US4423403A
Expired / Lapsed
US
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Transparent conductive films and methods of producing same
Assignee: Hitachi Ltd
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Filing: 1982-04-16
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Granted: 1983-12-27
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Expires: 2002-04-16
Abstract
Abstract Cadmium-tin oxide films are prepared by d-c reactive sputtering of Cd-Sn alloys in Ar-O 2 mixtures. The films obtained have low resistivity of the order of 10 -3 -10 -4 Ω-cm and high optical transparency depending upon deposition conditions.
Inventors
- 👤 Kiyoshi Miyake
- 👤 Naoyuki Miyata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 06:16
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/22; C03C17/23; C03C17/245; C03C17/2453; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/086; H; H01; H01B; H01B1/00; H01B1/06; H01B1/08
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
20 words
A transparent and electrically conductive film consisting essentially of a mixture of Cd 2 SnO 4 and CdSnO 3 .
Claim 2
Dependent Claim
20 words
A transparent and electrically conductive film consisting essentially of a mixture of Cd 2 SnO 4 and CdSnO 3 .
Claim 3
Dependent Claim
28 words
A transparent and electrically conductive film according to claim 1, wherein said film has a specific resistivity on the order of 10 -3 Ω-cm to 10 -4 Ω-cm.
Claim 4
Dependent Claim
34 words
A structure comprising a substrate, a transparent film comprising a mixture of Cd 2 SnO 4 and CdSnO 3 formed on the surface of said substrate, and an electrode connected to said transparent film.
Claim 5
Dependent Claim
34 words
A structure comprising a substrate, a transparent film comprising a mixture of Cd 2 SnO 4 and CdSnO 3 formed on the surface of said substrate, and an electrode connected to said transparent film.
Claim 6
Dependent Claim
20 words
The structure according to claim 3, wherein said film has a specific resistivity of not more than 10 -3 Ω-cm.
Claim 7
Dependent Claim
29 words
A transparent and electrically conductive film according to claim 1, wherein said film consists essentially of a mixture of amorphous Cd 2 SnO 4 and polycrystalline CdSnO 3 .
Claim 8
Dependent Claim
77 words
A transparent and electrically conductive film according to claim 5, wherein said film was prepared by a sputtering process in which a target containing an alloy of cadmium and tin is placed in a gas mixture consisting essentially of an inert gas and an oxygen gas having an oxygen partial pressure of 3 to 20% and an electrical discharge is caused to take place in said gas mixture under the application of a high voltage electric field.
Claim 9
Dependent Claim
28 words
A transparent and electrically conductive film according to claim 6, wherein said target is an alloy of cadmium and tin in a molar ratio of 2 to 1.
Claim 10
Dependent Claim
29 words
A transparent and electrically conductive film according to claim 1, wherein said film exhibits a spectral transmission factor of about 90% for a light in the visible light region.
References Cited (Backward Citations)
US3811953A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-12-26 | 1987-06-27 | 1987-12-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-12-26 | 1991-06-27 | 1991-12-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-12-26 | 1995-06-27 | 1995-12-27 | $7700.00 | Window Closed / Lapsed |