Photosensitive device read by charge transfer

Claim 2

A photosensitive device read by charge transfer, wherein it has n lines of m photosensitive points, each photosensitive point being constituted by the integration of a semiconductor substrate of an MOS capacitor (C O ), having a grid G 0 common to the points of the same line and a reading diode D 1 separated from grid G 0 by a screen grid G 1 raised to a constant potential (V 1 ), m metallic connections (C 1 . . . C m ) connecting in parallel n diodes belonging to different lines; m diodes D 2 integrated on to the same semiconductor substrate to which lead the m metallic connections, said diodes being followed by a grid G 2 raised to a constant potential (V 2 ); removing means on a diode (D 5 ) of the charges accumulated on diodes D 1 and D 2 during each time interval when none of the grids G 0 is at zero; at least one shift register (R 1 ) making it possible to periodically zero each grid G 0 and remove the signal charges on diodes D 1 , and diodes D 2 ; means ensuring the transfer of the signal charges arriving beneath diodes D 2 to a charge transfer read register (R 2 ) with m parallel inputs and a series output.

Claim 3

A device according to claim 1, wherein it has a memory integrated on to the semiconductor substrate following diodes D 2 and beneath which the signal charges are collected before being transferred into the read register (R 2 ).

Claim 4

A device according to claim 2, wherein the memory is constituted by m diodes (D 4 ) followed by a grid (G 4 ) common to the m diodes and raised to a variable potential (V 4 ).

Claim 5

A device according to claim 3, wherein it has integrated on to the substrate following the memory, a grid G 5 and a diode D 5 connected to a variable potential (V 5 ), said diode receiving the parasitic charges accumulated beneath diodes D 1 and D 2 during the time interval when no photosensitive grid G 0 was at zero.

Claim 6

A device according to claim 4, wherein it has integrated on to the semiconductor substrate (4) m diodes D 6 followed by a single grid G 6 ; each of these diodes being connected by a metallic connection (C' 1 . . . C' m ) to the corresponding diode (D 4 ) of the memory and grid G 6 raised to the same variable potential (V 4 ) as grid (G 4 ) of the memory, a single grid G 7 raised to a variable potential (V 7 ) and the charge transfer read register (R 2 ), whose preceding grid G 7 permits the charging to take place after the signal charges resulting from the reading of a line have been collected by the memory.

Claim 7

A device according to claim 5, wherein an oxide layer and an aluminium layer cover the diodes (D 4 ) of the memory and diodes D 6 , as well as part of adjacent grids (G 4 and G 6 ), an electrical contact being established across the insulant level with each grid.

Claim 8

A device according to claim 2, wherein a grid (G 3 ) raised to a variable potential (V 3 ) is intercalated between grid G 2 raised to a constant potential (V 2 ) and the memory on the semiconductor substrate.

Claim 9

A device according to claim 2, wherein the grid G 2 is surrounded by two coplanar grids raised to a constant potential below V 2 , one of these grids (G 14 ) being adjacent to diodes D 2 and the other grid G 4 constituting the memory.

Claim 10

A device according to claim 8, wherein grid G 4 is a rectangular grid having rectangular notches, at least every other of each part of the substrate (4) placed beneath a notch has a charge removal diode (D 5 ), a U-shaped isolating diffusion area surrounds each charge removal diode (D 5 ) and definies two channels on that part of the substrate reserved for the processing of charges from one of the metallic connections (C 1 . . . C m ), one of the channels (channel 2) leading to a removal diode (D 5 ) permits the removal of parasitic charges accumulated beneath diodes D 1 and D 2 to below diode D 5 during the time interval when none of the photosensitive grids G 0 is at zero, said transfer being controlled by a grid (G 15 ) positioned astride the horizontal part of the notches of G 4 , whilst the other channel (channel 1) makes it possible to transfer the signal charges from a line stored beneath grid G 4 into the charge transfer read register (R 2 ), said transfer being controlled by a grid (G 7 ) positioned astride the end of G 4 and the start of the register.

Claim 11

A device according to claim 2, wherein the constant potential (V 2 ) applied to grid G 2 following diodes D 2 is increased by a constant quantity ΔV during the transfer of signal charges beneath the memory.

Claim 12

A device according to claim 2, wherein it has, integrated on to the same semiconductor substrate m diodes (D 7 ) raised to a variable potential (V 7 ) followed by two coplanar grids G 8 and G 9 raised to two constant potentials V 8 and V 9 , with V 8 lower than (V 9 ) in such a way that a quantity of constant charges (Q 0 ) is stored beneath G 9 during the passage of the potential applied to the diode from low level to high level, a grid (G 11 ) and a storage electrode (G 12 ) raised to a variable potential (V 11 ), a screen grid (G 13 ) raised to a constant potential (V 13 ) and m diodes D 13 connected by metallic connections (C" 1 . . . C" m ) to m diodes D 2 , the quantity of charges (Q 0 ) being transferred beneath each diode D 13 during the transfer of signal charges beneath the memory.

Claim 13

A device according to claim 2, wherein it comprises, integrated on the same substrate, a C.C.D. shift register comprising m parallel outputs, each output being connected by a metal connection to one of the pairs of diodes D 1 -D 2 , this register receiving during the reading time of a line the same control signal as the read register (R 2 ) and a constant charge (Q o ) being injected permanently at the input and the register being emptied, when there is transfer of the signal-charges of the read line from the diodes D 1 to the diodes D 2 .

Claim 14

A device according to claim 1, wherein each photosensitive point has in the vicinity of the grid G 0 a collecting area (D 10 ) which is sensitive to the limited wavelengths to which G 0 is not sensitive, the charges created by the radiation on said areas (D 10 ) being collected beneath the grids G 0 .

Claim 15

A device according to claim 13, wherein each collecting area (D 10 ) is constituted by a single thin oxide area.

Claim 16

A device according to claim 13, wherein each collecting area (D 10 ) is constituted by a diode.

Claim 17

A device according to claim 15, wherein the diffusion zone corresponding to each diode constituting a collecting area (D 10 ) is extending under the adjacent grid G o .

Claim 18

A device according to claim 1, wherein that part of the semiconductor substrate (4) carrying the photosensitive area (1) has a reduced thickness and is illuminated by its rear face.

Claim 19

A device according to claim 1, wherein that part of the semiconductor substrate (4) which carries the photosensitive area (1) is illuminated by its front face and wherein the grids (G 0 ) are photosensitive and the reading diodes (D 1 ) are completely covered with aluminium.

Claim 20

A device according to claim 1, wherein the reading diodes (D 1 ) are arranged in staggered manner and are positioned in rectangular notches made on the horizontal grids G 0 .

Claim 21

A device according to claim 19, wherein it has m vertical grids G 1 raised to potential V 1 partly covering on the one hand one of the vertical edges of each notch made on each grid G 0 and on the other hand each reading diode D 1 arranged in alternating manner from one line to the next to the right and left of the vertical electrode G 1 .

Claim 22

A device according to claim 20, wherein the m vertical grids G 1 are covered with an insulating layer on which are deposited the m metallic connections (C 1 to C m ) which, as a result of contacts through the insulating layer, connect in parallel n reading diodes D 1 belonging to n different grids G 0 .

Claim 23

A device according to claim 1, wherein the reading diodes D 1 and the diodes D 2 are arranged in matrix form.

Claim 24

A device according to claim 1, wherein it has two shift registers, one of which addresses the lines of the even row and the other the lines of the uneven row.

Claim 25

A device according to claim 1, wherein each grid G 0 is connected to one of the electrodes of an MOS transistor (T 01 . . . T 0n ), whose grid is connected to a shift register (R 1 ) and whose other electrodes is connected to earth, the shift register periodically making each transistor conductive and zeroing each grid G 0 .

Claim 26

A device according to claim 1, wherein each grid G 0 is connected to one of the electrodes of an MOS transistor (T 1 . . . T n ), whose other electrode is connected to a constant potential (V 9 ) and whose grid receives a variable potential (V 8 ), which makes the conductors conductive and brings the grids G O to constant potential (V 9 ) after the transfer of signal charges from one line into the charge transfer register (R 2 ) has taken place.

Claim 27

A device according to claim 1, wherein each grid G 0 is connected to one of the electrodes of an MOS transistor (T 1 . . . T n ), whose other electrode is connected to a constant potential (V 9 ) and whose grid receives a constant potential, said transistors ensuring the restoration, after a time constant, of the constant potential (V 9 ) beneath the grids G 0 after the transfer of signal charges from one line into the charge transfer register (R 2 ) has taken place.

Claim 28

A device according to claim 1, wherein the semiconductor substrate used is made from silicon.

Claim 29

A charge transfer photosensitive read device comprising n lines of m photosensitive points, each photosensitive point being constituted by the integration on a semiconductor substrate of a MOS capacitor (C 0 ), having a grid G 0 common to the points of the same line and a reading diode D 1 separated from grid G 0 by a screen grid G 1 raised to a constant potential (V 1 ), m metallic connections (C 1 . . . C m ) connecting in parallel n diodes belonging to different lines; m diodes D 2 integrated on to the same semiconductor substrate to which lead the m metallic connections, said diodes being followed by a grid G 2 raised to a constant potential (V 2 ); removing means on a diode (D 5 ) of the charges accumulated on diodes D 1 and D 2 during each time interval when none of the grids G 0 is at zero; at least one shift register (R 1 ) making it possible to periodically zero each grid G 0 and remove the signal charges on diodes D 1 , and diodes D 2 ; means ensuring the transfer of the signal charges arriving beneath diodes D 2 to a charge transfer read register (R 2 ) with m parallel inputs and a series output; a memory integrated on to the semiconductor substrate following diodes D 2 and beneath which the signal charges are collected before being transferred into the read register (R 2 ).

Claim 30

A charge transfer photosensitive read device comprising n lines of m photosensitive points, each photosensitive point being constituted by the integration on a semiconductor substrate of a MOS capacitor (C 0 ), having a grid G 0 common to the points of the same line and a reading diode D 1 separated from grid G 0 by a screen grid G 1 raised to a constant potential (V 1 ), m metallic connections (C 1 . . . C m ) connecting in parallel n diodes belonging to different lines; m diodes D 2 integrated on to the same semiconductor substrate to which lead the m metallic connections, said diodes being followed by a grid G 2 raised to a constant potential (V 2 ); removing means on a diode (D 5 ) of the charges accumulated on diodes D 1 and D 2 during each time interval when none of the grids G 0 is at zero; at least one shift register (R 1 ) making it possible to periodically zero each grid G 0 and remove the signal charges on diodes D 1 , and diodes D 2 ; means ensuring the transfer of the signal charges arriving beneath diodes D 2 to a charge transfer read register (R 2 ) with m parallel inputs and a series output; a memory integrated on to the semiconductor substrate following diodes D 2 and beneath which the signal charges are collected before being transferred into the read register (R 2 ).

Claim 31

A charge transfer photosensitive read device comprising n lines of m photosensitive points, each photosensitive point being constituted by the integration on a semiconductor substrate of a MOS capacitor (C 0 ), having a grid G 0 common to the points of the same line and a reading diode D 1 separated from grid G 0 by a screen grid G 1 raised to a constant potential (V 1 ), the reading diodes (D 1 ) being arranged in staggered manner and positioned in rectangular notches made on the horizontal grids G 0 , m vertical grids G 1 raised to potential V 1 partly covering on the one hand one of the vertical edges of each notch made on each grid G 0 and on the other hand each reading diode D 1 arranged in alternating manner from one line to the next to the right and left of the vertical electrode G 1 and the m vertical grids G 1 being covered with an insulating layer on which are deposited the m metallic connections (C 1 to C m ) which, as a result of contacts through the insulating layer, connect in parallel n reading diodes D 1 belonging to n different grids G 0 . m diodes D 2 integrated on to the same semiconductor substrate to which lead the m metallic connections, said diodes being followed by a grid G 2 raised to a constant potential (V 2 ); removing means on a diode (D 5 ) of the charges accumulated on diodes D 1 and D 2 during each time interval when none of the grids G 0 is at zero; at least one shift register (R 1 ) making it possible to periodically zero each grid G 0 and remove the signal charges on diodes D 1 , and diodes D 2 ; means ensuring the transfer of the signal charges arriving beneath diodes D 2 to a charge transfer read register (R 2 ) with m parallel inputs and a series output.

Claim 32

A charge transfer photosensitive read device comprising n lines of m photosensitive points, each photosensitive point being constituted by the integration on a semiconductor substrate of a MOS capacitor (C 0 ), having a grid G 0 common to the points of the same line and a reading diode D 1 separated from grid G 0 by a screen grid G 1 raised to a constant potential (V 1 ), the reading diodes (D 1 ) being arranged in staggered manner and positioned in rectangular notches made on the horizontal grids G 0 , m vertical grids G 1 raised to potential V 1 partly covering on the one hand one of the vertical edges of each notch made on each grid G 0 and on the other hand each reading diode D 1 arranged in alternating manner from one line to the next to the right and left of the vertical electrode G 1 and the m vertical grids G 1 being covered with an insulating layer on which are deposited the m metallic connections (C 1 to C m ) which, as a result of contacts through the insulating layer, connect in parallel n reading diodes D 1 belonging to n different grids G 0 . m diodes D 2 integrated on to the same semiconductor substrate to which lead the m metallic connections, said diodes being followed by a grid G 2 raised to a constant potential (V 2 ); removing means on a diode (D 5 ) of the charges accumulated on diodes D 1 and D 2 during each time interval when none of the grids G 0 is at zero; at least one shift register (R 1 ) making it possible to periodically zero each grid G 0 and remove the signal charges on diodes D 1 , and diodes D 2 ; means ensuring the transfer of the signal charges arriving beneath diodes D 2 to a charge transfer read register (R 2 ) with m parallel inputs and a series output.

Claim 33

A charge transfer photosensitive read device comprising n lines of m photosensitive points, each photosensitive point being constituted by the integration on a semiconductor substrate of a MOS capacitor (C 0 ), having a grid G 0 common to the points of the same line and a reading diode D 1 separated from grid G 0 by a screen grid G 1 raised to a constant potential (V 1 ), m metallic connections (C 1 . . . C m ) connecting in parallel n diodes belonging to different lines; m diodes D 2 integrated on to the same semiconductor substrate to which lead the m metallic connections, said diodes being followed by a grid G 2 raised to a constant potential (V 2 ); removing means on a diode (D 5 ) of the charges accumulated on diodes D 1 and D 2 during each time interval when none of the grids G 0 is at zero; at least one shift register (R 1 ) making it possible to periodically zero each grid G 0 and remove the signal charges on diodes D 1 , and diodes D 2 ; means ensuring the transfer of the signal charges arriving beneath diodes D 2 to a charge transfer read register (R 2 ) with m parallel inputs and a series output; a memory integrated on to the semiconductor substrate following diodes D 2 and beneath which the signal charges are collected before being transferred into the read register (R 2 ), the grid G 2 being surrounded by two coplanar grids raised to a constant potential below V 2 , one of these grids (G 14 ) being adjacent to diodes D 2 and the other grid G 4 constituting the memory, said grid G 4 being a rectangular grid having rectangular notches, at least every other of each part of the substrate (4) placed beneath a notch has a charge removal diode (D 5 ), a U-shaped isolating diffusion area surrounds each charge removal diode (D 5 ) and definies two channels on that part of the substrate reserved for the processing of charges from one of the metallic connections (C 1 . . . C m ), one of the channels (channels 2) leading to a removal diode (D 5 ) permits the removal of parasitic charges accumulated beneath diodes D 1 and D 2 to below diode D 5 during the time interval when none of the photosensitive grids G 0 is at zero, said transfer being controlled by a grid (G 15 ) positioned astride the horizontal part of the notches of G 4 , whilst the other channel (channel 1) makes it possible to transfer the signal charges from a line stored beneath grid G 4 into the charge transfer read register (R 2 ), said transfer being controlled by a grid (G 7 ) positioned astride the end of G 4 and the start of the register.

Claim 34

A charge transfer photosensitive read device comprising n lines of m photosensitive points, each photosensitive point being constituted by the integration on a semiconductor substrate of a MOS capacitor (C 0 ), having a grid G 0 common to the points of the same line and a reading diode D 1 separated from grid G 0 by a screen grid G 1 raised to a constant potential (V 1 ), m metallic connections (C 1 . . . C m ) connecting in parallel n diodes belonging to different lines; m diodes D 2 integrated on to the same semiconductor substrate to which lead the m metallic connections, said diodes being followed by a grid G 2 raised to a constant potential (V 2 ); removing means on a diode (D 5 ) of the charges accumulated on diodes D 1 and D 2 during each time interval when none of the grids G 0 is at zero; at least one shift register (R 1 ) making it possible to periodically zero each grid G 0 and remove the signal charges on diodes D 1 , and diodes D 2 ; means ensuring the transfer of the signal charges arriving beneath diodes D 2 to a charge transfer read register (R 2 ) with m parallel inputs and a series output; a memory integrated on to the semiconductor substrate following diodes D 2 and beneath which the signal charges are collected before being transferred into the read register (R 2 ), the grid G 2 being surrounded by two coplanar grids raised to a constant potential below V 2 , one of these grids (G 14 ) being adjacent to diodes D 2 and the other grid G 4 constituting the memory, said grid G 4 being a rectangular grid having rectangular notches, at least every other of each part of the substrate (4) placed beneath a notch has a charge removal diode (D 5 ), a U-shaped isolating diffusion area surrounds each charge removal diode (D 5 ) and definies two channels on that part of the substrate reserved for the processing of charges from one of the metallic connections (C 1 . . . C m ), one of the channels (channels 2) leading to a removal diode (D 5 ) permits the removal of parasitic charges accumulated beneath diodes D 1 and D 2 to below diode D 5 during the time interval when none of the photosensitive grids G 0 is at zero, said transfer being controlled by a grid (G 15 ) positioned astride the horizontal part of the notches of G 4 , whilst the other channel (channel 1) makes it possible to transfer the signal charges from a line stored beneath grid G 4 into the charge transfer read register (R 2 ), said transfer being controlled by a grid (G 7 ) positioned astride the end of G 4 and the start of the register.

Claim 35

A charge transfer photosensitive read device comprising n lines of m photosensitive points, each photosensitive point being constituted by the integration on a semiconductor substrate of a MOS capacitor (C 0 ), having a grid G 0 common to the points of the same line and a reading diode D 1 separated from grid G 0 by a screen grid G 1 raised to a constant potential (V 1 ), m metallic connections (C 1 . . . C m ) connecting in parallel n diodes belonging to different lines, each photosensitive point having in the vicinity of the grid G 0 a collecting area (D 10 ) which is sensitive to the limited wavelengths to which G 0 is not sensitive, the charges created by the radiation on said areas (D 10 ) being collected beneath the grids G 0 . m diodes D 2 integrated on to the same semiconductor substrate to which lead the m metallic connections, said diodes being followed by a grid G 2 raised to a constant potential (V 2 ); removing means on a diode (D 5 ) of the charges accumulated on diodes D 1 and D 2 during each time interval when none of the grids G 0 is at zero; at least one shift register (R 1 ) making it possible to periodically zero each grid G 0 and remove the signal charges on diodes D 1 , and diodes D 2 ; means ensuring the transfer of the signal charges arriving beneath diodes D 2 to a charges transfer read register (R 2 ) with m parallel inputs and a series output.

Claim 36

A charge transfer photosensitive read device comprising n lines of m photosensitive points, each photosensitive point being constituted by the integration on a semiconductor substrate of a MOS capacitor (C 0 ), having a grid G 0 common to the points of the same line and a reading diode D 1 separated from grid G 0 by a screen grid G 1 raised to a constant potential (V 1 ), m metallic connections (C 1 . . . C m ) connecting in parallel n diodes belonging to different lines, each photosensitive point having in the vicinity of the grid G 0 a collecting area (D 10 ) which is sensitive to the limited wavelengths to which G 0 is not sensitive, the charges created by the radiation on said areas (D 10 ) being collected beneath the grids G 0 . m diodes D 2 integrated on to the same semiconductor substrate to which lead the m metallic connections, said diodes being followed by a grid G 2 raised to a constant potential (V 2 ); removing means on a diode (D 5 ) of the charges accumulated on diodes D 1 and D 2 during each time interval when none of the grids G 0 is at zero; at least one shift register (R 1 ) making it possible to periodically zero each grid G 0 and remove the signal charges on diodes D 1 , and diodes D 2 ; means ensuring the transfer of the signal charges arriving beneath diodes D 2 to a charges transfer read register (R 2 ) with m parallel inputs and a series output.

Claim 37

A device according to claim 31, wherein it has a memory integrated on to the semiconductor substrate following diodes D 2 and beneath which the signal charges are collected before being transferred into the read register (R 2 ).

Claim 38

A device according to claim 31, wherein each collecting area (D 10 ) is constituted by a single thin oxide area.

Claim 39

A device according to claim 31, wherein each collecting area (D 10 ) is constituted by a diode.

Claim 40

A device according to claim 31, wherein the diffusion zone corresponding to each diode constituting a collecting area (D 10 ) is extending under the adjacent grid G 0 .