US4403202A
Expired / Lapsed
US
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Surface acoustic wave device and method for producing the same
Assignee: Faurecia Clarion Electronics Co Ltd
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Filing: 1981-03-27
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Granted: 1983-09-06
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Expires: 2001-03-27
Abstract
Abstract A surface acoustic wave device wherein a laminated structure comprised of a piezoelectric member and a metal electrode or electrodes is provided on a surface acoustic wave surface of an elastic body and an acoustic impedance discontinuous face is formed on the elastic body, so that a longitudinal wave generated by the laminated structure is reflected by the acoustic impedance discontinuous face to provide a transverse wave.
Inventors
- 👤 Shoichi Minagawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:41
CPC Classifications
H; H03; H03H; H03H3/00; H03H3/007; H03H3/08; G; G10; G10K; G10K15/00; H03H9/00; H03H9/02; H03H9/125; H03H9/145; H03H9/14502; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
183 words
A surface acoustic wave device, comprising: an elastic member having a first surface, a surface acoustic wave propagation path extending along said first surface, and a second surface which extends at an acute angle with respect to said first surface; a laminated structure provided on said first surface of said elastic member at a location along said surface acoustic wave propagation path, said laminated structure including a piezoelectric member and two metal electrodes which are provided on opposite sides of said piezoelectric member, one of said electrodes being disposed against said first surface; and means for applying an electric signal to said electrodes; said laminated structure generating a first wave in said elastic member traveling away from said first surface approximately normal thereto in response to application of said electric signal, said first wave being reflected by said second surface to provide a second wave traveling in said elastic member approximately parallel to said surface acoustic wave propagation path, said second wave producing a surface acoustic wave traveling along said surface acoustic wave propagation path at said first surface of said elastic member.
Claim 2
Dependent Claim
183 words
A surface acoustic wave device, comprising: an elastic member having a first surface, a surface acoustic wave propagation path extending along said first surface, and a second surface which extends at an acute angle with respect to said first surface; a laminated structure provided on said first surface of said elastic member at a location along said surface acoustic wave propagation path, said laminated structure including a piezoelectric member and two metal electrodes which are provided on opposite sides of said piezoelectric member, one of said electrodes being disposed against said first surface; and means for applying an electric signal to said electrodes; said laminated structure generating a first wave in said elastic member traveling away from said first surface approximately normal thereto in response to application of said electric signal, said first wave being reflected by said second surface to provide a second wave traveling in said elastic member approximately parallel to said surface acoustic wave propagation path, said second wave producing a surface acoustic wave traveling along said surface acoustic wave propagation path at said first surface of said elastic member.
Claim 3
Dependent Claim
30 words
A surface acoustic wave device according to claim 1, wherein said laminated structure is elongate and extends along said first surface substantially perpendicular to said surface acoustic wave propagation path.
Claim 4
Dependent Claim
38 words
A surface acoustic wave device according to claim 1, wherein the width of said one metal electrode in the direction of said surface acoustic wave propagation path is approximately equal to the wavelength of said surface acoustic wave.
Claim 5
Dependent Claim
31 words
A surface acoustic wave device according to claim 1, wherein said second surface is arranged at an angle within the range of from 20° to 75° relative to said first surface.
Claim 6
Dependent Claim
57 words
A surface acoustic wave device according to claim 1, wherein the width of said laminated structure in the direction of said surface acoustic wave propagation path is approximately equal to λ÷tan α, where α is the angle defined by said first surface relative to said second surface and λ is the wavelength of said surface acoustic wave.
Claim 7
Dependent Claim
21 words
A surface acoustic wave device according to claim 1, including protecting means for covering said laminated structure and said second surface.
Claim 8
Dependent Claim
20 words
A surface acoustic wave device according to claim 2, wherein said elongate laminated structure and said second surface are arcuate.
Claim 9
Dependent Claim
15 words
A surface acoustic wave device according to claim 1, wherein said laminated structure is tapered.
Claim 10
Dependent Claim
24 words
A surface acoustic wave device according to claim 1, wherein said one metal electrode has a width different than that of said piezoelectric member.
Claim 11
Independent Claim
163 words
A method for producing a surface acoustic wave device, comprising the steps of forming an elastic substrate having a first surface, then depositing a first metal film onto said first surface, then depositing a piezoelectric film onto said first metal film, then depositing a second metal film onto said piezoelectric film, said metal and piezoelectric films forming a laminated structure, thereafter evaporating an etching-resist material onto said device so as to leave a window adjacent and on one side of said laminated structure, then applying etching to said elastic member at said window to form a second surface which is arranged at an acute angle with respect to said first surface, said first and second surfaces each including a point which is located near an edge portion of said laminated structure and said second surface including a point contained in a line which passes through said laminated structure generally perpendicular to said first surface, and thereafter removing said etching-resist material from said device.
Claim 12
Independent Claim
163 words
A method for producing a surface acoustic wave device, comprising the steps of forming an elastic substrate having a first surface, then depositing a first metal film onto said first surface, then depositing a piezoelectric film onto said first metal film, then depositing a second metal film onto said piezoelectric film, said metal and piezoelectric films forming a laminated structure, thereafter evaporating an etching-resist material onto said device so as to leave a window adjacent and on one side of said laminated structure, then applying etching to said elastic member at said window to form a second surface which is arranged at an acute angle with respect to said first surface, said first and second surfaces each including a point which is located near an edge portion of said laminated structure and said second surface including a point contained in a line which passes through said laminated structure generally perpendicular to said first surface, and thereafter removing said etching-resist material from said device.
Claim 13
Dependent Claim
21 words
A method for producing a surface acoustic wave device according to claim 10, wherein said etching step includes selective chemical etching.
Claim 14
Dependent Claim
20 words
A method for producing a surface acoustic wave device according to claim 10, wherein said evaporating step includes oblique evaporation.
Claim 15
Independent Claim
117 words
A method for producing a surface acoustic wave device, comprising the steps of forming an elastic substrate having a first surface, then depositing a first metal film onto said first surface, then depositing a piezoelectric film onto said first metal film, then depositing a second metal film onto said piezoelectric film, said metal and piezoelectric films forming a laminated structure, thereafter evaporating an etching-resist material onto said device so as to leave a window adjacent and on one side of said laminated structure, then removing material from said elastic member at said window to form a second surface which is arranged at an acute angle with respect to said first surface, and then removing said etching-resist material.
Claim 16
Independent Claim
117 words
A method for producing a surface acoustic wave device, comprising the steps of forming an elastic substrate having a first surface, then depositing a first metal film onto said first surface, then depositing a piezoelectric film onto said first metal film, then depositing a second metal film onto said piezoelectric film, said metal and piezoelectric films forming a laminated structure, thereafter evaporating an etching-resist material onto said device so as to leave a window adjacent and on one side of said laminated structure, then removing material from said elastic member at said window to form a second surface which is arranged at an acute angle with respect to said first surface, and then removing said etching-resist material.
Claim 17
Dependent Claim
33 words
A method for producing a surface acoustic wave device according to claim 13, wherein said step of removing material from said elastic member at said window includes oblique irradiation by an ion beam.
Claim 18
Dependent Claim
20 words
A method for producing a surface acoustic wave device according to claim 13, wherein said evaporating step includes oblique evaporation.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-09-05 | 1987-03-07 | 1987-09-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-09-05 | 1991-03-07 | 1991-09-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-09-05 | 1995-03-07 | 1995-09-06 | $7700.00 | Window Closed / Lapsed |