Abstract A device for measuring the thickness of a thin film or the like is provided using infrared rays. A source of infrared rays is positioned on one side of the film. A disk with two apertures is rotatably mounted between the infrared source and the film, with band-pass filters positioned over the apertures in the disk. A concave hemispherical reflector with a reflector surface facing the film is positioned between the infrared source and the film. A hole is formed in the center of the concave reflector through which the infrared rays pass. A convex reflector is positioned between the film and the concave reflector and has a reflecting surface facing the concave reflector. A light collecting guide with a photoelectric sensor is positioned on the opposite side of the film from the infrared source for measuring the intensity of the infrared rays.
A device for measuring the thickness of a thin film or the like comprising: a source of infrared rays positioned on one side of said film; a disk with at least two apertures rotatably mounted between said infrared source and said film; band-pass filters disposed over said apertures in said disk for filtering said infrared rays; a concave, hemispherical reflector with a reflector surface facing said film and having a hole therein and positioned between said infrared source and said film whereby said infrared rays pass through said hole; a convex reflector positioned between said film and said concave reflector and having a convex reflecting surface facing said concave reflector; and a light collecting guide with means for sensing said infrared rays, said light collecting guide having a conical reflecting surface and being positioned on the opposite side of said film from said infrared source, said infrared sensing means being positioned at the apex of said conical reflecting surface.
Claim 2
Independent Claim
159 words
A device for measuring the thickness of a thin film or the like comprising: a source of infrared rays positioned on one side of said film; a disk with at least two apertures rotatably mounted between said infrared source and said film; band-pass filters disposed over said apertures in said disk for filtering said infrared rays; a concave, hemispherical reflector with a reflector surface facing said film and having a hole therein and positioned between said infrared source and said film whereby said infrared rays pass through said hole; a convex reflector positioned between said film and said concave reflector and having a convex reflecting surface facing said concave reflector; and a light collecting guide with means for sensing said infrared rays, said light collecting guide having a conical reflecting surface and being positioned on the opposite side of said film from said infrared source, said infrared sensing means being positioned at the apex of said conical reflecting surface.
Claim 3
Dependent Claim
24 words
The device of claim 1 wherein the open end diameter of said light collecting guide is smaller than the diameter of said concave reflector.
Claim 4
Dependent Claim
27 words
The device of claim 1 wherein said convex reflector includes a truncated cone and said convex reflecting surface is formed at the bottom of said truncated cone.
Claim 5
Dependent Claim
24 words
The device of claim 3 wherein the open end diameter of said light collecting guide is smaller than the diameter of said concave reflector.