US4396640A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and method for substrate temperature control
Assignee: DELAWARE A CORP OF DE, University of
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Filing: 1981-12-22
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Granted: 1983-08-02
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Expires: 2001-12-22
Abstract
Abstract An apparatus and a method for controlling the temperature of a substrate onto which thin films of semiconductor materials are vapor deposited. The apparatus contains a platen contacting a surface of said substrate over the entire length of the deposition zone; said platen having at least one cavity therein and a rounded edge where said substrate first contacts said platen of the beginning of said deposition zone.
Inventors
- 👤 Richard E. Rocheleau
- 👤 Dennis F. Brestovansky
- 👤 Peter J. Lutz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 11:52
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
92 words
A method of heating and controlling the temperature of a substrate in a vacuum deposition chamber in the manufacture of thin films of semiconductor material, said method comprising: contacting a side of said substrate to a platen over the entire length of a deposition zone, said platen having means for transferring heat with said substrate; heating said platen to a temperature; measuring the temperature of said platen; maintaining the temperature in a cavity in said platen equal to the temperature of said platen so as to control the temperature of said substrate.
Claim 2
Independent Claim
92 words
A method of heating and controlling the temperature of a substrate in a vacuum deposition chamber in the manufacture of thin films of semiconductor material, said method comprising: contacting a side of said substrate to a platen over the entire length of a deposition zone, said platen having means for transferring heat with said substrate; heating said platen to a temperature; measuring the temperature of said platen; maintaining the temperature in a cavity in said platen equal to the temperature of said platen so as to control the temperature of said substrate.
Claim 3
Dependent Claim
36 words
The method according to claim 1 wherein the temperature in the cavity is adjusted to equal the temperature of the platen by radiative heating the surface of said substrate opposite to the surface contacting said platen.
Claim 4
Dependent Claim
27 words
The method according to claim 2 wherein said measuring of the temperature is provided by a temperature sensor in said cavity, wherein said sensor is a thermocouple.
Claim 5
Dependent Claim
16 words
The method according to claim 3 wherein the thermocouple is in thermal communication with said substrate.
Claim 6
Dependent Claim
30 words
The method according to claim 1 wherein the surface of said platen contacting said substrate is sufficiently convex on the side contacting said substrate to prevent kinking of said substrate.
Claim 7
Dependent Claim
26 words
The method according to claim 5 wherein the surface of said platen contacting said substrate is coated with material to reduce the scratching of said substrate.
Claim 8
Dependent Claim
14 words
The method according to claim 6 wherein said platen is coated with hard chrome.
Claim 9
Dependent Claim
12 words
The method according to claim 7 wherein said substrate is copper foil.
Claim 10
Dependent Claim
28 words
The method according to claim 8 wherein the temperature of said substrate is adjusted such that a nonstoichiometric, cadmium-rich film of cadmium sulfide is deposited on said substrate.
Claim 11
Dependent Claim
17 words
The method according to claim 1, 2, 4, 5, 7 or 8 wherein the substrate is moving.
Claim 12
Independent Claim
101 words
An apparatus for heating a substrate in a deposition chamber comprising: a platen contacting a surface of said substrate over the entire length of a deposition zone, said platen having at least one cavity therein and a rounded edge where said substrate first contacts said platen at the beginning of said deposition zone; means for heating said platen; means for sensing the temperature of said platen; means for sensing the temperature of said substrate within said cavity; means for maintaining the temperature within said cavity equal to the temperature of said platen; and means for contacting said substrate to said platen.
Claim 13
Independent Claim
101 words
An apparatus for heating a substrate in a deposition chamber comprising: a platen contacting a surface of said substrate over the entire length of a deposition zone, said platen having at least one cavity therein and a rounded edge where said substrate first contacts said platen at the beginning of said deposition zone; means for heating said platen; means for sensing the temperature of said platen; means for sensing the temperature of said substrate within said cavity; means for maintaining the temperature within said cavity equal to the temperature of said platen; and means for contacting said substrate to said platen.
Claim 14
Dependent Claim
30 words
The apparatus according to claim 11 wherein the surface of said platen contacting said substrate is sufficiently convex on the side contacting said substrate to prevent kinking of said substrate.
Claim 15
Dependent Claim
81 words
The apparatus according to claim 12 wherein said means for sensing the temperature of said platen is a thermocouple in said platen and said means for sensing the temperature of said substrate is a thermocouple in said cavity, said heating means is at least one strip heater on the side of said platen opposite to the side of said platen in contact with said substrate, said thermocouple in said platen adjusts the temperature of said platen by controlling said strip heater(s).
Claim 16
Dependent Claim
59 words
The apparatus according to claim 13 further incorporating at least one radiative heater facing the side of said substrate opposite to the side contacting said platen, said radiative heater is controlled to adjust the substrate temperature through a differential temperature controller, said differential temperature controller is connected to said thermocouple in said platen and said thermocouple in said cavity.
Claim 17
Dependent Claim
30 words
The apparatus according to claim 14 wherein the temperature of said substrate is adjusted by the differential temperature controller adjusting the heat input to said substrate from said radiative heater.
Claim 18
Dependent Claim
19 words
The apparatus according to claim 15 wherein a plurality of radiative heaters are connected to said differential temperature controller.
Claim 19
Dependent Claim
18 words
The apparatus according to claim 16 wherein said apparatus incorporates a plurality of platens and differential temperature controllers.
Claim 20
Dependent Claim
34 words
The apparatus according to claim 17 wherein the temperature of said substrate is profiled over the deposition zone by adjusting the heating of the radiative heaters and the temperatures of the plurality of platens.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-08-01 | 1987-01-31 | 1987-08-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-08-01 | 1991-01-31 | 1991-08-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-08-01 | 1995-01-31 | 1995-08-02 | $7700.00 | Window Closed / Lapsed |