US4393308A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High current electron source
Assignee: Advantest Corp
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Filing: 1981-03-05
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Granted: 1983-07-12
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Expires: 2001-03-05
Abstract
Abstract A high current electron source with a narrow energy band of the type employed in an electron beam printer has a beam generating system consisting of a cathode and focusing electrodes and an anode with at least one electrode functioning to astigmatically focus at least one electron crossover in the low velocity range. For varying the position and shape of the crossover in a simple manner for adaptation to particular use conditions of the high current electron source, the Wehnelt electrode of the electron source consists of one or more cylinder lenses or of an electrostatic multipole element, or an electromagnetic multipole element is disposed in the plane of a conventional non-ferromagnetic Wehnelt electrode with a circular aperture for the electron beam. By pole reversal of the Wehnelt voltage or of the coil current and by changing the size of the current, the shape and azimuth position of the first crossover in the cathode space can be varied to any configuration. By so doing, an energy spread of the electrons is prevented and an optimum illumination of surfaces to be imaged is achieved.
Inventors
- 👤 Klaus Anger
- 👤 Juergen Frosien
- 👤 Burkhard Lischke
- 👤 Erich Plies
- 👤 Klaus Tonar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 20:44
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/06
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
97 words
In a high current electron source having a narrow energy band and having a beam generating system including a cathode, a plurality of focusing electrodes, and a deflection system and an illumination lens disposed after said anode in the direction of electron beam travel, the improvement comprising: one of said focusing electrodes being disposed between said cathode and said anode and consisting of non-movable means for generating an octupole effect on said electron beam, said means selectively varying the size of said cross-over and the orientation of said cross-over in a plane perpendicular to said electron beam.
Claim 2
Dependent Claim
97 words
In a high current electron source having a narrow energy band and having a beam generating system including a cathode, a plurality of focusing electrodes, and a deflection system and an illumination lens disposed after said anode in the direction of electron beam travel, the improvement comprising: one of said focusing electrodes being disposed between said cathode and said anode and consisting of non-movable means for generating an octupole effect on said electron beam, said means selectively varying the size of said cross-over and the orientation of said cross-over in a plane perpendicular to said electron beam.
Claim 3
Dependent Claim
25 words
The improvement of claim 1 further comprising an electron imaging system disposed after said beam generating system in the direction of said electron beam flow.
Claim 4
Dependent Claim
118 words
In a high current electron source having a narrow energy band and having a beam generating system including a cathode, a plurality of focusing electrodes, and a deflection system and an illumination lens disposed after said anode in the direction of electron beam travel, the improvement comprising: one of said focusing electrodes being disposed between said anode and said cathode and comprising an octupole element comprised of two quadrupole elements rotated relatively to one another by 45°, each of said quadrupole elements being supplied with an independently variable potential, said octupole element being non-movable and operable for selectively varying the size of said cross-over and the orientation of said cross-over in a plane perpendicular to said electron beam.
Claim 5
Dependent Claim
118 words
In a high current electron source having a narrow energy band and having a beam generating system including a cathode, a plurality of focusing electrodes, and a deflection system and an illumination lens disposed after said anode in the direction of electron beam travel, the improvement comprising: one of said focusing electrodes being disposed between said anode and said cathode and comprising an octupole element comprised of two quadrupole elements rotated relatively to one another by 45°, each of said quadrupole elements being supplied with an independently variable potential, said octupole element being non-movable and operable for selectively varying the size of said cross-over and the orientation of said cross-over in a plane perpendicular to said electron beam.
Claim 6
Dependent Claim
25 words
The improvement of claim 3 further comprising an electron imaging system disposed after said beam generating system in the direction of said electron beam flow.
Claim 7
Dependent Claim
127 words
In a high current electron source having a narrow energy band and having a beam generating system including a cathode, a plurality of focusing electrodes, and a deflection system and an illumination lens disposed after said anode in the direction of electron beam travel, the improvement comprising: one of said focusing electrodes being disposed between said cathode and said anode and comprising a non-ferromagnetic Wehnelt electrode having a central aperture therein for passage of said electron beam through said Wehnelt electrode in combination with an electromagnetic octupole element disposed perpendicularly to said electron beam and substantially in the plane containing said Wehnelt electrode, said octupole element consisting of two quadrupole element rotated relative to one another by 45°, said quadrupole elements being supplied with independently variable currents.
Claim 8
Dependent Claim
127 words
In a high current electron source having a narrow energy band and having a beam generating system including a cathode, a plurality of focusing electrodes, and a deflection system and an illumination lens disposed after said anode in the direction of electron beam travel, the improvement comprising: one of said focusing electrodes being disposed between said cathode and said anode and comprising a non-ferromagnetic Wehnelt electrode having a central aperture therein for passage of said electron beam through said Wehnelt electrode in combination with an electromagnetic octupole element disposed perpendicularly to said electron beam and substantially in the plane containing said Wehnelt electrode, said octupole element consisting of two quadrupole element rotated relative to one another by 45°, said quadrupole elements being supplied with independently variable currents.
Claim 9
Dependent Claim
25 words
The improvement of claim 5 further comprising an electron imaging system disposed after said beam generating system in the direction of said electron beam flow.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-07-11 | 1987-01-10 | 1987-07-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-07-11 | 1991-01-10 | 1991-07-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-07-11 | 1995-01-10 | 1995-07-12 | $7700.00 | Window Closed / Lapsed |