US4424103A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film deposition
Assignee: Honeywell Inc
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Filing: 1983-04-04
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Granted: 1984-01-03
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Expires: 2003-04-04
Abstract
Abstract Disclosed is a method and apparatus for thin film deposition comprising bombarding a target obliquely in a vacuum chamber with a linear ion gun. The linear ion gun generates an ion beam which impacts the target over an area having a width substantially greater than a height. Target material in the impacted area is sputtered. The sputtered target material is deposited onto a surface by translating the surface at a controlled rate through the sputtered material.
Inventors
- 👤 Barrett E. Cole
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 08:16
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/46; H; H01; H01J; H01J37/00; H01J37/02; H01J37/026; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
72 words
A method of thin film deposition, comprising: bombarding a target obliquely in a vacuum chamber with a linear ion gun, the linear ion gun generating an ion beam which impacts the target over an area having a width substantially greater than a height, target material in the impacted area being sputtered; and depositing the sputtered target material onto a surface by translating the surface at a controlled rate through the sputtered material.
Claim 2
Independent Claim
72 words
A method of thin film deposition, comprising: bombarding a target obliquely in a vacuum chamber with a linear ion gun, the linear ion gun generating an ion beam which impacts the target over an area having a width substantially greater than a height, target material in the impacted area being sputtered; and depositing the sputtered target material onto a surface by translating the surface at a controlled rate through the sputtered material.
Claim 3
Dependent Claim
22 words
The method of claim 1 wherein the bombarding step comprises bombarding a conductive target for depositing sputtered conductive material onto the surface.
Claim 4
Dependent Claim
22 words
The method of claim 1 wherein the bombarding step comprises bombarding a nonconductive target for depositing sputtered nonconductive material onto the surface.
Claim 5
Dependent Claim
22 words
The method of claim 1 wherein the bombarding step comprises bombarding a semiconductor target for depositing sputtered semiconductor material onto the surface.
Claim 6
Dependent Claim
65 words
Apparatus for thin film deposition, comprising: linear ion gun means for generating an ion beam having a width substantially greater than a height and for sputtering target material from a target area having a width substantially greater than a height; and means for translating a surface at a controlled rate through the sputtered target material in order to deposit a thin film onto the surface.
Claim 7
Dependent Claim
65 words
Apparatus for thin film deposition, comprising: linear ion gun means for generating an ion beam having a width substantially greater than a height and for sputtering target material from a target area having a width substantially greater than a height; and means for translating a surface at a controlled rate through the sputtered target material in order to deposit a thin film onto the surface.
Claim 8
Dependent Claim
21 words
The apparatus of claim 5 wherein the linear ion gun means comprises means for sputtering target material from a conductive target.
Claim 9
Dependent Claim
21 words
The apparatus of claim 5 wherein the linear ion gun means comprises means for sputtering target material from a nonconductive target.
Claim 10
Dependent Claim
21 words
The apparatus of claim 5 wherein the linear ion gun means comprises means for sputtering target material from a semiconductor target.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-01-02 | 1987-07-04 | 1988-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-01-02 | 1991-07-04 | 1992-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-01-02 | 1995-07-04 | 1996-01-03 | $7700.00 | Window Closed / Lapsed |