US4433911A
Expired / Lapsed
US
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Method of evaluating measure precision of patterns and photomask therefor
Assignee: Toshiba Corp
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Filing: 1982-06-23
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Granted: 1984-02-28
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Expires: 2002-06-23
Abstract
Abstract A method for evaluating the measure precision of patterns such as photoresist and etched ones, and a photomask therefor. The photomask according to the present invention has a mask pattern corresponding to a pattern desired to be formed in a substrate, and also has a measure precision evaluating pattern formed at an area different from where the mask pattern is present. The measure precision evaluating pattern comprises a first measure precision evaluating pattern which has a plurality of pairs of pattern elements opposite to each other with a predetermined distance interposed therebetween, and a second measure precision evaluating pattern which has a plurality of pairs of pattern elements overlapped each other in a predetermined measure and arranged opposite to each other to form a constricted portion. The distance or the measure of overlapped area between paired pattern elements is varied with every pair of pattern elements. This mask pattern is transcribed onto the substrate and a pair of pattern elements contacting each other without overlapping is found from the transcribed pattern. Dimensional change is found from the distance or the measure of overlapped area between the pair of photomask pattern elements corresponding to that pair of pattern elements which has been found from the transcribed pattern.
Inventors
- 👤 Shizuo Sawada
- 👤 Mitsugi Ogura
- 👤 Norio Endo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 23:16
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/38; G03F1/42; G01; G01B; G01B11/00; G01B11/02; G03F1/68; G03F1/82; G03F1/84; G03F9/00
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
178 words
A method of evaluating the measure precision of a pattern formed in a substrate comprising: (a) providing a photomask including a first measure precision evaluating pattern having a plurality of pairs of pattern elements, pattern elements of each pair being spaced a predetermined distance from each other and arranged opposite to each other, and a second measure precision evaluating pattern having a plurality of pairs of pattern elements, pattern elements of each pair being arranged opposite to each other and overlapped each other in a predetermined measure to form a constricted portion, said predetermined distance being varied with every pair of pattern elements and said predetermined measure of overlapped area between pattern elements being varied with every pair of pattern elements; (b) transcribing said measure precision evaluating patterns to a substrate; and (c) finding a pair of pattern elements formed in the substrate, which contact each other without overlapping to know the dimensional change from the distance or the measure of overlapped area between pattern elements in the photomask which correspond to said pair of pattern elements found.
Claim 2
Independent Claim
178 words
A method of evaluating the measure precision of a pattern formed in a substrate comprising: (a) providing a photomask including a first measure precision evaluating pattern having a plurality of pairs of pattern elements, pattern elements of each pair being spaced a predetermined distance from each other and arranged opposite to each other, and a second measure precision evaluating pattern having a plurality of pairs of pattern elements, pattern elements of each pair being arranged opposite to each other and overlapped each other in a predetermined measure to form a constricted portion, said predetermined distance being varied with every pair of pattern elements and said predetermined measure of overlapped area between pattern elements being varied with every pair of pattern elements; (b) transcribing said measure precision evaluating patterns to a substrate; and (c) finding a pair of pattern elements formed in the substrate, which contact each other without overlapping to know the dimensional change from the distance or the measure of overlapped area between pattern elements in the photomask which correspond to said pair of pattern elements found.
Claim 3
Dependent Claim
61 words
The method according to claim 1 wherein said pattern elements constituting said first and second measure precision evaluating patterns are aligned in a line centering a pair of pattern elements contacting each other without overlapping, and said distance and said measure of overlapped area between pattern elements become larger as they become remoter and remoter from the center of said line.
Claim 4
Dependent Claim
32 words
The method according to claim 2 wherein the distance and the measure of overlapped area between pattern elements becomes equal to a value obtained by integrally multiplying its smallest distance or measure.
Claim 5
Independent Claim
27 words
The method according to any one of claims 1 to 3 wherein said pair of pattern elements are arranged with their parallel sides adjacent to each other.
Claim 6
Dependent Claim
12 words
The method according to claim 4 wherein said pattern elements are rectangular.
Claim 7
Dependent Claim
34 words
The method according to claim 5 wherein the step of finding said pair of pattern elements contacting each other without overlapping is achieved by finding sides of plural pattern elements aligned on a line.
Claim 8
Dependent Claim
19 words
The method according to claim 1 wherein said pattern to be evaluated its measure precision is a photoresist pattern.
Claim 9
Dependent Claim
27 words
The method according to claim 1 wherein said pattern to be evaluated its measure precision is an etched pattern formed using the photoresist pattern as a mask.
Claim 10
Dependent Claim
19 words
The method according to claim 7 wherein said etched pattern is a gate electrode pattern for a semiconductor device.
Claim 11
Dependent Claim
100 words
The method according to claim 8 wherein said gate electrode pattern is formed using a second photomask after a field insulating film pattern is formed using a first photomask, said measure precision evaluating patterns are formed in said second photomask, and a pattern for forming an area which is same in level as that of said gate electrode and to which said measure precision evaluating patterns formed in said second photomask are to be transcribed is prepared in a region different from the pattern for forming said gate electrodes, and said measure precision evaluating pattern is formed in said area.
Claim 12
Dependent Claim
96 words
A photomask comprising: a mask pattern for forming a desired pattern in a substrate; a first measure precision evaluating pattern having a plurality of pairs of pattern elements spaced a predetermined distance from each other and arranged opposite to each other, said predetermined distance being varied with every pair of pattern elements; and a second measure precision evaluating pattern having a plurality of pairs of pattern elements overlapped each other in a predetermined measure and arranged opposite to each other to form a constricted portion, said predetermined measure being varied with every pair of pattern elements.
Claim 13
Dependent Claim
96 words
A photomask comprising: a mask pattern for forming a desired pattern in a substrate; a first measure precision evaluating pattern having a plurality of pairs of pattern elements spaced a predetermined distance from each other and arranged opposite to each other, said predetermined distance being varied with every pair of pattern elements; and a second measure precision evaluating pattern having a plurality of pairs of pattern elements overlapped each other in a predetermined measure and arranged opposite to each other to form a constricted portion, said predetermined measure being varied with every pair of pattern elements.
Claim 14
Dependent Claim
61 words
The photomask according to claim 11 wherein said pattern elements constituting said first and second measure precision evaluating patterns are aligned in a line centering a pair of pattern elements contacting each other without overlapping, and said distance and said measure of overlapped area between pattern elements becoming larger as they become remoter and remoter from the center of said line.
Claim 15
Dependent Claim
26 words
The photomask according to claim 12 wherein said distance and said measure becomes equal to a value obtained by integrally multiplying its smallest distance or measure.
Claim 16
Dependent Claim
27 words
The photomask according to any one of claims 11 to 13 wherein said pair of pattern elements are arranged with their parallel sides adjacent to each other.
Claim 17
Dependent Claim
12 words
The photomask according to claim 14 wherein said pattern elements are rectangular.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-02-27 | 1987-08-29 | 1988-02-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-02-27 | 1991-08-29 | 1992-02-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-02-27 | 1995-08-29 | 1996-02-28 | $7700.00 | Window Closed / Lapsed |