US4413864A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gas bearing
Assignee: Axcelis Technologies Inc
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Filing: 1981-07-31
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Granted: 1983-11-08
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Expires: 2001-07-31
Abstract
Abstract A gas bearing is provided which has a spherically contoured pocket with a gas supply passage which opens in the center of the pocket. The gas bearing is coupled to the load and is supported by a stem and a ball joint through which the gas is supplied to the bearing. An additional passage allows gas to flow between the pocket and a closed chamber in the bearing.
Inventors
- 👤 Edward H. Phillips
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 12:22
CPC Classifications
F; F16; F16C; F16C32/00; F16C32/06; F16C32/0662; F16C32/0666; F16C29/00; F16C29/02; F16C29/025; F16C32/0603; F16C32/0614
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
142 words
A gas bearing for supporting a load in a high precision apparatus having a fixed bearing surface, the gas bearing comprising: a gas inlet; a body having a concave pocket formed in a surface thereof opposed to the fixed bearing surface, said body having a circular periphery and having first and second openings in the pocket; a first passage through a portion of the body connected to the gas inlet and the first opening; first restrictive means for restricting the flow of gas through the first passage; an enclosed chamber in the body, said chamber being associated solely with said pocket; a second passage through a portion of the body connected to the chamber and the second opening; second restrictive means for restricting the flow of gas through the second passage; and mechanical coupling means for coupling the body to the load.
Claim 2
Dependent Claim
142 words
A gas bearing for supporting a load in a high precision apparatus having a fixed bearing surface, the gas bearing comprising: a gas inlet; a body having a concave pocket formed in a surface thereof opposed to the fixed bearing surface, said body having a circular periphery and having first and second openings in the pocket; a first passage through a portion of the body connected to the gas inlet and the first opening; first restrictive means for restricting the flow of gas through the first passage; an enclosed chamber in the body, said chamber being associated solely with said pocket; a second passage through a portion of the body connected to the chamber and the second opening; second restrictive means for restricting the flow of gas through the second passage; and mechanical coupling means for coupling the body to the load.
Claim 3
Dependent Claim
21 words
A gas bearing as in claim 1 wherein the first restrictive means includes a flow restricter included in the first passage.
Claim 4
Dependent Claim
21 words
A gas bearing as in claim 2 wherein the second restrictive means includes a flow restricter included in the second passage.
Claim 5
Dependent Claim
15 words
A gas bearing as in claim 3 wherein the contour of the pocket is spherical.
Claim 6
Dependent Claim
50 words
A gas bearing as in claim 4 wherein the mechanical coupling means comprises a stem mounted in a ball joint in the body, the gas inlet is a passage through the stem and the first passage in the body connects with the passage through the stem in the ball joint.
Claim 7
Dependent Claim
15 words
A gas bearing as in claim 2 wherein the contour of the pocket is spherical.
Claim 8
Dependent Claim
50 words
A gas bearing as in claim 6 wherein the mechanical coupling means comprises a stem mounted in a ball joint in the body, the gas inlet is a passage through the stem and the first passage in the body connects with the passage through the stem in the ball joint.
Claim 9
Dependent Claim
133 words
A gas bearing for supporting a load comprising: a source of gas; a flat fixed bearing surface; a body having a concave pocket formed in a surface thereof in a spaced facing relationship with the flat fixed bearing surface, the pocket having a circular periphery and a first and a second opening in the central portion of the surface; gas conduit means connected to the source of gas and the first opening for carrying gas from the source of gas to the first opening; first restrictive means for restricting the flow of gas through the gas conduit means; an enclosed chamber; a passage connecting the chamber to the second opening; second restrictive means for restricting the flow of gas through the passage; and mechanical coupling means for coupling the body to the load.
Claim 10
Dependent Claim
133 words
A gas bearing for supporting a load comprising: a source of gas; a flat fixed bearing surface; a body having a concave pocket formed in a surface thereof in a spaced facing relationship with the flat fixed bearing surface, the pocket having a circular periphery and a first and a second opening in the central portion of the surface; gas conduit means connected to the source of gas and the first opening for carrying gas from the source of gas to the first opening; first restrictive means for restricting the flow of gas through the gas conduit means; an enclosed chamber; a passage connecting the chamber to the second opening; second restrictive means for restricting the flow of gas through the passage; and mechanical coupling means for coupling the body to the load.
Claim 11
Dependent Claim
29 words
A gas bearing as in claim 8 wherein the first restrictive means includes a flow restricter included in the gas conduit means to restrict the flow of gas therethrough.
Claim 12
Dependent Claim
27 words
A gas bearing as in claim 9 wherein the second restrictive means includes a flow restricter included in the passage to restrict the flow of gas therethrough.
Claim 13
Dependent Claim
17 words
A gas bearing as in claim 10 wherein the contour of the concave bearing surface is spherical.
Claim 14
Dependent Claim
25 words
A gas bearing as in claim 11 further comprising an additional pocket formed in the first mentioned pocket and including the first and second openings.
Claim 15
Dependent Claim
32 words
A gas bearing as in claim 11 wherein the spacing between the flat fixed bearing surface and the pocket is no more than the depth of the pocket at the center thereof.
Claim 16
Dependent Claim
52 words
A gas bearing as in claim 13 wherein the mechanical coupling means comprises a stem mounted in a ball joint in the body and the gas conduit means includes a passage through the stem to the ball joint and a passage through the body from the ball joint to the first opening.
Claim 17
Dependent Claim
17 words
A gas bearing as in claim 9 wherein the contour of the concave bearing surface is spherical.
Claim 18
Dependent Claim
25 words
A gas bearing as in claim 15 further comprising an additional pocket formed in the first mentioned pocket and including the first and second openings.
Claim 19
Dependent Claim
32 words
A gas bearing as in claim 15 wherein the spacing between the flat fixed bearing surface and the pocket is no more than the depth of the pocket at the center thereof.
Claim 20
Dependent Claim
52 words
A gas bearing as in claim 17 wherein the mechanical coupling means comprises a stem mounted in a ball joint in the body and the gas conduit means includes a passage through the stem to the ball joint and a passage through the body from the ball joint to the first opening.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-11-07 | 1987-05-09 | 1987-11-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-11-07 | 1991-05-09 | 1991-11-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-11-07 | 1995-05-09 | 1995-11-08 | $7700.00 | Window Closed / Lapsed |