired / Lapsed US ⏱️ 0.0 years remaining

Low pressure plasma discharge formation of refractory coatings

Assignee: Osram Sylvania Inc
•
Filing: 1982-07-26
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Granted: 1984-03-13
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Expires: 2002-07-26
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Abstract

Abstract A protective refractory metal oxide coating of 3Al 2 O 3 .2SiO 2 or 3B 2 O 3 .2SiO 2 is coated on the internal surface of a vessel by low pressure plasma induced chemical reactions. The source of the SiO 2 required for the reaction can either be from the internal surface of the vessel (e.g., glass, quartz) or it can be introduced into the vessel.

Inventors

  • 👤 Walter P. Lapatovich
  • 👤 Joseph M. Proud
  • 👤 Leslie A. Riseberg

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 20:17
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 77 words
A coating process for coating a surface inside a vessel comprising providing a vessel having contents comprising an inert gas, and reactants, said reactants consisting essentially of SiO 2 and a halide of a metal selected from the group consisting of B, Al, Ga, In, Tl, and combinations thereof; and generating a plasma within said vessel containing said inert gas, and said reactants, to form a refractory metal oxide protective coating on a surface inside the vessel.
Claim 2
Dependent Claim 77 words
A coating process for coating a surface inside a vessel comprising providing a vessel having contents comprising an inert gas, and reactants, said reactants consisting essentially of SiO 2 and a halide of a metal selected from the group consisting of B, Al, Ga, In, Tl, and combinations thereof; and generating a plasma within said vessel containing said inert gas, and said reactants, to form a refractory metal oxide protective coating on a surface inside the vessel.
Claim 3
Dependent Claim 26 words
A coating process according to claim 1 wherein said inert gas is selected from the group consisting of neon, argon, helium, krypton, xenon, and combinations thereof.
Claim 4
Dependent Claim 12 words
A coating process according to claim 1 wherein said halide is chlorine.
Claim 5
Dependent Claim 12 words
A coating process according to claim 1 wherein said metal is boron.
Claim 6
Dependent Claim 12 words
A coating process according to claim 1 wherein said metal is aluminum.
Claim 7
Dependent Claim 20 words
A coating process according to claim 1 wherein said refractory metal oxide is 3Al 2 O 3 .2SiO 2 .
Claim 8
Dependent Claim 14 words
A coating process according to claim 1 wherein said surface contains SiO 2 .
Claim 9
Dependent Claim 16 words
A coating process according to claim 1 wherein said SiO 2 is introduced into said vessel.
Claim 10
Dependent Claim 17 words
A coating process according to claim 1 wherein said surface is an internal surface of said vessel.
Claim 11
Dependent Claim 65 words
A coating process for coating a surface inside a vessel comprising providing a vessel having contents comprising an inert gas, and reactants, said reactants consisting essentially of SiO 2 and a halide of boron; and generating a plasma within said vessel containing said inert gas, and said reactants to form a 3B 2 O 3 .2SiO 2 protective coating on a surface inside the vessel.
Claim 12
Dependent Claim 65 words
A coating process for coating a surface inside a vessel comprising providing a vessel having contents comprising an inert gas, and reactants, said reactants consisting essentially of SiO 2 and a halide of boron; and generating a plasma within said vessel containing said inert gas, and said reactants to form a 3B 2 O 3 .2SiO 2 protective coating on a surface inside the vessel.

References Cited (Backward Citations)

US2264892A Cited
US3043983A Cited
US3533827A Cited
US3377498A Cited
US3586898A Cited
US3619699A Cited
US4048348A Cited
US4265950A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-03-13 1987-09-12 1988-03-13 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-03-13 1991-09-12 1992-03-13 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-03-13 1995-09-12 1996-03-13 $7700.00 Window Closed / Lapsed

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