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US4427296A Expired / Lapsed US ⏱️ 0.0 years remaining

Electro-optical measuring system

Assignee: Zygo Corp
•
Filing: 1981-09-03
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Granted: 1984-01-24
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Expires: 2001-09-03
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Abstract

Abstract An electro-optical measuring system is described wherein a laser or light beam is precisely translated in a straight line perpendicular to the direction of propagation of the beam at a uniform, repeatable speed to define a time-varying sensing field whose energy is picked up by a photosensor which yields an output signal. An object whose dimension is to be measured is inserted in the field whereby the output signal of the photosensor takes the form of a pulse whose leading edge is developed by the traversal of the beam across one edge of the object, thereby blocking passage of the energy to the photosensor. The trailing edge is developed by the traversal of the beam across the opposite edge of the object thereby restoring the energy to the photosensor. The width or time duration of the pulse is a measure of the distance between the two edges. Measurements of exceptional precision are obtained by a circulation reducer in the light path of the translated beam to substantially eliminate convection currents in the air, further precision is obtained by using group delay equalization in the edge sensing signal processing to reduce systematic errors due to variations in edge pulse width, and by using analog interpolation to provide high resolution measurement of the location of the edge of the object.

Inventors

  • 👤 Frank C. Demarest
  • 👤 Richard A. Iderosa

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 05:32
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/08; G01B11/10; G01B11/105

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 175 words
In an electro optical measuring system comprising (1) a source of radiant energy which produces a narrow collimated beam, (2) means for converting said narrow beam into a uniformly rotationally scanned beam, (3) means for converting said rotationally scanned beam into a parallel scanned beam, (4) means for collecting and photosensing the portion of said parallel scanned beam which passes by the edges of an object being measured, (5) means for processing the photosensor output to produce signatures indicating the coincidence of the center of said parallel scanned beam with said edges, and (6) means for processing said signatures to indicate the size of said object, and (7) in which system the path of said scanned beams between means (2) and said object to be measured is occupied by ambient air, the improvement which comprises providing (8) very narrow shielded passages for said path of said scanned beams in said region (7), of proper dimensions to insure that heat transfer in said region (7) occurs almost completely by conduction and radiation rather than by convection.
Claim 2
Dependent Claim 175 words
In an electro optical measuring system comprising (1) a source of radiant energy which produces a narrow collimated beam, (2) means for converting said narrow beam into a uniformly rotationally scanned beam, (3) means for converting said rotationally scanned beam into a parallel scanned beam, (4) means for collecting and photosensing the portion of said parallel scanned beam which passes by the edges of an object being measured, (5) means for processing the photosensor output to produce signatures indicating the coincidence of the center of said parallel scanned beam with said edges, and (6) means for processing said signatures to indicate the size of said object, and (7) in which system the path of said scanned beams between means (2) and said object to be measured is occupied by ambient air, the improvement which comprises providing (8) very narrow shielded passages for said path of said scanned beams in said region (7), of proper dimensions to insure that heat transfer in said region (7) occurs almost completely by conduction and radiation rather than by convection.
Claim 3
Dependent Claim 13 words
The system of claim 1, in which said energy source is a laser.
Claim 4
Dependent Claim 80 words
The system of claim 1, in which said parallel scanned beam is focused adjacent to said object being measured to reduce errors due to irregularities in the optics, and the systematic variations of focus are compensated for by providing means (8) to substantially reduce the systematic errors in sensing the coincidence of the center of said parallel scanned beam with the edge of the object due to changes in the beam size in the measuring plane along the scanned path.
Claim 5
Dependent Claim 16 words
The system of claim 3 in which means (8) are provided by using group delay equalization.
Claim 6
Dependent Claim 34 words
The system of claim 3 in which means (9) are provided to obtain a resolution of ±1 nanosecond in measuring the timing of the signals locating the edges of the object to be measured.
Claim 7
Dependent Claim 19 words
The system of claim 3 in which means (9) are provided by applying analog interpolation to the said signals.
Claim 8
Dependent Claim 121 words
The system of claim 1, in which means (5) include means to differentiate the photosensor signal obtained as said scanned beam pass an edge of said object being measured to produce a second signal with maximum intensity at points corresponding to said edge of said object, means to further differentiate said second signal to produce a third signal of zero intensity at points corresponding to said edge of said object, means to feed a portion of said second signal and said third signal to a switch which passes said third signal only for a limited period adjacent the peak of said second signal to produce said signature indicating the coincidence of the center of said parallel scanned beam with said edge.

References Cited (Backward Citations)

US3892962A Cited
DE2310204A1 Cited
US3907439A Cited
US4074938A Cited
US4097158A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-01-23 1987-07-25 1988-01-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-01-23 1991-07-25 1992-01-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-01-23 1995-07-25 1996-01-24 $7700.00 Window Closed / Lapsed

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