Process for manufacture of thin-film magnetic bubble domain detection device

Claim 1

A process for manufacturing a thin-film magnetic bubble domain detection device comprising the steps of: depositing a spacer and then a conductor film onto a substrate, and removing said conductor film from a predetermined region using a mask; thereafter depositing a magnetic field sensing film onto said substrate over an area including said predetermined region without removing said mask, and then depositing a first dielectric film onto said substrate over a second area including sid predetermined region, followed by the removal of said magnetic field sensing film and said first dielectric film from the portions of said first and second areas other than said predetermined region by lifting off said first mask; delineating said conductor film for conductor leads, sid magnetic field sensing film for a sensing element, and said first dielectric film into a detection device configuration using a second mask; and depositing a second dielectric film without removing said second mask, and then removing said second dielectric film from said conductor film, said magnetic field sensing film and said first dielectric film by lifting off said second mask.