US4429034A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dry film resists
Assignee: General Electric Co
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Filing: 1982-04-12
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Granted: 1984-01-31
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Expires: 2002-04-12
Abstract
Abstract A resist film composed of a water-soluble polyvinyl alcohol, a water-soluble thermosetting polymethylol cross-linking agent and a polyaryl iodonium or sulfonium salt of a complex halogenide as catalyst, when irradiated with ultraviolet light and then heated, or when heated and irradiated with ultraviolet light, under a circuit mask, provides a latent image which is developable by water alone.
Inventors
- 👤 John J. Keane
- 👤 Richard F. Zopf
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:17
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
119 words
A water-dispersible flexible apparently dry but tacky photoresist film comprising a homogeneous mixture of: (i) colloidal droplets of a solution in a solvent comprising acetone, methyl chloride, methylformate or propylene carbonate of a polyaryliodonium or sulfonium salt of a complex halogenide latent catalyst dispersed in a continuous aqueous phase containing, (ii) a water-soluble normally solid polyvinyl alcohol as film-forming component, and (iii) an effective amount of a water-soluble thermosetting polymethylol compound to cross-link said polyvinyl alcohol to water-insoluble state at elevated temperature therefor, the amount of said latent catalyst being sufficient to catalyze the cross-linking action of said polymethylol compound when said emulsion is dried and irradiated with ultraviolet light and heated simultaneously with or subsequent to said irradiation.
Claim 2
Dependent Claim
119 words
A water-dispersible flexible apparently dry but tacky photoresist film comprising a homogeneous mixture of: (i) colloidal droplets of a solution in a solvent comprising acetone, methyl chloride, methylformate or propylene carbonate of a polyaryliodonium or sulfonium salt of a complex halogenide latent catalyst dispersed in a continuous aqueous phase containing, (ii) a water-soluble normally solid polyvinyl alcohol as film-forming component, and (iii) an effective amount of a water-soluble thermosetting polymethylol compound to cross-link said polyvinyl alcohol to water-insoluble state at elevated temperature therefor, the amount of said latent catalyst being sufficient to catalyze the cross-linking action of said polymethylol compound when said emulsion is dried and irradiated with ultraviolet light and heated simultaneously with or subsequent to said irradiation.
Claim 3
Dependent Claim
15 words
A photoresist film according to claim 1 between 0.2 mil and 2 mils in thickness.
Claim 4
Dependent Claim
14 words
A photoresist film according to claim 1, supported on a non-adhesive peelable carrier film.
Claim 5
Dependent Claim
16 words
A photoresist film according to claim 3, wherein the carrier film is a poly (polyhaloethylene) film.
Claim 6
Dependent Claim
13 words
A photoresist film according to claim 4, wherein the carrier film is poly(dichlorodifluoroethylene).
Claim 7
Dependent Claim
16 words
A photoresist film according to claim 3, wherein the carrier film is transparent to ultraviolet light.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-01-30 | 1987-08-01 | 1988-01-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-01-30 | 1991-08-01 | 1992-01-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-01-30 | 1995-08-01 | 1996-01-31 | $7700.00 | Window Closed / Lapsed |