US4403827A
Expired / Lapsed
US
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Process for producing a diffraction grating
Assignee: McDonnell Douglas Corp
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Filing: 1980-09-12
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Granted: 1983-09-13
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Expires: 2000-09-12
Abstract
Abstract A diffraction grating is formed by depositing a glass film on a substrate and thereafter applying to the glass film a layer that is highly absorptive to radiation of a specific wavelength. The highly absorptive layer is then coated with a photoresist that is transparent and photosensitive to light of the specific wavelength. Next the photoresist layer is exposed with a holographic image of a desired grating pattern, and the exposed areas are carried away in a developing solution, leaving the photoresist with a grating pattern consisting of a series of closely spaced ridges separated by voids. During the exposure of the photoresist, the absorbing layer absorbs most of the radiation that penetrates the photoresist and thereby prevents that radiation from reflecting from the glass layer or the substrate and creating a pronounced standing wave pattern. A wave pattern of that nature would expose the photoresist in undesired areas, resulting in weakened ridges during the subsequent development. By reducing the standing waves, unusually high ridges are obtained. Thereafter, the deep grating pattern is transferred to the glass film by ion-milling the exposed surface of the photoresist. This erodes both the photoresist and the glass film, and due to the deep grating pattern in the photoresist, the grooves imparted to the glass film are also quite deep. The greater depth of the grooves in the glass significantly improves the diffraction efficiency.
Inventors
- 👤 David A. Bryan
- 👤 John K. Powers
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 23:06
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10P76/2043; G; G02; G02B; G02B5/00; G02B5/18; G02B5/1847; G02B5/1857; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/124; G03; G03F; G03F7/00; G03F7/0005; G03F7/001; G03F7/004; G03F7/09; G03F7/091; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
169 words
A process for forming a diffraction grating, said process comprising: applying an absorbing layer to a grating substance on which a grating pattern is to be produced, the absorbing layer being highly absorptive to radiation at a specific wavelength; applying a photoresist layer over the absorbing layer so that the absorbing layer is between the grating substance and the photoresist layer, the photoresist layer being photosensitive to radiation at the specific wavelength; directing beams of interfering coherent radiation of the specific wavelength onto the photoresist layer such that the photoresist layer is exposed in a series of closely spaced lines corresponding to the desired grating pattern; developing the exposed photoresist layer such that portions thereof are removed to provide alternate ridges and grooves in the photoresist layer which generally correspond to the desired grating pattern; and removing the absorbing material and some of the grating substance at the grooves so as to create corresponding grooves in the grating substance to thereby impart the grating pattern to the grating substance.
Claim 2
Dependent Claim
169 words
A process for forming a diffraction grating, said process comprising: applying an absorbing layer to a grating substance on which a grating pattern is to be produced, the absorbing layer being highly absorptive to radiation at a specific wavelength; applying a photoresist layer over the absorbing layer so that the absorbing layer is between the grating substance and the photoresist layer, the photoresist layer being photosensitive to radiation at the specific wavelength; directing beams of interfering coherent radiation of the specific wavelength onto the photoresist layer such that the photoresist layer is exposed in a series of closely spaced lines corresponding to the desired grating pattern; developing the exposed photoresist layer such that portions thereof are removed to provide alternate ridges and grooves in the photoresist layer which generally correspond to the desired grating pattern; and removing the absorbing material and some of the grating substance at the grooves so as to create corresponding grooves in the grating substance to thereby impart the grating pattern to the grating substance.
Claim 3
Dependent Claim
43 words
The process according to claim 1 wherein the step of removing the absorbing material and some of the grating substance at the grooves comprises eroding the ridges of the photoresist layer, the absorbing material, and some of the grating substance at the grooves.
Claim 4
Dependent Claim
23 words
The process according to claim 2 wherein the ridges, the absorbing material, and some of the grating substance are eroded by ion milling.
Claim 5
Dependent Claim
28 words
The process according to claim 1 wherein the radiation at the selected wavelength is in the violet region of the spectrum and the absorbing layer is iron oxide.
Claim 6
Dependent Claim
14 words
The process according to claim 1 wherein the grating substance is a glass film.
Claim 7
Dependent Claim
26 words
The process according to claim 5 and further comprising applying the glass film to a substrate before the absorbing layer is applied to the glass film.
Claim 8
Dependent Claim
15 words
The process according to claim 1 wherein the spacing of the closely spaced lines varies.
Claim 9
Dependent Claim
23 words
The process according to claim 1 wherein the grooves are formed to a depth of at least 30 nm in the grating substance.
Claim 10
Dependent Claim
27 words
The process according to claim 1 wherein the photoresist layer is transparent to the light at the specific wavelength and is exposed generally uniformly throughout its depth.
Claim 11
Dependent Claim
29 words
The process according to claim 1 wherein that surface of the grating substance to which the absorbing layer is applied is reflective as to radiation of the specific wavelength.
Claim 12
Dependent Claim
13 words
The process according to claim 1 wherein the absorbing layer is iron oxide.
Claim 13
Dependent Claim
23 words
The process according to claim 11 wherein the iron oxide of the absorbing layer is applied to the grating substance by vapor deposition.
Claim 14
Dependent Claim
49 words
The process according to claim 11 wherein the step of removing the absorbing material and some of the grating substance at the grooves comprises eroding both the ridges of the photoresist layer and also the iron oxide absorbing layer and the grating substance at the grooves by ion milling.
Claim 15
Dependent Claim
212 words
A process for forming a grating capable of diffracting polychromatic light into the monochromatic components from which it is composed; said process comprising applying a waveguide film to a substrate, the waveguide film being transparent to radiation of a specific wavelength and at a surface thereof also being reflective as to that radiation; applying an absorbing layer composed essentially of iron oxide to the waveguide film at the reflective surface thereof, the absorbing layer being highly absorptive as to radiation at the specific wavelength; applying a photoresist layer to the absorbing layer so that the absorbing layer is interposed between the waveguide film and the photoresist layer, the photoresist layer being photosensitive to the radiation at the specific wavelength; exposing the photoresist layer to beams of interfering coherent radiation of the specific wavelength with the radiation being cast upon the photoresist layer in a grating pattern of closely spaced lines of illumination and darkness; developing the photoresist layer such that material is removed therefrom to provide closely spaced ridges and intervening grooves that together correspond in configuration to the grating pattern; and eroding the ridges of the photoresist layer the absorbing layer, and the glass film at said grooves in the photoresist layer so as to impart grooves to the glass film.
Claim 16
Dependent Claim
212 words
A process for forming a grating capable of diffracting polychromatic light into the monochromatic components from which it is composed; said process comprising applying a waveguide film to a substrate, the waveguide film being transparent to radiation of a specific wavelength and at a surface thereof also being reflective as to that radiation; applying an absorbing layer composed essentially of iron oxide to the waveguide film at the reflective surface thereof, the absorbing layer being highly absorptive as to radiation at the specific wavelength; applying a photoresist layer to the absorbing layer so that the absorbing layer is interposed between the waveguide film and the photoresist layer, the photoresist layer being photosensitive to the radiation at the specific wavelength; exposing the photoresist layer to beams of interfering coherent radiation of the specific wavelength with the radiation being cast upon the photoresist layer in a grating pattern of closely spaced lines of illumination and darkness; developing the photoresist layer such that material is removed therefrom to provide closely spaced ridges and intervening grooves that together correspond in configuration to the grating pattern; and eroding the ridges of the photoresist layer the absorbing layer, and the glass film at said grooves in the photoresist layer so as to impart grooves to the glass film.
Claim 17
Dependent Claim
28 words
The process according to claim 14 wherein the glass film is eroded until the grooves formed in it are at least 30 nm deep in the glass film.
Claim 18
Dependent Claim
22 words
The process according to claim 14 wherein the absorbing layer of iron oxide is applied to the waveguide film by vapor deposition.
Claim 19
Dependent Claim
29 words
The process according to claim 16 wherein the ridges of the photoresist layer and also the absorbing layer and glass film at the grooves ae eroded by ion milling.
References Cited (Backward Citations)
US2927023A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-09-12 | 1987-03-14 | 1987-09-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-09-12 | 1991-03-14 | 1991-09-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-09-12 | 1995-03-14 | 1995-09-13 | $7700.00 | Window Closed / Lapsed |