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US4435199A Expired / Lapsed US ⏱️ 0.0 years remaining

Exhaust system for a vapor deposition chamber

Assignee: AT&T Inc
•
Filing: 1982-04-26
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Granted: 1984-03-06
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Expires: 2002-04-26
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Abstract

Abstract An exhaust system (3) for a vapor-phase axial deposition (VAD) system (5) is comprised of the serial combination of an exhaust tube (26), an outlet pipe (27), a soot collection chamber (32) and a discharge line (34). The exhaust tube (26) has a constricted central portion (48) and a flared intake (44) with a gradually turned back end (46).

Inventors

  • 👤 Eugene Potkay

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 03:06
CPC Classifications
C; C03; C03B; C03B37/00; C03B37/01; C03B37/012; C03B37/014; C03B37/0144; B; B08; B08B; B08B15/00; B08B15/04

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 126 words
A method of fabricating a lightguide soot-boule in a vapor-phase axial deposition chamber, comprising the steps of: directing a stream of glassy soot, from a soot deposition torch, towards a growing soot-boule, to deposit at least a portion of the soot stream thereon; exhausting undeposited soot from the chamber through a hollow, substantially cylindrical exhaust tube having a constricted central portion with a flared intake and a gradually turned back end projecting into the chamber and an output end connected to an exhaust line; and removing the soot with an extracting means, connected to the exhaust line, having a plurality of tubular members mounted concentrically to provide a circuitous path to exhaust soot to extract particles therefrom while isolating the deposition chamber from downstream pressure fluctuations.
Claim 2
Independent Claim 126 words
A method of fabricating a lightguide soot-boule in a vapor-phase axial deposition chamber, comprising the steps of: directing a stream of glassy soot, from a soot deposition torch, towards a growing soot-boule, to deposit at least a portion of the soot stream thereon; exhausting undeposited soot from the chamber through a hollow, substantially cylindrical exhaust tube having a constricted central portion with a flared intake and a gradually turned back end projecting into the chamber and an output end connected to an exhaust line; and removing the soot with an extracting means, connected to the exhaust line, having a plurality of tubular members mounted concentrically to provide a circuitous path to exhaust soot to extract particles therefrom while isolating the deposition chamber from downstream pressure fluctuations.
Claim 3
Dependent Claim 29 words
The method as set forth in claim 1, comprising; controlling the soot flow and pressure throughout the system with at least one in-line injection venturi in the exhaust line.
Claim 4
Independent Claim 115 words
A system for exhausting soot from a vapor-phase axial deposition system, comprising: a chamber; a soot deposition torch directed into the central portion of the chamber; an exhaust line having first and second ends; a hollow, substantially cylindrical, exhaust tube having a constricted central porton with a flared intake with a gradually turned back end projecting into the chamber and an output end connected to the first end of the exhaust line; and a soot extraction means, connected to the second end of the exhaust line, having a plurality of tubular members mounted concentrically to provide a circuitous path to exhaust soot to extract particles therefrom while isolating the deposition chamber from downstream pressure fluctuations.
Claim 5
Independent Claim 115 words
A system for exhausting soot from a vapor-phase axial deposition system, comprising: a chamber; a soot deposition torch directed into the central portion of the chamber; an exhaust line having first and second ends; a hollow, substantially cylindrical, exhaust tube having a constricted central porton with a flared intake with a gradually turned back end projecting into the chamber and an output end connected to the first end of the exhaust line; and a soot extraction means, connected to the second end of the exhaust line, having a plurality of tubular members mounted concentrically to provide a circuitous path to exhaust soot to extract particles therefrom while isolating the deposition chamber from downstream pressure fluctuations.
Claim 6
Dependent Claim 31 words
The exhaust system as set forth in claim 3, comprising: at least one in-line injection venturi in the exhaust line to cause gas flow through the system while controlling pressures therein.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-03-06 1987-09-05 1988-03-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-03-06 1991-09-05 1992-03-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-03-06 1995-09-05 1996-03-06 $7700.00 Window Closed / Lapsed

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