Dew point sensor

Claim 2

A dew point sensor comprising, an insulation means having a first side and a second side, said first side of said insulation means having a reflecting surface on said first side, radiation-emitting means on said sensor on said second side of said insulation means, electronic circuit means including radiation sensing means and cooling means and temperature sensing means on the second side of said insulation means, output means connected to said circuit means, said insulation means being relatively transparent to the radiation emitted by said radiation-emitting means, said reflecting surface being adapted to be exposed to a gas containing vapor and adapted to condense said vapor at a temperature at the dew point of said gas, said insulation means having a refractive index substantially different from either the gas whose dew point is being measured or the condensed vapor of said gas but not necessarily different than both, said insulation means being a relatively good electrical insulator, said cooling means being disposed in heat transfer relation with said insulation means whereby when no condensation is formed on said reflecting surface a portion of emitted radiation is refracted and a substantial portion of said radiation from said radiation means is reflected onto said radiation sensing means allowing current to flow through said radiation sensing means and said electronic circuit thereby cooling said insulation means and causing condensation to form on said reflecting surface thereby changing the ratio of reflection at said surface whereby said reflected radiation to said radiation sensing means is decreased and current flow through said circuit is decreased, reversing the cooling effect of said circuit and providing an indication of dew point temperature from said temperature sensing means.

Claim 3

The sensor recited in claim 1 wherein the index of refraction of said reflecting surface is very close to the index of refraction of said condensation whereby the light reflected decreases abruptly when said condensation forms on said reflecting layer.

Claim 4

The sensor recited in claim 1 wherein a switching means is provided for periodically reversing the flow of current through said heating and cooling means whereby said surface is selectively heated and cooled, thereby providing continuous monitoring of dew point.

Claim 5

A dew point sensor comprising a monolithic structure covered by an insulation layer having a first side and a second side, a reflecting surface on said first side, a Peltier junction, a photo transistor junction, a light emitting junction, a temperature responsive junction, said photo transistor junction, said light emitting junction, said photo said Peltier junction, and said temperature responsive junction being on said second side, said insulation layer being generally transparent to a particular wave length of said light emitting junction, an electronic circuit connecting said junctions and supported on a substrate, said insulation layer being relatively transparent to the radiation of said light emitting junction, said reflecting surface being adapted to be exposed to a gas containing vapor and adapted to condense said vapor at a temperature at the dew point of said gas, said Peltier junction comprising cooling means connected to said photo transistor, said Peltier junction being disposed in heat transfer relation with said insulation layer whereby when no condensation is formed on said reflecting surface a portion of said radiation is refracted and a substantial portion of radiation from said light emitting junction is reflected onto said photo transistor allowing current to flow through said photo transistor and said electronic circuit thereby cooling said insulation means and causing condensation to form on said reflecting surface thereby changing the ratio of reflection at said reflecting surface whereby said reflected radiation to said photo transistor is decreased and current flow through said circuit is decreased, reversing the cooling effect of said Peltier junction and providing an indication of dew point temperature from said temperature sensing means, means to connect a source of electricity to said circuit in a direction to cause said Peltier junction to absorb heat, whereby said outer surface of said insulating layer is cooled, causing said vapor to condense on said surface thereby changing the reflection of light from said surface, whereby the light reaching said photo transistor junction is changed abruptly, thereby changing the electrical conduction of said photo transistor.

Claim 6

A dew point sensor comprising a monolithic structure covered by an insulation layer having a first side and a second side, a reflecting surface on said first side, a Peltier junction, a photo transistor junction, a light emitting junction, a temperature responsive junction, said photo transistor junction, said light emitting junction, said photo said Peltier junction, and said temperature responsive junction being on said second side, said insulation layer being generally transparent to a particular wave length of said light emitting junction, an electronic circuit connecting said junctions and supported on a substrate, said insulation layer being relatively transparent to the radiation of said light emitting junction, said reflecting surface being adapted to be exposed to a gas containing vapor and adapted to condense said vapor at a temperature at the dew point of said gas, said Peltier junction comprising cooling means connected to said photo transistor, said Peltier junction being disposed in heat transfer relation with said insulation layer whereby when no condensation is formed on said reflecting surface a portion of said radiation is refracted and a substantial portion of radiation from said light emitting junction is reflected onto said photo transistor allowing current to flow through said photo transistor and said electronic circuit thereby cooling said insulation means and causing condensation to form on said reflecting surface thereby changing the ratio of reflection at said reflecting surface whereby said reflected radiation to said photo transistor is decreased and current flow through said circuit is decreased, reversing the cooling effect of said Peltier junction and providing an indication of dew point temperature from said temperature sensing means, means to connect a source of electricity to said circuit in a direction to cause said Peltier junction to absorb heat, whereby said outer surface of said insulating layer is cooled, causing said vapor to condense on said surface thereby changing the reflection of light from said surface, whereby the light reaching said photo transistor junction is changed abruptly, thereby changing the electrical conduction of said photo transistor.

Claim 7

The sensor recited in claim 4 wherein said insulation means is integrated on a substrate.

Claim 8

The combination recited in claim 5 wherein said semiconductor substrate is single crystal silicon.